高端/智能制造装备是先进制造技术、信息技术和智能技术的集成和融合。高性能传感器系统是高端装备实现智能化的首要前提。课题组长期从事微纳制造与先进传感技术的研究工作，建立了槽膜分段质量块与多梁双质量块结构的MEMS压阻式传感器力学模型与解析表达式，发明了槽膜式和多梁双质量结构的MEMS压阻敏感芯片，研制出高动态压力/加速度特种传感器，解决了压力和加速度的高灵敏度与高频响测量难题；探索了耐高温压阻式压力传感器的敏感机理，提出了压阻力敏芯片的耐高温制备工艺，解决了高温条件下的压力测量难题，克服了传统压阻传感器无法胜任高温环境的缺陷；建立了变截面悬臂梁与电容式圆板结构的MEMS谐振式传感器力学模型，揭示了MEMS谐振传感器的敏感机理；发明了变截面悬臂梁和电容式薄板结构的MEMS谐振敏感芯片，研制出了MEMS谐振式传感器，解决了流体黏密度等在线测量难题，满足了在航空航天、高端装备、国防及化工等领域的应用需求。

代表性研究成果

1. Libo Zhao, Yihe Zhao, Yong Xia, Zhikang Li, Jie Li, Jiawang Zhang, Jiuhong Wang, Xiangyang Zhou*, Yuanjie Li, Yulong Zhao and Zhuangde Jiang. A Novel CMUTs-based Resonant Biochemical Sensor Using Electrospinning Technology [J]. IEEE Transactions on Industrial Electronics, 66(9): 7356-7365, 2019.9 (IF: 8.23)
2. Tingzhong Xu, Libo Zhao*, Zhuangde Jiang, Shuaishuai Guo, Zhikang Li*, Ping Yang, Guoxi Luo, Lin Sun, Liangchi Zhang. Equivalent circuit models of cell and array for resonant cavity-based piezoelectric micromachined ultrasonic transducer [J]. IEEE transactions on ultrasonics, ferroelectrics, and frequency control, 67(10): 2103-2118, 2020.10 (IF: 2.72)
3. Xiangguang Han, Qi Mao*, Libo Zhao*, Xuejiao Li, Li Wang, Ping Yang, Dejiang Lu, Yonglu Wang, Xin Yan, Songli Wang, Nan Zhu and Zhuangde Jiang. Novel resonant pressure sensor based on piezoresistive detection and symmetrical in-plane mode vibration [J]. Microsystems & Nanoengineering, 6: 95(11pp), 2020.11 (IF: 7.12)
4. Zhikang Li, Libo Zhao*, Jie Li, Yihe Zhao, Tingzhong Xu, Shuaishuai Gu, Zicheng Liu, Guoxi Luo, Kaiming Hu, Wenming Zhang* and Zhuangde Jiang. Nonlinear behavior analysis of electrostatically actuated multilayer anisotropic microplates with residual stress [J]. Composite Structures, 255: 112964(14pp), 2021.1 (IF: 5.41)

课题组针对智能机器人触觉感知、人体手势识别为等主要应用领域，开展柔性多参量集成传感器的研发工作，突破传感器阵列一体化加工、轻薄封装等关键技术，研究传感信号特征提取方法，实现对环境参量、人体姿态、物体材质、突发事件等信息的高效识别、分析与决策。

代表性科研成果

1. Zhikang Li, Shiming Zhang*, Yihang Chen, Haonan Ling, Libo Zhao*, Guoxi Luo, Xiaocheng Wang, Martin C. Hartel, Hao Liu, Yumeng Xue, Samad Ahadian, Nureddin Ashammakhi, Mehmet R. Dokmeci, Zhuangde Jiang and Ali Khademhosseini*. Gelatin methacryloyl-based tactile sensors for medical wearables [J]. Advanced Functional Materials, 30(49): 2003601(11pp), 2020.12.1 (IF: 18.08)
2. Guoxi Luo, Qiankun Zhang, Min Li, Ke Chen, Wenke Zhou, Yunyun Luo, Zhikang Li, Lu Wang, Li, Libo Zhao*, Kwok Siong Teh*, Zhuangde Jiang. A flexible electrostatic nanogenerator and self-powered capacitive sensor based on electrospun polystyrene mats and graphene oxide films[J]. Nanotechnology, 32: 405402(10pp), 2021.7 (IF: 3.87)
3. Min Li, Yunyun Luo, Chen Jia, Qiankun Zhang, Guoxi Luo*, Libo Zhao*, Rabah Boukherroub, Zhuangde Jiang. Facile Synthesis of Bimetal Nickel Cobalt Phosphate Nanostructures for High-Performance Hybrid Supercapacitors [J], Journal of Alloys and Compounds, 893: 162340(9pp), 2021.10 (IF: 5.31)
4. Yong Xia, Aifei Pan, David W. Gardner, Sikai Zhao, Adrian K. Davey, Zhou Li, Libo Zhao*, Carlo Carraro, Roya Maboudian*. Well-connected ZnO nanoparticle network fabricated by in-situ annealing of ZIF-8 for enhanced sensitivity in gas sensing application [J]. Sensors and Actuators: B. Chemical, 344: 130180(12pp), 2021.5. (IF: 7.46)

量子精密测量技术作为量子信息领域三大技术之一，在国防和工业领域有着潜在重要的应用。基于原子自旋效应的超高灵敏量子磁强计，灵敏度达到fT甚至以下，可以对脑磁等极微弱生物磁场探测，被用来研制心脑磁影像设备，服务于癫痫、抑郁症等重大疾病的诊断。基于离子囚禁体系的量子精密测量系统可以测量10^-24N的极微弱力和1nV/m的超高分辨率电场梯度，有望在前沿基础科学领域中发挥重要作用。

课题组主要研究方向为振动能量收集及自供电传感技术，致力于机电耦合非线性振动理论分析、压电、电磁、摩擦电振动能量收集器设计及制造，摩擦电振动传感器设计及制造，自供电电源管理设计，低功耗无线节点开发和自供电物联网应用等核心关键技术研究。

代表性研究成果

1. Lu Wang, Tianyiyi He, Zixuan Zhang, Libo Zhao*, Chengkuo Lee*, Guoxi Luo, Qi Mao, Ping Yang, Qijing Lin, Xiang Li, Ryutaro Maeda and Zhuangde Jiang. Self-sustained autonomous wireless sensing based on a hybridized TENG and PEG vibration mechanism [J]. Nano Energy, 80: 105555(12pp), 2021.2 (IF: 16.06)
2. Lu Wang, Jianjun Ding*, Zhuangde Jiang, Guoxi Luo, Libo Zhao*, Dejiang Lu, Xiao Yang, Ryutaro Maeda. A Packaged Piezoelectric Vibration Energy Harvester with High Power and Broadband Characteristics [J]. Sensors and Actuators A-Physical. 295: 629-636, 2019.8 (IF: 2.739)
3. Lu Wang, Guoxi Luo*, Zhuangde Jiang, Fuzheng Zhang, Libo Zhao*, Ping Yang, Qijing Lin, Ryutaro Maeda. Broadband Vibration Energy Harvesting for Wireless Sensor Node Power Supply in Train Container [J]. Review of Scientific Instruments, 90(12): 125003(9pp.), 2019.12 (IF: 1.587)