科技奖励

 

1)  2017年度,“高动态MEMS压阻式特种传感器及系列产品”,国家技术发明二等奖,主要完成人:赵玉龙、赵立波、田边、蒋庄德等

2)  2007年度,“耐高温压力传感器设计、制造关键技术及系列产品开发”,国家技术发明二等奖,主要完成人:蒋庄德、赵玉龙、赵立波

3)  2005年度,“棉条检测硅微传感器的研制及其应用”,陕西省科学技术一等奖,主要完成人:蒋庄德、赵玉龙、赵立波

4)  2006年度,“耐高温压力传感器设计、制备技术及系列产品开发”,教育部技术发明一等奖,主要完成人:蒋庄德、赵玉龙、赵立波

5)  2012年度,“危化品安全储运状态检测MEMS传感器及系统”,陕西省科学技术一等奖,主要完成人:赵玉龙、蒋庄德、田边、王瑞、赵立波

6)  2005年度,SOI(梁膜结合)耐高温压力传感器,西安市科学技术一等奖,主要完成人:蒋庄德、赵玉龙、赵立波

 

 

授权发明专利

 

1)  Method of On-Line Rapid Fluid Density Measurement Using a Piezoresistive Micro-Cantilever,美国发明专利,授权号:US 13/658,639,授权日:2016.1.5,发明人:蒋庄德、张桂铭、赵立波等。

2)一种分段质量块应力集中结构微压传感器芯片及制备方法,中国,发明专利,授权号:ZL 201510131116.3,授权日:2017.5.17,发明人:赵立波、徐廷中、蒋庄德等。

3)一种浮雕式岛膜应力集中结构微压传感器芯片及制备方法,中国,发明专利,授权号:ZL 201510130249.9,授权日:2017.3.29,发明人:赵立波、徐廷中、蒋庄德等。

4)一种多梁式双质量块加速度传感器芯片及其制备方法,中国,发明专利,授权号:ZL 201410012680.9,授权日:2017.2.22,发明人:赵立波、许煜、蒋庄德等。

5)一种自增强圆筒式双液体腔结构的耐高温超高压力传感器,中国,发明专利,授权号:ZL 201410782608.4,授权日:2017.1.11,发明人:赵立波、郭鑫、薛方正等。

6)一种基于MEMS双加热器的热导率和热扩散系数传感器,中国,发明专利,授权号:ZL 201310578646.3,授权日:2016.10.19,发明人:赵立波、陈闯、蒋庄德等。

7)一种微压力传感器及其制备与检测方法,中国,发明专利,授权号:ZL 201410240293.0,授权日:2016.4.27,发明人:赵立波、李支康、蒋庄德等。

8)一种磨削力传感器及其测量方法,中国,发明专利,授权号:ZL 201310736739.4,申请日:2013.12.26,授权日:2016.3.30,发明人:赵立波、乔智霞、薛方正等。

9)一种高温CMUT压力传感器及其制备方法,中国,发明专利,授权号:ZL 201310084858.6,申请日:2013.3.15,授权日:2016.2.24,发明人:赵立波、李支康、蒋庄德等。

10)一种磁激励压阻拾振式MEMS谐振器的主动频率调谐方法,中国,发明专利,授权号:ZL 201310143659.8,申请日:2013.4.23,授权日:2016.1.13,发明人:赵立波、张桂铭、蒋庄德等。

11)基于CMUT的海洋生化物质监测传感器及其制备与测量方法,中国,发明专利,授权号:ZL 201310364961.6,申请日:2013.8.20,授权日:2016.1.13,发明人:赵立波、李支康、蒋庄德等。

12)一种基于CMUT的温度传感器及其制备方法与应用方法,中国,发明专利,授权号:ZL 201310084404.9,申请日:2013.3.15,授权日:2015.4.29,发明人:赵立波、叶志英、李支康、蒋庄德等。

13)  一种采用压阻式微悬臂梁在线快速测量流体密度的方法,中国发明专利,授权号:ZL 201210093049.7,授权发文日:2014.1.29,发明人:赵立波、张桂铭、蒋庄德等。

14)  一种用于痕量生化物质检测的CMUT及其制备方法,中国发明专利,授权号:ZL 201110399567.7,授权发文日:2014.1.27,发明人:赵立波、李支康、蒋庄德等。

15)  一种电容式微加工超声传感器及其制备与应用方法,中国发明专利,授权号:ZL 201210068766.4,授权发文日:2013.12.31,发明人:赵立波、李支康、蒋庄德等。

16)  一种基于MEMS技术的热扩散率传感器芯片及其制备方法,中国发明专利,授权号:ZL 201110401838.8,授权发文日:2013.11.27,发明人:赵立波、周睿、蒋庄德等。

17)  一种复合式MEMS密度传感器,中国发明专利,授权号:ZL 201210126237.5,授权日:2013.11.6,发明人:赵立波、徐龙起、黄恩泽等。

18)  基于ZnO纳米线阵列的压力传感器芯片及其制备方法,中国发明专利,授权号:ZL 201210126095.2,授权日:2013.11.6,发明人:蒋庄德、许煜、赵立波

19)  一种双C型压电式动态轴重传感器,中国发明专利,授权号:ZL 201110081036.3,授权日:2013.4.17,发明人:赵立波、梁建强、赵玉龙等。

20)  基于MEMS技术的同时测量流体密度、压力和温度的集成流体传感器,中国发明专利,授权号:ZL 201110180191.0,授权日:2013.3.13,发明人:赵立波、黄恩泽、张桂铭等。

21)  一种复合式MEMS耐高温超高压力传感器,中国发明专利,授权号:ZL 201010522858.6,授权日:2012.7.4,发明人:赵立波、郭鑫、孟夏薇等。

22)       MEMS筒式耐高温超高压力传感器,中国发明专利,授权号:ZL 201010621888.2,授权日:2012.6.31,发明人:赵立波、郭鑫、赵玉龙等。

23)       基于微机电系统技术的密度传感器芯片及其制备方法,中国发明专利,授权号:ZL 200910219371.8,授权日:2011.11.16,发明人:赵立波、黄恩泽、蒋庄德等。

24)       基于微机电系统技术的粘度传感器芯片及其制备方法,中国发明专利,授权号:ZL 200910219368.6,授权日:2011.8.31,发明人:赵立波、张桂铭、蒋庄德等。

 

 

发表论文

1)Libo Zhao∗, Yingjie Hu, Rahman Hebibul, Yong Xia, Linya Huang, Yulong Zhao, Zhuangde Jiang. Density measurement sensitivity of micro-cantilevers influenced by shape dimensions and operation modes [J], Sensors and Actuators B: Chemical, 245: 574-582, 2017.2.1. (SCI: ER4HW, EI: 20170703339190, IF: 5.401)

2)Libo Zhao*, Jie Li, Zhikang Li, Jiawang Zhang, Yihe Zhao, Jiuhong Wang, Yong Xia, Ping Li, Yulong Zhao, Zhuangde Jiang. Fabrication of Capacitive Micromachined Ultrasonic Transducers with Low-Temperature Direct Wafer-Bonding Technology [J], Sensors and Actuators A: Physical, 264: 63-75, 2017.9.1. (SCI: FI2NF, EI: 20173204028730, IF: 2.499)

3)Tingzhong Xu, Dejiang Lu, Libo Zhao*, Zhuangde Jiang, Hongyan Wang*, Xin Guo, Zhikang Li, Xiangyang Zhou and Yulong Zhao. Application and Optimization of Stiffness Abruption Structures for Pressure Sensors with High Sensitivity and Anti-Overload Ability [J], Sensors, 17(9): 1965 (25pp.), 2017.8.26. (SCI: FH8WD, EI: 20173504105732, IF: 2.677)

4)Dezhi Wu, Yu Sun, Kwok Siong Teh, Yuchao Zhu, Yihui Luo, Lei Deng, Libo Zhao, Guoxi Luo, Yang Zhao, Lingyun Wang and Daoheng Sun. Investigation of electrohydrodynamic behaviors from open planar solution under rod-induced electrospinning [J], Journal of Physics D: Applied Physics, 50: 455602(10pp), 2017.10.23.

5)Tingzhong Xu, Libo Zhao*, Zhuangde Jiang, Yu Xu, Yulong Zhao. Modeling and analysis of a novel combined peninsula–island structure diaphragm for ultra-low pressure sensing with high sensitivity [J], Journal of Physics D: Applied Physics, 49(7): 075110 (26pp), 2016.1. (SCI: DC7MG, EI: 20160701924020, IF: 2.588)

6)Yu Xu, Libo Zhao*, Zhuangde Jiang, Jianjun Ding, Niancai Peng and Yulong Zhao. A Novel Piezoresistive Accelerometer with SPBs to Improve the Tradeoff between the Sensitivity and the Resonant Frequency [J], Sensors, 16(2): 210 (15pp), 2016.2.6. (SCI: DG0WX, EI: 20160701912944, IF: 2.677)

7)Yue Chuang, Yu Yingjian, Wu Zhenguo, Sun Shibo, He Xu, Li JunTao, Zhao Libo, Wu Suntao, Li Jing*, Kang Junyong, Lin Liwei. High stability induced by the TiN/Ti interlayer in 3D Si/Ge nanorod arrays as anode in Micro Lithium Ion Battery [J], ACS Applied Materials & Interfaces, 8(12):7806-7810, 2016.3.8. (SCI: DI5DQ, EI: 20161702282143, IF: 7.145)

8)Tingzhong Xu, Libo Zhao*, Zhuangde Jiang, Xin Guo, Jianjun Ding, Wei Xiang, Yulong Zhao. A high sensitive pressure sensor with the novel bossed diaphragm combined with peninsula-island structure [J], Sensors and Actuators A: Physical, 244: 66-76, 15 June 2016. (SCI: DN8JC, EI: 20161702305684, IF: 2.499)

9)Yu Xu, Libo Zhao*, Zhuangde Jiang, Jianjun Ding, Tingzhong Xu, Yulong Zhao. Analysis and design of a novel piezoresistive accelerometer with axially stressed self-supporting sensing beams [J], Sensors and Actuators A: Physical, 247: 1-11, 15 August 2016. (SCI: DW7JX, EI: 20162502514644, IF: 2.499)

10)Libo Zhao*, Yingjie Hu, Tongdong Wang, Jianjun Ding, Xixiang Liu, Yulong Zhao, Zhuangde Jiang. A MEMS Resonant Sensor to Measure Fluid Density and Viscosity under Flexural and Torsional Vibrating Modes [J], Sensors, 16(6): 830 (15pp.), 2016.6.6. (SCI: DP8OC, EI: 20162402485252, IF: 2.677)

11)Libo Zhao*, Yingjie Hu, Rahman Hebibul, Jianjun Ding, Tongdong Wang, Tingzhong Xu, Xixiang Liu, Yulong Zhao and Zhuangde Jiang. A Novel Slope Method for Measurement of Fluid Density with a Micro-cantilever under Flexural and Torsional Vibrations [J], Sensors, 16(9): 1471 (13pp.), 2016.9.11. (SCI: DZ0KN, EI: 20163802820582, IF: 2.677)

12)Libo Zhao*, Tingzhong Xu, Rahman.hebibul, Zhuangde Jiang, Jianjun Ding, Niancai Peng, Xin Guo, Yu Xu, Hongyan Wang, Yulong Zhao. A bossed diaphragm piezoresistive pressure sensor with peninsula-island structure for ultra-low-pressure range with high sensitivity [J], Measurement Science and Technology, 27(12): 124012 (21pp), 2016.10.25. (SCI: DN8JC, EI: 20161702305684, IF: 1.585)

13) Zhikang Li, Libo Zhao*, Zhuangde Jiang, Zhiying Ye, Lu Dai and Yulong Zhao. Mechanical behavior analysis on electrostatically actuated rectangular microplates [J], Journal of Micromechanics and Microengineering, 25(3): 035007(12pp.), 2015.2. (SCI: CC3PQ, EI: 20150900589764, IF: 1.725)

14)Zhikang Li, Libo Zhao*, Zhuangde Jiang, Zhiying Ye, and Yulong Zhao. An improved method for the mechanical behavior analysis of electrostatically actuated microplates under uniform hydrostatic pressure [J], IEEE/ASME Journal of Microelectromechanical Systems, 24(2): 474-485, April 2015. (SCI: CF1BI, EI: 20151500731903, IF: 1.915)

15)Zhikang Li, Libo Zhao*, Zhuangde Jiang, Sina Akhbari, Jianjun Ding, Yihe Zhao, Yulong Zhao, and Liwei Lin. Capacitive micromachined ultrasonic transducer for ultra-low pressure measurement: Theoretical study [J], AIP Advances, 5(12): 127231 (10pp), 2015.12.24. (SCI: DA1ZY, EI: 20160101763792, IF: 1.590)

16) Yuan Zhong, Chuang Yue, Binbin Chen, Shibo Sun, Mingsen Zheng, Libo Zhao, Suntao Wu, Jing Li*, Junyong Kanga and Liwei Lin. Synthetic preparation of novel 3D Si/TiO2–Ti2O3 composite nanorod arrays as anodes in lithium ion batteries [J], RSC Advances, 5(47): 37399-37404, 2015.4. (SCI: CG9QT, EI: 20151900835059, IF: 3.289)

17)  Libo Zhao, Longqi Xu, Guiming Zhang, Zhuangde Jiang, Yulong Zhao, Jiuhong Wang, Xiaopo Wang, and Zhigang Liu. In-Situ Measurement of Fluid Density Rapidly Using a Vibrating Piezoresistive Microcantilever Sensor Without Resonance Occurring [J], IEEE Sensors Journal, 14(3): 645-650, 2014.SCI源刊, EI: 20140417220056, IF: 1.52

18)Guiming Zhang, Libo Zhao*, Zhuangde Jiang, Longqi Xu, Yulong Zhao, Jiuhong Wang, Xiaopo Wang and Zhigang Liu. DC current measurement utilizing a reasonant magnetically actuated piezoresistive microcantilever [J], Measurement Science and Technology, 24(12): 125102(6pp), 2013.SCI: 260LZ, EI: 20134917060933, IF: 1.435

19)  Libo Zhao, Xin Guo, Xiawei Meng, Rahman Hebibul, Yulong Zhao, Jianzhu Wang and Zhuangde Jiang. An ultra-high pressure sensor with cylinder structure [J], Journal of Mechanical Science and Technology, 27(8): 2383-2389, 2013.SCI: 219YS, EI: 20133916792465, IF: 0.616

20)  Guiming Zhang, Libo Zhao*, Longqi Xu, Zhuangde Jiang, Yulong Zhao, Xiaopo Wang, and Zhigang Liu. Active Frequency Tuning for Magnetically Actuated and Piezoresistively Sensed MEMS Resonators [J], IEEE Electron Device Letters, 34(7): 921-923, 2013.SCI: 208NL, EI: 20132916512679, IF:2.789

21)  Zhikang Li, Libo Zhao*, Zhiying Ye, Hongyan Wang, Yulong Zhao and Zhuangde Jiang. Resonant frequency analysis on an electrostatically actuated microplate under uniform hydrostatic pressure [J], J. Phys. D: Appl. Phys. 46(19): 195108 (7pp), 2013.SCI: 133OC, EI: 20131916309826 , IF: 2.528

22)  Li-bo ZHAO, Long-qi XU, Gui-ming ZHANG, Yu-long ZHAO, Xiao-po WANG, Zhi-gang LIU, Zhuang-de JIANG. A trapezoidal cantilever density sensor based on MEMS technology [J], Journal of Zhejiang University-SCIENCE C (Computers & Electronics), 14(4):274-278, 2013.SCI: 123DN, EI: 20132116353076, IF: 0.297

23)  Guiming Zhang, Libo Zhao*, Zhuangde Jiang, Shuming Yang, Yulong Zhao, Enze Huang, Rahman·Hebibul, Xiaopo Wang and Zhigang Liu. Surface stress-induced deflection of a microcantilever with various widths and overall microcantilever sensitivity enhancement via geometry modification [J], Journal of Physics D: Applied Physics, 44(42): 425402(11pp), 2011.SCI: 842IF, EI: 20114414481155, IF: 2.528

24)  Libo Zhao, Yulong Zhao, Yuanhao Liu, Jianbo Li, Jianqiang Liang, and Zhuangde Jiang. Development of a Piezoresistive Force Transmitter for Gauging Yarn's Linear Density in High-Speed Textile Machinery [J], IEEE Sensors Journal, 11(10): 2279-2285, 2011.SCI: 807RM, EI: 20113414250316, IF: 1.52