论文期刊

Impact of ultrathin Al2O3 interlayer on thermal stability and leakage current properties of TiO2/Al2O3 stacking dielectrics




作者: Hong-Bo Wang, Da-Yan Ma, Fei Ma, Ke-Wei Xu
发表/完成日期: 2012-08-08
期刊名称: Journal of Vacuum Science & Technology B
期卷:
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论文简介
Impact of ultrathin Al2O3 interlayer on thermal stability and leakage current properties of TiO2/Al2O3 stacking dielectrics