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论文期刊

论文标题    Impact of ultrathin Al2O3 interlayer on thermal stability and leakage current properties of TiO2/Al2O3 stacking dielectrics
作者    Hong-Bo Wang, Da-Yan Ma, Fei Ma, Ke-Wei Xu
发表/完成日期    2012-08-08
期刊名称    Journal of Vacuum Science & Technology B
期卷   
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论文简介    Impact of ultrathin Al2O3 interlayer on thermal stability and leakage current properties of TiO2/Al2O3 stacking dielectrics
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