我的科研 - 马 飞
论文标题 | Diffusion-controlled formation mechanism of dual-phase structure during Al induced crystallization of SiGe |
作者 | Zhang, TW; Ma, F; Zhang, WL |
发表/完成日期 | 2012-02-01 |
期刊名称 | APPLIED PHYSICS LETTERS |
期卷 | 100 (7) |
相关文章 | |
论文简介 | Aluminum induced crystallization of amorphous SiGe at low temperature is studied and a dual-phase stacked structure with different compositions emerges when the annealing temperature is higher than a critical value. This behavior is very sensitive to the oxidization state of the interlayer. A model based on energetics is proposed to elucidate this temperature dependent behavior. Thermodynamically, it can be ascribed to the competition between grain-boundary-mediated and interface-mediated crystallization and kinetically, it stems from the different diffusion rates of Si and Ge. The results are useful to the design and fabrication of high-efficiency solar cells. |