||Abstract. The telecentric arrangement in digital holographic microscopy (DHM), considered to be a pure-physical
compensation for defocus aberration introduced by microscope objective (MO), shows shift-invariant behavior.
Its optical arrangement requires precise adjustment of the distance between MO aperture stop and
collimated lens. However, it is difficult to measure and quantify the distance even by monitoring the spatial frequency
spectrum of recorded hologram in the absence of object. Thus the misalignment results in the residual
defocus aberration in the telecentric arrangement. The total aberrations compensation for misalignment of telecentric
arrangement in DHM is presented, in which a posteriori surface fitting method based on Zernike polynomials
is performed to eliminate the residual defocus aberration as well as other primary aberrations. The
approach reduces the difficulty in precise alignment of the telecentric arrangement and decreases the measurement
error caused by aberrations in construction. Three-dimensional retrieval of the height for micro-hole
arrays with high-spatial-frequency content demonstrates the feasibility of the method. © 2014 Society of Photo-
Optical Instrumentation Engineers (SPIE) [DOI: 10.1117/1.OE.53.11.112307]
Keywords: digital holographic microscopy; total aberrations compensation; telecentric arrangement; misalignment; Zernike surface
Paper 140123SS received Jan. 22, 2014; revised manuscript received Mar. 5, 2014; accepted for publication Mar. 6, 2014; published
online Apr. 3, 2014.