Fabrication of Through Micro-hole Arrays in Silicon Using Femtosecond Laser Irradiation and Selective Chemical Etching
Release Time:2025-11-23
Hits:
- Date:
- 2025-11-23
- Impact Factor:
- 0.875
- Title of Paper:
- Fabrication of Through Micro-hole Arrays in Silicon Using Femtosecond Laser Irradiation and Selective Chemical Etching
- Journal:
- Chinese Physics Letters
- Volume:
- 32
- Issue:
- 10
- Page Number:
- 107901-1-4
- ISSN:
- 0256-307X
- Translation or Not:
- No
- Date of Publication:
- 2015-10-01
- Included Journals:
- SCI
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