具有晶粒尺寸差异的Cu/Ta 纳米多层膜的制备方法
Release Time:2025-04-30
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- Title:
- 具有晶粒尺寸差异的Cu/Ta 纳米多层膜的制备方法
- Disigner of the Invention:
- 黄平，许明，王飞，徐可为
- Type of Patent:
- Invent
- Application Number:
- ZL 2009 1 0219558.8
- Service Invention or Not:
- No
- Application Date:
- 2011-11-16
- Date:
- 2025-04-30
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