一种复合式MEMS耐高温超高压力传感器
Release Time:2025-04-30
Hits:
- Title:
- 一种复合式MEMS耐高温超高压力传感器
- Type of Patent:
- Invent
- Application Number:
- 授权号：ZL 2010 1 052285
- Service Invention or Not:
- No
- Application Date:
- 2010-10-28
- Date:
- 2025-04-30
- Prev One:MEMS筒式耐高温超高压力传感器
- Next One:基于微机电系统技术的粘度传感器芯片及其制备方法