Date:

2026-09-14

Title of Paper:

Impact of ultrathin Al2O3 interlayer on thermal stability and leakage current properties of TiO2/Al2O3 stacking dielectrics

Journal:

Journal of Vacuum Science & Technology B

Co-author:

Hong-Bo Wang, Da-Yan Ma, Fei Ma, Ke-Wei Xu

Translation or Not:

No

Date of Publication:

2012-08-08