Dr. Wei gave a lecture on MEMS Resonant Sensor in CSMNT Training Course
发布时间：2016-10-22
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- 发布时间：
- 2016-10-22
- 文章标题：
- Dr. Wei gave a lecture on MEMS Resonant Sensor in CSMNT Training Course
- 内容：
Invited by Chinese Society of Micro and Nano Technology (CSMNT), Dr. Wei gave a lecture on MEMS Resonant Sensor in the CSMNT Training Course. Background of MEMS resonantors, mechanism of resonant sensing, characterization method, microfabrication process and typical resonant sensors are covered in this lecture.