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论文期刊

论文标题    Development of a polysilicon chemical vapor deposition reactor using the computational fluid dynamics method
作者    Huang, Z., Liu, C., Yuan, X., Liu, S., Liu, F
发表/完成日期    2013-09-04
期刊名称    ECS Journal of Solid State Science and Technology
期卷   
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论文简介    1
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