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Paper

Paper Name    On stress singularity at the interface edge between piezo-electric thin film and elastic substrate
Author    F Shang, T Kitamura
Publication/Completion Time    2005-09-30
Magazine Name    Microsystem Technologies
Vol    11(8-10),
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Paper description    Abstract This paper deals with the modeling aspects of the stress singularity at the interface edges between piezoelectric thin film and elastic substrate. The electroelastic problem of a transversely isotropic piezoelectric thin film attached to an elastic substrate is treated theoretically. Emphasis is placed on the investigation of the singularity in the stress field at the free edge of interface. The eigen-equation determining the order of the singularity is derived. Numerical results for two edge geometries are presented for PZT film/silicon substrate combinations. It is shown that the orders of the stress singularities range from 0.1 to 0.3 for the considered cases. Moreover, piezoelectric effects may alter the singularity order to some extent, but not significantly.
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