Research Fields

  • 1. 微纳制造及智能传感

 

针对微纳结构多材料表/界面调控的关键难题，提出了微纳尺度域内多材料表/界面的结构场调控成型与驱动理论模型，发现了多材料体相结构的调控机制，提出了多材料表/界面设计与精确调控的理论模型，发展了多材料表/界面结构的纳米精度制造与微域调控方法，突破了微域光信息的精确操控难题。

 

图1 多材料表/界面结构的纳米精度外场调控制造原理与方法

  • 2. 光电子器件的跨尺度制造及应用

针对大幅面微纳米结构一致性制造的难题，发展了外场调控的连续滚压印制造技术，实现了幅面为700×800 mm2，特征结构尺寸<500nm周期的二维光栅、直径650 mm的圆光栅及ϕ500mm的“超精密圆光栅角度传感器”的高精度制造。开发的在非平面结构化光阑，保证了异形面上微结构图形的一致性，解决了航天用红外探测器视场不规则、一致性较差的难题，推广应用于国防工业的高精密测量系统或装置中。

图2 大幅面二维光栅的跨尺度制造及应用

  • 3. 超精密测量

提出了弱干涉信号的位姿解析理论模型，发展了时空域光栅纳米级细分新技术，实现了光栅信号的实时全参量闭环补偿和多自由度读数系统，测量分辨率达到0.25 nm。技术上不仅突破了国外技术封锁、产品禁运的卡脖子局面，自制知识产权的核心技术在国际行业内上形成了互补性。

图3 二维光栅弱干涉信号的读数技术与读数系统

Science Project

No entries were found.
Project number Project name Project origin Start time Roles Project kind
2019JZZY010437 七轴五联动立卧两用精密镗铣加工中心关键技术研究及产业化 山东省重点研究计划课题 2019-01~2021-12 Leader Vertical project
2019ZX04013-001 国产光栅部件在数控机床运动精度提升中的示范应用 国家科技重大专项 2019-01~2020-12 Leader Vertical project
51625504 国家杰出青年科学基金 国家自然科学基金项目 2017-01~2021-12 Leader Vertical project
2017ZX04011002-003 机床精度测量系统开发及精度保持性验证国家科技重大专项(04)子课题“”（ ），2017/01-2019/12，100万，刘红忠 国家科技重大专项(04) 2017-01~2019-12 Leader Vertical project
51427805 光学构件空间位姿监测用双频复合二维光栅多自由度纳米测量系统研究 国家重大科研仪器专项 2015-1~ 负责人 Vertical project
SK201401A53-01 机床运行状态下的智能化技术及其与数控系统集成 国家科技重大专项 2013-1~2015-1 负责人 Vertical project
51275400 柔性大面积高密度液体微镜阵列实时/域调焦及预应力释放压印成型工艺 国家自然科学基金项目 2013-1~ 负责人 Vertical project
91223203 纳米制造技术发展战略研究及路线图 国家自然科学基金项目 2013-1~ 负责人 Vertical project
2011ZX04014-071 高档数控机床用长光栅制造及读数技术 高档数控机床专项 2011-1~ 负责人 Vertical project
2011ZX04014-071 高档数控机床用长光栅制造及读数方法研究 科技重大专项 2011-1~ 负责人 Vertical project
50975226 大面积纳米晶太阳能电池的柔性化及敏化染料压印植入制造工艺 国家自然科学基金项目 2010-1~2012-1 负责人 Vertical project
2009CB724202 纳米结构的外场诱导流变成形规律与控制 973项目 2009-1~2013-1 负责人 Vertical project
729092923040 电毛细力驱动的纳米结构压印成形及其流变和界面行为研究 国家基金委纳米制造的基础研究重大研究计划重点项目 2009-1~2011-1 负责人 Vertical project
729092923040 电毛细力驱动的纳米结构压印成形及其流变和界面行为研究 基金委重大研究计划重点项目 2009-1~2011-1 负责人 Vertical project
50975226 大面积纳米晶太阳能电池的柔性化及敏化染料压印植入制造工艺 国家自然科学基金项目 2009-1~2010-1 负责人 Vertical project
无 静电诱导流变成形纳米光刻工艺基础 机械制造系统工程国家重点实验室支持项目 2009-1~2010-1 负责人 Vertical project
2009CB724202 超大规模集成电路制造装备基础问题研究/纳米结构的外场诱导流变成形规律与控制 973项目课题 2009-1~ 骨干成员 Vertical project
50505037 聚合物太阳能电池p-n异质结截面的三维微结构压印成形 国家自然科学基金项目 2008-1~2012-1 负责人 Vertical project
XA-AM-200609 柔性基宏电子制造中微结构转移印刷技术 西安市应用材料基金项目 2007-1~2009-1 负责人 Vertical project
2006AA04Z322 微结构异质结界面柔性太阳能电池及其制造工艺 “863”高科技项目 2007-1~2009-1 负责人 Vertical project
20 Entries Per Page

Showing 1 to 20 of 27 entries.

Patent

No entries were found.
Patent Name Application Number xjtu.gr.patent.type Application Date
[10] 连续逆压印图型直接转移式制造图案化磁记录介质的方法 ZL200710018124.2 Invention 2016.01.01
[9] 聚合物太阳能电池的深亚微米三维异质结界面及制备方法 ZL200510042776 Invention 2016.01.01
[6] 基于多孔介电材料薄膜的弹道场发射显示器件阴极的制备方法 ZL201110136861.9 Invention 2016.01.01
深亚微米三维滚压模具及其制作方法 ZL200510042777.5 Invention 2016.01.01
量子点植入反射式主动光栅及制造方法 ZL201110009472.X Invention 2016.01.01
[4] 半导体气敏传感器的定向纳米纤维化三维立体叉指电极的制作方法 ZL201110170715.8 Invention 2015.01.01
[5] 层叠薄膜及其波形周线控制表面传导电子发射源制作方法 ZL201010516898.X Invention 2015.01.01
机床用超长光栅尺逆滚压印成型方法 ZL20110127212.2 Invention 2015.01.01
[2] 一种具有微结构的聚偏氟乙烯压电薄膜的制备方法 ZL200910023561.2 Invention 2014.01.01
动力学压印反射式光栅的制作方法 ZL201210371250.7 Invention 2013.01.01
以时间基准为参照的精密光栅制造方法 201210371250.7 Invention 2012.09.28
以石墨烯键长作为计量基准的长度计量溯源方法 201210371352.9 Invention 2012.09.28
以石墨烯键长为基准的超精密制造装备精度比对及精度补偿方法 201210371547.3 Invention 2012.09.28
一种单码道绝对式光栅尺辊压印模具制造方法 201210247415.X Invention 2012.07.17
单码道绝对式光栅尺辊压印制造方法 201210247527.5 Invention 2012.07.17
一种机床用长光栅辊压印模具精密电铸加工方法 201210247375.9 Invention 2012.07.17
激光辅助辊压印制造机床用反射型长光栅工艺方法 201210247466.2 Invention 2012.07.17
超长光栅尺辊压模具表面图形化的快速加工方法 201110455884.6 Invention 2011.12.30
一种机床测量用光栅尺保护膜的涂覆方法 201110455547.7 Invention 2011.12.30
一种SED显示器电子发射源纳米缝阵列的制备方法 201110191515.0 Invention 2011.07.11
20 Entries Per Page

Showing 1 to 20 of 60 entries.

Main Responsibility

(1) Ye, Guoyong; Liu, Hongzhong; Wang, Yang; Lei, Biao; Shi, Yongsheng; Yin, Lei; Lu, Bingheng; Ratiometric-Linearization-Based High-Precision Electronic Interpolator for Sinusoidal Optical Encoders, IEEE Transactions on Industrial Electronics, 2018, 65(10)：8224-8231.
(2) Guoyong, Ye; Guobo, Zhao; Hongzhong, Liu; Bingheng, Lu; Precise Phase Demodulation Algorithm for Sinusoidal Encoders and Resolvers, IEEE Transactions on Industrial Electronics, 2020, 67(10)：8778-8787.
(3) Yu, Haoyu; Liu, Hongzhong; Ye, Guoyong; Fan, Shanjin; Shi, Yongsheng; Yin, Lei; Chen, Bangdao; Jiang, Weitao; Transverse sensitivity suppression using multi-axis surface encoder with parasitic error compensation, Applied Physics Letters, 2017, 111(11)：0-113507.
(4) Gu Tongkai; Wang Lanlan; Mao Mao; Han Jie; Li Rui; Zhang Yajun; Lei Biao; Jiang Weitao; Liu Hongzhong; Bilayer liquid-filled compound microlens arrays: A way to compensate aberration, Journal of Applied Physics, 2020, 128(16)：163101.
(5) Zhang Yajun; Jiang Weitao; Gu Tongkai; Han Jie; Lei Biao; Wang Lanlan; Liu Hongzhong; Yin Lei; Chen Bangdao; Shi Yongsheng; Multidomain Oriented Particle Chains Based on Spatial Electric Field and Their Optical Application., Langmuir, 2020, 36(39)：11546-11555.
(6) Guoyong Ye; Hongzhong Liu; Yaowen Ban; Yongsheng Shi; Lei Yin; Bingheng Lu; Development of a reflective optical encoder with submicron accuracy, Optics Communications, Optics Communications, 2018, 411：126-132.

(7) Guobo, Zhao; Guoyong, Ye; Hui, Liu; Biao, Lei; Xuan, Li; Weiliang, Han; Hongzhong, Liu; ElectronicInterpolation  Interface Based on Linear Subdivision Method for Sinusoidal Optical Encoders, IEEE Sensors Journal, 2020, 20(7)：3646-3654.
(8) Guoyong Ye; Yuhao Zhang; Wei Jiang; Siren Liu; Lei Qiu; Xiaojun Fan; Hongwen Xing; Pingping Wei; Bingheng Lu; Hongzhong Liu; Improving measurement accuracy of laser triangulation sensor via integrating a
diffraction grating, Optics and Lasers in Engineering, 2021, 143(0143-8166).

(9) Li, Xuan; Ye, Guoyong; Liu, Hongzhong; Ban, Yaowen; Shi, Yongsheng; Yin, Lei; Lu, Bingheng; A novel optical rotary encoder with eccentricity self-detection ability, Review of Scientific Instruments, 2017, 88(11)：0-115005.
(10) Guoyong, Ye; Hui, Liu; Biao, Lei; Dong, Niu; Hongwen, Xing; Pingping, Wei; Bingheng, Lu; Hongzhong, Liu; Optimal design of a reflective diffraction grating scale with sine-trapezoidal groove for interferential optical encoders, Optics and Lasers in Engineering, 2020, 134：0-106196.
(11) Ye, Guoyong; Liu, Hongzhong; Li, Xuan; Yu, Haoyu; Lu, Bingheng; Development of a polar-coordinate optical encoder: principle and application, Optical Engineering, 2018, 57(1)：0-014108.
(12) Ban, Yaowen; Ye, Guoyong; Liu, Hongzhong; Liu, Xiaohui; Lei, Biao; Zhao, Tingting; Shi, Yongsheng; Yin, Lei; Lu, Bingheng; Pre-stress-assisted nanoimprint lithography for fabricating high-density diffraction
gratings, Journal of Micromechanics and Microengineering, 2018, 28(10)：0-105013.
(13) Guobo Zhao; Guoyong Ye; Zeze Wu; Hongwen Xing; Siren Liu; Xiaojun Fan; Yingjiang Li; Pingping Wei; Hongzhong Liu; On-line angle self-correction strategy based on a cobweb-structured grating scale, Measurement Science and Technology, 2021, 32(5).
(14) Ye, Guoyong; Xing, Hongwen; Liu, Hui; Li, Yingjiang; Lei, Biao; Niu, Dong; Li, Xuan; Lu, Bingheng; Liu, Hongzhong; Total error compensation of non-ideal signal parameters for Moire encoders, Sensors and Actuators
A: Physical, 2019, 298：0-111539.
(15) Guobo Zhao; Biao Lei; Guoyong Ye; Yaowen Ban; Xuan Li; Hui Liu; Hongzhong Liu; Improved Eccentricity Self-Detection Method Based on Least Square Algorithm for Polar Coordinate Encoder, IEEE Sensors Journal, 2021, 21(23)：26902-26911.
(16) Ye, Guoyong; Wu, Zeze; Xu, Zhengchen; Wang, Yang; Shi, Yongsheng; Liu, Hongzhong; Development of a digital interpolation module for high-resolution sinusoidal encoders, Sensors and Actuators A: Physical, 2019, 285：501-510.
(17) Ye, Guoyong; Liu, Hongzhong; Yan, Jiawei; Ban, Yaowen; Fan, Shanjin; Shi, Yongsheng; Yin, Lei; Fabrication of high edge-definition steel-tape gratings for optical encoders, Review of Scientific Instruments, 2017, 88(10)：0-105006.
(18) Niu, Dong; Jiang, Weitao; Ye, Guoyong; Lei, Biao; Luo, Feng; Liu, Hongzhong; Lu, Bingheng; Photothermally triggered soft robot with adaptive local deformations and versatile bending modes, Smart Materials and Structures, 2019, 28(2)：0-02LT01. SCIE.
(19) Jiang, Weitao; Niu, Dong; Wei, Lanlan; Ye, Guoyong; Wang, Lanlan; Liu, Hongzhong; Chen, Ping; Luo, Feng; Lu, Bingheng; Controllable actuation of photomechanical bilayer nanocomposites for in vitro cell manipulation, Carbon, 2018, 139：1048-1056.
(20) Gu, Tongkai; Wang, Lanlan; Li, Rui; Dong, Yanzhen; Zhang, Yajun; Jia, Mengchao; Jiang, Weitao; Liu, Hongzhong; Liquid microsphere arrays for imaging magnification, Optics Communications, 2018, 428：89-94. SCIE.
(21) Rui, Li; Lanlan, Wang; Jingshuang, Dang; Lan, Mi; Jie, Han; Mao; Bangdao, Chen; Hongzhong, Liu; Reconfigurable and tunable photo-controlled hydrogel using hydrogen bonding to drive molecule self-assembly and cross-linking, Journal of Materials Science, 2020, 55(30)：14740-14750.
(22) 蔡崇文; 叶国永; 刘红忠; 基于Vold-Kalman滤波的光栅谐波动态抑制方法, 仪器仪表学报, 2021, 42(03)：17-24.
(23) Jiang, Weitao; Wang, Lanlan; Ye, Guoyong; Chen, Bangdao; Yin, Lei; Shi, Yongsheng; Liu, Hongzhong; Biomimetic magnetic-responsive cilia-like soft device: surface energy control and external field actuation, Journal of Materials Science: Materials in Electronics, 2019, 30(4)：3767-3772.
(24) Li, Dachao; Liu, Hongzhong; Chen, Bangdao; Niu, Dong; Lei, Biao; Ye, Guoyong; Jiang, Weitao; Shi, Yongsheng; Yin, Lei; Lai, Guoquan; Amorphous Carbon-Induced Surface Defect Repair for Reinforcing the Mechanical Properties of Carbon Fiber, Materials, 2019, 12(8)：0-1244.
(25) Zhang, Yajun; Wang, Lanlan; Gao, Wei; Gu, Tongkai; Li, Zhenjun; Li, Xuan; Li, Rui; Ye, Guoyong; Jiang, Weitao; Zhu, Yongkai; Liu, Hongzhong; Bioinspired from butterfly wings: programmable actuation of isolated rods architectures for magnetic-assisted microswitches, Smart Materials and Structures, 2019, 28(7)：0-075014.
(26) Jie Han; Weitao Jiang; Dong Niu; Yiding Li; Yajun Zhang; Biao Lei; Hongzhong Liu; Yongsheng Shi; Bangdao Chen; Lei Yin; Xiaokang Liu; Donglin Peng; Bingheng Lu; Untethered Soft Actuators by Liquid–Vapor Phase
Transition: Remote and Programmable Actuation, Advanced Intelligent Systems, 2019, 1(8)：1900109.
(27) Zhao, Tingting; Jiang, Weitao; Niu, Dong; Liu, Hongzhong; Chen, Bangdao; Shi, Yongsheng; Yin, Lei; Lu, Bingheng; Flexible pyroelectric device for scavenging thermal energy from chemical process and as self-powered temperature monitor, Applied Energy, 2017, 195：754-760.
(28) Jiang, Weitao; Zhao, Tingting; Liu, Hongzhong; Jia, Rui; Niu, Dong; Chen, Bangdao; Shi, Yongsheng; Yin, Lei; Lu, Bingheng; Laminated pyroelectric generator with spin coated transparent poly(3,4-ethylenedioxythiophene) polystyrene sulfonate (PEDOT:PSS) electrodes for a flexible self-powered stimulator, RSC Advances, 2018, 8(27)：15134-15140. SCIE.
(29) Tian Li; Weitao Jiang; Jie Han; Dong Niu; Hongzhong Liu; Bingheng Lu; Enhancements of Loading Capacity and Moving Ability by Microstructures for Wireless Soft Robot Boats, Langmuir, 2020, 36(48)：14728-14736.
(30) Jie, Han; Weitao, Jiang; Hongjian, Zhang; Yajun, Zhang; Xueming, Feng; Lanlan, Wang; Dong, Niu; Biao, Lei; Hongzhong, Liu; Untethered, ultra-light soft actuator based on positively charged 3D fluffy silica micro-nanofibers by electrospinning, Journal of Materials Science, 2020, 55(27)：12789-12800.

(31) Jie Han; Weitao Jiang; Hongjian Zhang; Biao Lei; Lanlan Wang; Hongzhong Liu; Submersible Soft‐Robotic Platform for Noise‐Free Hovering Utilizing Liquid–Vapor Phase Transition, Advanced Intelligent Systems, 2021, 3(1)：2000147.

(32) Fahao Qin; Lanlan Wang; Weitao Jiang; Yajun Zhang; Hongzhong Liu; Three-dimensional patterned distribution of thermal conductivity in the volume for effective thermal concentration, Journal of Applied Physics, 2021, 129：55102.