Team Name

  1. Li B, Zhao Y, Li C, et al. A Differential Resonant Accelerometer with Low Cross-Interference and Temperature Drift:[J]. Sensors, 2017, 17(1):178，
  2. Li, B, Li, C, Zhao, Y et al. Deep Reactive Ion Etching of Z-Cut Alpha Quartz for MEMS Resonant Devices Fabrication. Micromachines, 2020, 11(8), 724. 
  3. Bo Li, Yulong Zhao, Xin Ma, Cun Li, et al. Design of a Resonant Accelerometer Integrated with a Diamond Like Carbon Film Temperature Sensor[C]. 2017 IEEE SENSORS
  4. Bo Li, Cun Li, Yulong Zhao, Y et al. An Integrated Packaged Resonant Accelerometer with Temperature Compensation [J].Review of Scientific Instruments 
  5. Li Cun, Zhao Yulong, Li Bo, Cheng Rongjun, Sun Dengqiang, et al. A micro-machined differential resonance accelerometer based on silicon on quartz method [J]. Sensors and Actuators A: Physical, 2017, 253: 1-9.

Science Project

No entries were found.
Project number Project name Project origin Start time Roles Project kind
2021YFB201203HZ 微型高性能加速度传感器集成与封装技术研究 科技部重点研发项目子课题 2021-12~2024-11 负责人 Vertical project
xhj032021016-05 微型高精度全石英谐振加速度传感器 基本科研业务费 2021-08~2023-12 负责人 Vertical project

Research Team

  1. 赵玉龙，李波，李村， 一种数字式差动微型加速度计: 中国 ZL 201610944688.8， 授权日期: 2019.04.09
  2. 赵玉龙，李波，李村， 一种扭转式石英谐振加速度传感器芯片: 中国 ZL 201610946670.1， 授权日期: 2020.04.13