Selected Granted Patents

  1. Method of On-Line Rapid Fluid Density Measurement Using a Piezoresistive Micro-Cantilever，美国发明专利，授权号：US 13/658,639，授权日：2016.1.5，发明人：蒋庄德、张桂铭、赵立波等。
  2. 一种双腔MEMS碱金属气室及其制备方法，中国发明专利，申请号：202211604516.8，申请日：2022.12.13，发明人：赵立波、王延斌、秦广照、于明智、陈瑶、张赟、马银涛、路舜、郭举、杨萍、林启敬、王建鲁、张南、蒋庄德。
  3. 一种高频响微差压传感器芯片结构与制备方法，中国发明专利，申请号：2022108709881，申请时间：2022.07.22，发明人：韩香广、高漪、赵立波、皇咪咪、樊姝、陈科、尚钰杰、吴豫席、杨萍、王永录、王小章、王久洪、蒋庄德。
  4. 一种耐高压MEMS压力传感器封装结构和封装方法，中国发明专利，申请号：2022108220451，申请时间：2022.07.13，发明人：赵立波、樊姝、韩香广、皇咪咪、李支康、王李、高漪、尚钰杰、陈科、王小章、杨萍、王久洪、苏文斌、蒋庄德。
  5. 一种基于SOI工艺的MEMS六轴力传感器芯片及其制备方法，中国发明专利，授权号：ZL 202111595510.4，授权日：2022.11.11，发明人：赵立波、谭仁杰、高文迪、韩香广、卢德江、王路、李敏、董林玺、杨萍、林启敬、蒋庄德。
  6. 一种MEMS电容式六轴力传感器芯片及其制备工艺，中国发明专利，授权号：ZL 202111595513.8，授权日：2022.11.11，发明人：赵立波、谭仁杰、韩香广、高文迪、李敏、陈瑶、董林玺、杨萍、王小章、王久洪、蒋庄德。
  7. 基于电容检测原理的MEMS六轴力传感器芯片及其制备方法，中国发明专利，授权号：ZL 202111592764.0，授权日：2022.11.11，发明人：赵立波、谭仁杰、黄琳雅、韩香广、高文迪、李敏、董林玺、王李、杨萍、王永录、蒋庄德。
  8. 一种压阻梁应力集中微压传感器芯片及其制备方法，中国发明专利，授权号：ZL 202110462455.5，授权日：2022.12.30，发明人：赵立波、李学琛、韩香广、李伟、乔智霞、皇咪咪、徐廷中、杨萍、王李、陈翠兰、王鸿雁、关卫军、吴永顺、罗国希、王永录、魏于昆、山涛、蒋庄德。
  9. 具有应力集中结构的微压传感器芯片及其制备方法，中国发明专利，授权号：ZL 202110462410.8，授权日：2022.6.7，发明人：赵立波、李学琛、韩香广、乔智霞、皇咪咪、李伟、徐廷中、杨萍、高漪、王鸿雁、关卫军、吴永顺、李支康、朱瑄、王久洪、魏于昆、山涛、蒋庄德。
  10. 一种压阻式双轴加速度传感器芯片及其制备方法，中国发明专利，申请号：202110150381.1，申请日期：2021.2.3，发明人：赵立波、贾琛、罗国希、于明智、韩香广、王路、杨萍、李支康、高文迪、陈瑶、王久洪、蒋庄德。
  11. 一种基于倒装芯片的温度压力集成传感器及其封装方法，中国发明专利，授权号：ZL 202010981260.7，授权日：2021.9.7，发明人：赵立波、王李、韩香广、李支康、邱煜祥、皇咪咪、陈翠兰、李学琛、杨萍、王鸿雁、王永录、吴永顺、魏于昆、山涛、蒋庄德。
  12. 一种基于电磁激励电磁检测的硅微谐振式表压传感器芯片，中国发明专利，授权号：ZL 202011140341.0，授权日：2021.9.7，发明人：赵立波、邱煜祥、王李、韩香广、李支康、皇咪咪、杨萍、朱楠、王淞立、赵虎、蒋庄德。
  13. 一种全有机材料制备的压电式柔性压力传感器及制备方法，中国发明专利，授权号：ZL 202011035503.4，授权日：2021.8.13，发明人：赵立波、罗运运、夏勇、罗国希、李字平、李支康、张乾坤、林启敬、杨萍、蒋庄德。
  14. 一种石墨烯压力传感器及其制备方法，中国发明专利，授权号：ZL 202010383731.4，授权日：2021.1.29，发明人：赵立波、李真、罗国希、李磊、罗运运、杨萍、卢德江、王永录、王久洪、蒋庄德。
  15. 一种原子磁强计的MEMS气室碱金属原子源选择方法，中国发明专利，授权号：ZL 202010403189.4，授权日：2021.5.28，发明人：赵立波、马银涛、罗国希、于明智、陈瑶、韩枫、李磊、杨萍、林启敬、卢德江、蒋庄德。
  16. 具有应力集中结构的压阻式压力传感器芯片及其制备方法，中国发明专利，授权号：ZL 202010478838.7，授权日：2021.5.28，发明人：赵立波、皇咪咪、徐廷中、陈翠兰、李学琛、杨萍、卢德江、王鸿雁、吴永顺、魏于昆、山涛、蒋庄德。
  17. 一种内嵌拱形薄膜驱动的PMUT单元及其制备方法，中国发明专利，授权号：ZL 202010537206.3，授权日：2021.3.16，发明人：赵立波、郭帅帅、徐廷中、李支康、杨萍、李杰、赵一鹤、刘子晨、蒋庄德。
  18. 一种梳齿式CMUTs流体密度传感器及其制备方法，中国发明专利，授权号：201810745339.2，授权日：2020.4.15，发明人：赵立波、李杰、李支康、卢德江、赵一鹤、张家旺、徐廷中、蒋庄德。
  19. 一种双H型受拉梁硅微谐振压力传感器芯片及其制备方法，中国发明专利，授权号：ZL 201910065049.8，授权日：2020.3.31，发明人：赵立波、韩香广、李雪娇、卢德江、郭鑫、王鸿雁、吴永顺、赵玉龙、蒋庄德。
  20. 一种MEMS直拉直压式两轴加速度计芯片及其制备方法，中国发明专利，授权号：ZL 201710916278.7，授权日：2019.10.11，发明人：赵立波、于明智、蒋维乐、贾琛、李支康、王久洪、赵玉龙、蒋庄德。
  21. 多梁式单质量块面内双轴加速度传感器芯片及其制备方法，中国发明专利，授权号：ZL 201710938806.9，授权日：2019.10.11，发明人：赵立波、贾琛、蒋维乐、于明智、李支康、王久洪、赵玉龙、蒋庄德。
  22. 基于CMUTs谐振式生化传感器的敏感功能层制备方法，中国发明专利，授权号：ZL 201710318378.X，授权日：2019.3.12，发明人：赵立波、赵一鹤、夏勇、李支康、李杰、张家旺、李萍、蒋庄德。
  23. 一种支撑梁式MEMS复合传感器及其制备和测试方法，中国发明专利，授权号：ZL 201710330728.4，授权日：2019.5.21，发明人：赵立波、黄祥祥、夏勇、徐廷中、郭鑫、罗运运。
  24. 基于可动栅极式场效应晶体管的微力传感器及其制备方法，中国发明专利，授权号：ZL 201710527246.8，授权日：2019.5.21，发明人：赵立波、高文迪、蒋庄德、李支康、赵玉龙、孙东。
  25. 一种基于面内谐振的MEMS流体密度传感器芯片及其制备方法，中国发明专利，授权号：ZL 201710539077.X，授权日：2019.10.11，发明人：赵立波、胡英杰、黄琳雅、李支康、赵玉龙、蒋庄德。
  26. 一种基于面内谐振的MEMS流体黏度传感器芯片及其制备方法，中国发明专利，授权号：ZL 201710538627.6，授权日：2019.10.11，发明人：赵立波、黄琳雅、胡英杰、李支康、赵玉龙、蒋庄德。
  27. 一种基于面内谐振的MEMS黏密度传感器芯片及其制备方法，中国发明专利，授权号：ZL 201710855225.9，授权日：2019.4.12，发明人：赵立波、黄琳雅、蒋维乐、胡英杰、王久洪、李支康、苑国英、赵玉龙、蒋庄德。
  28. 一种分段质量块应力集中结构微压传感器芯片及制备方法，中国发明专利，授权号：ZL 201510131116.3，授权日：2017.5.17，发明人：赵立波、徐廷中、蒋庄德等。
  29. 一种浮雕式岛膜应力集中结构微压传感器芯片及制备方法，中国发明专利，授权号：ZL 201510130249.9，授权日：2017.3.29，发明人：赵立波、徐廷中、蒋庄德等。
  30. 一种多梁式双质量块加速度传感器芯片及其制备方法，中国发明专利，授权号：ZL 201410012680.9，授权日：2017.2.22，发明人：赵立波、许煜、蒋庄德等。
  31. 一种自增强圆筒式双液体腔结构的耐高温超高压力传感器，中国发明专利，授权号：ZL 201410782608.4，授权日：2017.1.11，发明人：赵立波、郭鑫、薛方正等。
  32. 一种基于MEMS双加热器的热导率和热扩散系数传感器，中国发明专利，授权号：ZL 201310578646.3，授权日：2016.10.19，发明人：赵立波、陈闯、蒋庄德等。
  33. 一种微压力传感器及其制备与检测方法，中国发明专利，授权号：ZL 201410240293.0，授权日：2016.4.27，发明人：赵立波、李支康、蒋庄德等。
  34. 一种磨削力传感器及其测量方法，中国发明专利，授权号：ZL 201310736739.4，申请日：2013.12.26，授权日：2016.3.30，发明人：赵立波、乔智霞、薛方正等。
  35. 一种高温CMUT压力传感器及其制备方法，中国发明专利，授权号：ZL 201310084858.6，申请日：2013.3.15，授权日：2016.2.24，发明人：赵立波、李支康、蒋庄德等。
  36. 一种磁激励压阻拾振式MEMS谐振器的主动频率调谐方法，中国发明专利，授权号：ZL 201310143659.8，申请日：2013.4.23，授权日：2016.1.13，发明人：赵立波、张桂铭、蒋庄德等。
  37. 基于CMUT的海洋生化物质监测传感器及其制备与测量方法，中国发明专利，授权号：ZL 201310364961.6，申请日：2013.8.20，授权日：2016.1.13，发明人：赵立波、李支康、蒋庄德等。
  38. 一种基于CMUT的温度传感器及其制备方法与应用方法，中国发明专利，授权号：ZL 201310084404.9，申请日：2013.3.15，授权日：2015.4.29，发明人：赵立波、叶志英、李支康、蒋庄德等。
  39. 一种采用压阻式微悬臂梁在线快速测量流体密度的方法，中国发明专利，授权号：ZL 201210093049.7，授权发文日：2014.1.29，发明人：赵立波、张桂铭、蒋庄德等。
  40. 一种用于痕量生化物质检测的CMUT及其制备方法，中国发明专利，授权号：ZL 201110399567.7，授权发文日：2014.1.27，发明人：赵立波、李支康、蒋庄德等。
  41. 一种电容式微加工超声传感器及其制备与应用方法，中国发明专利，授权号：ZL 201210068766.4，授权发文日：2013.12.31，发明人：赵立波、李支康、蒋庄德等。
  42. 一种基于MEMS技术的热扩散率传感器芯片及其制备方法，中国发明专利，授权号：ZL 201110401838.8，授权发文日：2013.11.27，发明人：赵立波、周睿、蒋庄德等。
  43. 一种复合式MEMS密度传感器，中国发明专利，授权号：ZL 201210126237.5，授权日：2013.11.6，发明人：赵立波、徐龙起、黄恩泽等。
  44. 基于ZnO纳米线阵列的压力传感器芯片及其制备方法，中国发明专利，授权号：ZL 201210126095.2，授权日：2013.11.6，发明人：蒋庄德、许煜、赵立波。
  45. 一种双C型压电式动态轴重传感器，中国发明专利，授权号：ZL 201110081036.3，授权日：2013.4.17，发明人：赵立波、梁建强、赵玉龙等。
  46. 基于MEMS技术的同时测量流体密度、压力和温度的集成流体传感器，中国发明专利，授权号：ZL 201110180191.0，授权日：2013.3.13，发明人：赵立波、黄恩泽、张桂铭等。
  47. 一种复合式MEMS耐高温超高压力传感器，中国发明专利，授权号：ZL 201010522858.6，授权日：2012.7.4，发明人：赵立波、郭鑫、孟夏薇等。
  48. MEMS筒式耐高温超高压力传感器，中国发明专利，授权号：ZL 201010621888.2，授权日：2012.6.31，发明人：赵立波、郭鑫、赵玉龙等。
  49. 基于微机电系统技术的密度传感器芯片及其制备方法，中国发明专利，授权号：ZL 200910219371.8，授权日：2011.11.16，发明人：赵立波、黄恩泽、蒋庄德等。
  50. 基于微机电系统技术的粘度传感器芯片及其制备方法，中国发明专利，授权号：ZL 200910219368.6，授权日：2011.8.31，发明人：赵立波、张桂铭、蒋庄德等。

 

 

 

selected Papers

  1. Lu Wang, Zhenxuan Fei, Congsheng Duan, Xiangguang Han, Min Li, Wendi Gao, Yong Xia, Chen Jia, Qijing Lin, Yihe Zhao, Zhikang Li, Libo Zhao, Zhuangde Jiang, and Ryutaro Maeda. Self-Sustained and Self-Wakeup Wireless Vibration Sensors by Electromagnetic-Piezoelectric-Triboelectric Hybrid Energy Harvesting [J]. Applied Energy, 355, 2023.11.17.
  2. Mingzhi Yu, Yao Chen*, Yongliang Wang, Xiangguang Han, Guoxi Luo, Libo Zhao*, Yanbin Wang, Yintao Ma, Shun Lu, Ping Yang, Qijing Lin, Kaifei Wang*, and Zhuangde Jiang. Microfabricated Atomic Vapor Cells with Multi-Optical Channels Based on an Innovative Inner-Sidewall Molding Process [J]. Engineering, 2023.
  3. Mingzhi Yu, Yao Chen*, Yanbin Wang, Yintao Ma, Guoxi Luo, Shun Lu, Libo Zhao*, Ping Yang, Qijing Lin, and Zhuangde Jiang. Plasma-activated high-strength non-isothermal anodic bonding for efficient fabrication of the micro atomic vapor cells [J]. Journal of Materials Research and Technology, 27: 1046-1057, 2023.10.5.
  4. Yunyun Luo, Libo Zhao, Guoxi Luo*, Linxi Dong, Yong Xia*, Min Li, Ziping Li, Kaifei Wang*, Ryutaro Maeda, Zhuangde Jiang. Highly sensitive piezoresistive and thermally responsive fibrous networks from the in situ growth of PEDOT on MWCNT-decorated electrospun PU fibers for pressure and temperature sensing [J]. Microsystems & Nanoengineering, 9(1): 113(13pp.), 2023.9.15.
  5. Mingzhi Yu, Libo Zhao, Yongliang Wang, Yong Xia*, Yintao Ma, Yanbin Wang, Xiangguang Han, Yao Chen, Shun Lu, Guoxi Luo, Nan Zhu, Ping Yang, Kaifei Wang*, Qijing Lin, Zhuangde Jiang. Plasma-activated silicon–glass high-strength multistep bonding for low-temperature vacuum packaging, Chemical Engineering Journal, 471: 1144719(11pp.), 2023.9.1.
  6. Mingzhi Yu, Libo Zhao, Xiangguang Han*, Chen Jia, Yong Xia, Ping Yang, Yun Zhang, Junjie Sun, Guangzhao Qin and Zhuangde Jiang. Development of a High-Performance Microaccelerometer with Position Independent Pure-Axial Stressed Piezoresistive Beams [J]. IEEE Transactions on Industrial Electronics, 70(8): 8546-8556, 2023.8.
  7. Min Li, Chen Jia, Danyu Zhang, Yunyun Luo, Yintao Ma, Guoxi Luo*, Libo Zhao*, Lu Wang*, Zhikang Li, Qijing Lin, Ping Yang, Nan Zhu, Rabah Boukherroub, Zhuangde Jiang. An Efficient Cobalt-Nickel Phosphate Positive Electrode for High-Performance Hybrid Microsupercapacitors [J]. Journal of Energy Storage 64: 107144, 2023.8.1.
  8. Wendi Gao, Cunlang Liu, Xiangguang Han*, Libo Zhao*, Qijing Lin, Zhuangde Jiang, Dong Sun. A High Resolution MEMS Capacitive Force Sensor with Bionic Swallow Comb Arrays for Ultralow Multiphysics Measurement. IEEE Trans Ind Electron, 70(7): 7467-7477, 2023.7.
  9. Yihe Zhao, Gian Luca Barbruni, Zhikang Li*, Libo Zhao*, Xiaozhang Wang, Kaifei Wang*, Zhuangde Jiang, and Sandro Carrara. A Front-End CMOS Interface Circuit with High Voltage Charge Pump and Oscillator for Capacitive Micromachined Ultrasonic Transducers, IEEE Transactions on Circuits and Systems—II: Express Briefs [J]. 70(5): 1799-1803, 2023.5.12.
  10. Min Li, Chen Jia*, Yurdanur Türker, Mert Umut Ö zkaynak, Libo Zhao, Danyu Zhang, Yunyun Luo, Guoxi Luo*, Lu Wang, Yong Xia, Zhikang Li, Nan Zhu, Ping Yang, Koray Bahadır Dönmez, Rabah Boukherroub*, and Zhuangde Jiang. Wide-temperature-range flexible micro-supercapacitors using liquid crystal gel electrolyte [J]. ACS Applied Energy Materials, 6(10):5230-5238, 2023.5.9.
  11. Xiaokai Yang, Anwesha Mukherjee, Min Li, Jiuhong Wang, Yong Xia*, Yossi Rosenwaks*, Libo Zhao, Linxi Dong*, and Zhuangde Jiang. Selective Sensing of Volatile Organic Compounds Using an Electrostatically Formed Nanowire Sensor Based on Automatic Machine Learning [J]. ACS Sensors, 8(4): 1819-1826, 2023.4.28.
  12. Chen Jia, Libo Zhao, Min Li*, Mingzhi Yu, Guoxi Luo, Nan Zhu, Xiangguang Han, Yong Xia*, Ping Yang, Jiuhong Wang, Zhuangde Jiang. Microleverage Mechanism Assisted Novel Biaxial Piezoresistive Micro Accelerometer with Improved Sensitivity[J]. IEEE Sensors Journal, 23(9): 9183-9193, 2023.3.29.
  13. Wendi Gao, Zhixia Qiao, Xiangguang Han, Xiaozhang Wang, Adnan Shakoor, Cunlang Liu, Dejiang Lu*, Ping Yang, Libo Zhao*, Yonglu Wang, Jiuhong Wang, Zhuangde Jiang, Dong Sun. A MEMS Sensors Based on a Laterally Movable Gate Field-Effect Transistor (LMGFET) with a Novel Decoupling Sandwich Structure [J]. Engineering, 21: 61-74, 2023.2.
  14. Mingzhi Yu, Libo Zhao, Shanshan Chen*, Xiangguang Han, Chen Jia*, Yong Xia, Xiaozhang Wang, Yonglu Wang, Ping Yang, Dejiang Lu, Zhuangde Jiang. Monolithically integrated triaxial high-performance micro accelerometers with position-independent pure axial stressed piezoresistive beams [J]. Microsystems & Nanoengineering, 9(1): 9(12pp.), 2023.1.11.
  15. Wendi Gao, Bian Tian, Cunlang Liu, Yingbiao Ma, Chen Jia*, Libo Zhao*, Tao Liu, Nan Zhu, Ping Yang, Qijing Lin, Zhuangde Jiang, Dong Sun. A bionic approach for the mechanical and electrical decoupling of an MEMS capacitive sensor in ultralow force measurement [J]. Frontiers of Mechanical Engineering, 18(2): 31(21pp.), 2023.1.5.
  16. Weile Jiang, Lu Wang*, Xinquan Wang, Libo Zhao*, Xudong Fang, and Ryutaro Maeda. Comparison of L-Shaped and U-Shaped Beams in Bidirectional Piezoelectric Vibration Energy Harvesting. Nanomaterials, 12(21): 3718, 2022.10.23.
  17. Weile Jiang#, Yong Xia#*, Aifei Pan, Yunyun Luo, Yaqiong Su, Sikai Zhao, Tao Wang and Libo Zhao. Facet-Dependent Gas Adsorption Selectivity on ZnO: A DFT Study [J]. Chemosensors, 10: 436(14pp). 2022.10.21.
  18. Mimi Huang, Libo Zhao, Xiangguang Han*, Chen Jia*, Yi Gao, Shu Fan, Ping Yang, Linxi Dong, Zhuangde Jiang. MEMS-based Pt film temperature sensor chip on silicon substrate [J]. Measurement Science and Technology, 33(12): 125113, 2022.9.27.
  19. Yintao Ma, Yao Chen*, Libo Zhao*, Mingzhi Yu, Yanbin Wang, Ju Guo, Ping Yang, Qijing Lin and Zhuangde Jiang. Accurate determination of alkali-atom density based on zero-field magnetic resonance in single-beam SERF atomic magnetometer [J]. Measurement Science and Technology, 33:105003, 2022.10.1.
  20. Yintao Ma, Zhixia Qiao, Mingzhi Yu, Yanbin Wang, Yao Chen*, Guoxi Luo*, Ping Yang, Qijing Lin, Libo Zhao, Yun Zhang, Junjie Sun, Guangzhao Qin and Zhuangde Jiang. Single-beam integrated hybrid optical pumping spin exchange relaxation free magnetometer for biomedical applications [J]. Applied Physics Letters, 121: 114001, 2022.9.13.
  21. Yintao Ma, Yao Chen*, Libo Zhao*, Guoxi Luo, Mingzhi Yu, Yanbin Wang, Ju Guo, Ping Yang, Qijing Lin, Zhuangde Jiang. The micro-fabrication and performance analysis of non-magnetic heating chip for miniaturized SERF atomic magnetometer [J]. Journal of Magnetism and Magnetic Materials, 557: 169495(10pp), 2022.9.1.
  22. Guoxi Luo, Jiaqi Xie, Jielun Liu, Qiankun Zhang, Yunyun Luo, Min Li*, Wenke Zhou, Ke Chen, Zhikang Li, Ping Yang, Libo Zhao*, Kwok Siong Teh*, Xiaozhang Wang, Linxi Dong, Ryutaro Maeda, Zhuangde Jiang. Highly conductive, stretchable, durable, breathable electrodes based on electrospun polyurethane mats superficially decorated with carbon nanotubes for multifunctional wearable electronics [J]. Chemical Engineering Journal, 451: 138549, 2022.8.8.
  23. Yunyun Luo, Libo Zhao, Guoxi Luo*, Min Li., Xiangguang Han*, Yong Xia, Ziping Li., Qijing Lin, Ping Yang, Liyan Dai, Gang Niu, Xiaozhang Wang, Jiuhong Wang, Dejiang Lu, Zhuangde Jiang. All electrospun fabrics based piezoelectric tactile sensor [J]. Nanotechnology, 33(41): 415502, 2022.7.25.
  24. Chen Jia, Mingzhi Yu, Guoxi Luo*, Xiangguang Han, Ping Yang, Yao Chen, Libo Zhao*, Lu Wang, Yonglu Wang, Jiuhong Wang, Zhuangde Jiang. Modeling and Characterization of a Novel in-Plane Dual-Axis MEMS Accelerometers Based on Self-Support Piezoresistive Beam [J]. Journal of Microelectromechanical Systems, 2022: 1-10, 2022.7.11.
  25. Linya Huang, Wei Li, Guoxi Luo, Dejiang Lu*, Libo Zhao*, Ping Yang, Xiaozhang Wang, Jiuhong Wang, Qijing Lin, Zhuangde Jiang. Piezoelectric-AlN resonators at two-dimensional flexural modes for density and viscosity decoupled determination of liquids [J]. Microsystems & Nanoengineering, 8: 38(12pp), 2022.4 (IF: 7.127)
  26. Yong Xia, Aifei Pan, Ya-Qiong Su, Sikai Zhao, Zhou Li, Adrian K. Davey, Libo Zhao*, Roya Maboudian*, Carlo Carraro*. In-situ synthesized N-doped ZnO for enhanced CO2 sensing: Experiments and DFT calculations [J]. Sensors & Actuators: B. Chemical, 357: 131359(9pp), 2022.1 (IF: 7.46)
  27. Zhikang Li, Libo Zhao*, Jie Li, Yihe Zhao, Tingzhong Xu, Shuaishuai Gu, Zicheng Liu, Guoxi Luo, Kaiming Hu, Wenming Zhang* and Zhuangde Jiang. Nonlinear behavior analysis of electrostatically actuated multilayer anisotropic microplates with residual stress [J]. Composite Structures, 255: 112964(14pp), 2021.1 (IF: 5.138)
  28. Lu Wang, Tianyiyi He, Zixuan Zhang, Libo Zhao*, Chengkuo Lee*, Guoxi Luo, Qi Mao, Ping Yang, Qijing Lin, Xiang Li, Ryutaro Maeda and Zhuangde Jiang. Self-sustained autonomous wireless sensing based on a hybridized TENG and PEG vibration mechanism [J]. Nano Energy, 80: 105555(12pp), 2021.2 (IF: 16.06)
  29. Guoxi Luo, Qiankun Zhang, Min Li, Ke Chen, Wenke Zhou, Yunyun Luo, Zhikang Li, Lu Wang, Li, Libo Zhao*, Kwok Siong Teh*, Zhuangde Jiang. A flexible electrostatic nanogenerator and self-powered capacitive sensor based on electrospun polystyrene mats and graphene oxide films[J]. Nanotechnology, 32: 405402(10pp), 2021.7 (IF: 3.874)
  30. Libo Zhao, Xiangguang Han, Qi Mao*, Zhikang Li*, Ping Yang, Qijing Lin, Hongyan Wang, Xin Yan, Songli Wang, Nan Zhu, Yonglu Wang, Jiuhong Wang, Zhuangde Jiang. Temperature-insensitive Silicon Resonant Pressure Sensor by Thermal Stress Control [J], Sensors and Actuators: A. Physical, 322:112612(10pp), 2021.5 (IF: 3.407)
  31. Min Li, Yunyun Luo, Chen Jia, Qiankun Zhang, Guoxi Luo*, Libo Zhao*, Rabah Boukherroub, Zhuangde Jiang. Facile Synthesis of Bimetal Nickel Cobalt Phosphate Nanostructures for High-Performance Hybrid Supercapacitors [J], Journal of Alloys and Compounds, 893: 162340(9pp), 2021.10 (IF: 5.316)
  32. Yong Xia, Aifei Pan, David W. Gardner, Sikai Zhao, Adrian K. Davey, Zhou Li, Libo Zhao*, Carlo Carraro, Roya Maboudian*. Well-connected ZnO nanoparticle network fabricated by in-situ annealing of ZIF-8 for enhanced sensitivity in gas sensing application [J]. Sensors and Actuators: B. Chemical, 344: 130180(12pp), 2021.5 (IF: 7.46)
  33. Zhikang Li, Shiming Zhang*, Yihang Chen, Haonan Ling, Libo Zhao*, Guoxi Luo, Xiaocheng Wang, Martin C. Hartel, Hao Liu, Yumeng Xue, Samad Ahadian, Nureddin Ashammakhi, Mehmet R. Dokmeci, Zhuangde Jiang and Ali Khademhosseini*. Gelatin methacryloyl-based tactile sensors for medical wearables [J]. Advanced Functional Materials, 30(49): 2003601(11pp), 2020.12 (IF: 16.836)
  34. Xiangguang Han, Qi Mao*, Libo Zhao*, Xuejiao Li, Li Wang, Ping Yang, Dejiang Lu, Yonglu Wang, Xin Yan, Songli Wang, Nan Zhu and Zhuangde Jiang. Novel resonant pressure sensor based on piezoresistive detection and symmetrical in-plane mode vibration [J]. Microsystems & Nanoengineering, 6: 95(11pp), 2020.11 (IF: 5.048)
  35. Lu Wang, Libo Zhao*, Guoxi Luo*, Yihe Zhao, Ping Yang, Zhuangde Jiang, Ryutaro Maeda. System Level Design of Wireless Sensor Node Powered by Piezoelectric Vibration Energy Harvesting [J]. Sensors and Actuators A: Physical, 310: 112039(10pp), 2020.8 (IF: 2.739)
  36. Tingzhong Xu, Libo Zhao*, Zhuangde Jiang, Shuaishuai Guo, Zhikang Li*, Ping Yang, Lin Sun, Guoxi Luo and Liangchi Zhang. Array design of piezoelectric micromachined ultrasonic transducers with low-crosstalk and high-emission performance [J]. IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control, 67(4): 789-800, APRIL 2020. 4(IF: 2.989)
  37. Guoxi Luo, Yunyun Luo, Qiankun Zhang, Shubei Wang, Lu Wang, Zhikang Li, Libo Zhao*, Kwok Siong Teh* and Zhuangde Jiang. The Radial Piezoelectric Response from Three-Dimensional Electrospun PVDF Micro Wall Structure [J]. Materials, 13(6): 1368(10pp.), 2020.3 (IF: 2.972)
  38. Libo Zhao, Linya Huang, Guoxi Luo, Jiuhong Wang, Hongyan Wang, Yongshun Wu, Zhikang Li, Xiangyang Zhou*, Zhuangde Jiang. An immersive resonant sensor with microcantilever for pressure measurement [J]. Sensors and Actuators A: Physical, 303: 111686(9pp), 2020.3. (IF: 2.739)
  39. Guoxi Luo, Kowk Siong Teh*, Yong Xia, Yunyun Luo, Zhikang Li, Shubei Wang, Libo Zhao*, Zhuangde Jiang. A novel three-dimensional spiral CoNi LDHs on Au@ErGO wire for high performance fiber supercapacitor electrodes [J]. Materials Letters, 236: 728-731, 2019.02 (SCI: HA9CY, WOS: 000450594300185, EI:20184606082560, IF:2.99)
  40. Ping Li, Libo Zhao*, Zhuangde Jiang, Mingzhi Yu, Zhen Li, and Xuejiao Li. Self-Powered Flexible Sensor Based on the Graphene Modified P(VDF-TrFE) Electrospun Fibers for Pressure Detection [J]. Macromolecular Materials and Engineering, 304(12): 1900504(8pp), 2019.10.3 (EI: 20194407593746, IF: 3.038)
  41. Ping Li, Libo Zhao*, Zhuangde Jiang, Mingzhi Yu, Zhen Li, Xiangyang Zhou* and Yulong Zhao. A wearable and sensitive graphene-cotton based pressure sensor for human physiological signals monitoring [J]. Scientific Reports, 9 (1): 14457(7pp), 2019.10.8. (WOS: 000489099500053, SCI: JC2IB, IF: 4.011)
  42. Lu Wang, Guoxi Luo*, Zhuangde Jiang, Fuzheng Zhang, Libo Zhao*, Ping Yang, Qijing Lin, Ryutaro Maeda. Broadband Vibration Energy Harvesting for Wireless Sensor Node Power Supply in Train Container [J]. Review of Scientific Instruments, 90(12): 125003(9pp.), 2019.12; (IF: 1.587)
  43. Yihe Zhao, Libo Zhao*, Zhikang Li, Jie Li, Ping Yang*, Tingzhong Xu, Zichen Liu, Shuaishuai Guo, Jiuhong Wang and Zhuangde Jiang. Capacitive micromachined ultrasonic transducers for transmitting and receiving ultrasound in air [J], Journal of Micromechanics and Microengineering, 29(12): 125015 (15pp), 2019.10. (WOS: 000494755600001, SCI: JK3OX,IF: 2.141)
  44. Lu Wang, Libo Zhao*, Zhuangde Jiang, Guoxi Luo*, Ping Yang, Xiangguang Han, Xiang Li, Ryutaro Maeda. High accuracy comsol simulation method of bimorph cantilever for piezoelectric vibration energy harvesting [J]. AIP Advances, 9(9): 095067(9pp), 2019.9. (WOS: 000488516200066, SCI: JB4HJ, IF: 1.579)
  45. Lu Wang, Jianjun Ding*, Zhuangde Jiang, Guoxi Luo, Libo Zhao*, Dejiang Lu, Xiao Yang, Ryutaro Maeda. A Packaged Piezoelectric Vibration Energy Harvester with High Power and Broadband Characteristics [J]. Sensors and Actuators A-Physical. 295: 629-636, 2019.8. (WOS: 000483635900069, SCI: IU5OA, IF: 2.739)
  46. Tingzhong Xu, Libo Zhao*, Zhuangde Jiang, Shuaishuai Guo, Zhikang Li, Guoxi Luo, Lin Sun, Liangchi Zhang. An analytical equivalent circuit model for optimization design of a broadband piezoelectric micromachined ultrasonic transducer with an annular diaphragm [J]. IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control, 66(11): 1760-1776, 2019.11. (WOS: 000494467600007, SCI: JJ9JF, EI: 20194507628121, IF: 2.989)
  47. Libo Zhao*, Jie Li, Zhikang Li*, Yihe Zhao, Guoxi Luo, Tingzhong Xu, Shuaishuai Guo, Zichen Liu, Jiuhong Wang and Zhuangde Jiang. A CMUT-based gas density sensor with high sensitivity [J]. Journal of Micromechanics and Microengineering, 29(11): 115012 (10pp), 2019.9. (WOS: 000487728600005, SCI: JA3ND, EI: 20191506767289, IF: 2.141)
  48. Libo Zhao, Yihe Zhao, Yong Xia, Zhikang Li, Jie Li, Jiawang Zhang, Jiuhong Wang, Xiangyang Zhou*, Yuanjie Li, Yulong Zhao and Zhuangde Jiang. A Novel CMUTs-based Resonant Biochemical Sensor Using Electrospinning Technology [J]. IEEE Transactions on Industrial Electronics, 66(9): 7356-7365, 2019.9 (SCI: HW9KT, WOS: 0004670104000701, EI: 20184506037783, IF: 7.05)
  49. Jianjun Ding*, Linya Huang, Guoxi Luo, Dejiang Lu, Jiuhong Wang, Libo Zhao* and Zhuangde Jiang. A resonant microcantilever sensor for in-plane multi-axis magnetic field measurements [J]. Journal of Micromechanics and Microengineering, 29(6): 065010(9pp.), 2019.4 (SCI: HX3HM, WOS: 000467282500001, EI: 20192607088180, IF: 2.141)
  50. Wendi Gao, Chen Jia, Zhuangde Jiang, Xiangyang Zhou*, Libo Zhao*, Dong Sun. The Design and Analysis of a Novel Micro Force Sensor Based on Depletion Type Movable Gate Field Effect Transistor [J]. IEEE/ASME Journal of Microelectromechanical Systems, 28(2): 298-310, 2019.4. (WOS:000463623600015, SCI: CF1BI, EI: 20151500731903, IF: 2.621)
  51. Yong Xia, Libo Zhao, Yunyun Luo, Rahmanohebibul, Jiuhong Wang, Lei Li, Guoxi Luo, Xiangyang Zhou*, Zhuangde Jiang. Optimizing electrospinning-hydrothermal hybrid process based on Taguchi method for modulation of point defects in ZnO micro/nano arrays towards photoelectronic application [J]. Journal of Alloys and Compounds, 779: 167-174, 2019.3.30. (WOS: 000457154700021, SCI: HJ4PA, EI: 20184706131034, IF: 4.175)
  52. Libo Zhao, Yunyun Luo, Xiangxiang Huang, Xiangyang Zhou*, Rahman·hebibul, Jianjun Ding, Zhikang Li, Zhuangde Jiang. A Novel Micro Sensor for Measuring Thermal Conductivity of Fluid Based on three omega Method [J]. Review of Scientific Instruments, 90(1): 015002 (9pp.), 2019.1. (WOS: 000457411800048, SCI: HJ7XX, EI: 20190206358803, IF: 1.587)
  53. Libo Zhao, Linya Huang, Yingjie Hu, Weile Jiang, Dejiang Lu, Zhikang Li, Xiangyang Zhou* and Jiuhong Wang. Temperature compensation in fluid density measurement using micro-electromechanical resonant sensor [J]. Review of Scientific Instruments, 89(12): 125001(8pp.), 2018.12. (WOS: 000454631900055, SCI: HG0KC, EI: 20184706131034, IF: 1.428) 
  54. Lu Wang, Dejiang Lu, Zhuangde Jiang, Chen Jia, Yumeng Wu, Xiangyang Zhou*, Libo Zhao*, and Yulong Zhao. A Piezoelectric Cantilever with Novel Large Mass for Harvesting Energy from Low Frequency Vibrations [J]. AIP Advances, 8: 115205(9pp.), 2018. (WOS:000451737400076, SCI: HC3XX, EI: 20184606069467, IF: 1.65)
  55. Zhikang Li, Libo Zhao*, Zhuangde Jiang, Yihe Zhao, Jie Li, Jiawang Zhang, Yulong Zhao, and Liwei Lin. A closed-form approach for the resonant frequency analysis of clamped rectangular microplates under distributed electrostatic force [J], Sensors and Actuators A, 280: 447-458, 2018.8.11. (SCI: GW6UE, EI: 20183405732488, IF: 2.311)
  56. Guoxi Luo, Kwok Siong The*, Yong Xia, Zhikang Li, Yunyun Luo, Libo Zhao*, Zhuangde Jiang. Construction of NiCo2O4@NiFe LDHs core/shell nanowires array on carbon cloth for flexible, high-performance pseudocapacitor electrodes [J], Journal of Alloys and Compounds, 767: 1126-1132, 2018.7.18. (SCI: GV7OD, EI: 20183005594567, IF: 3.779）
  57. Libo Zhao*, Yong Xia, Rahman·hebibul, Jiuhong Wang, Xiangyang Zhou*, Yingjie Hu, Zhikang Li, Guoxi Luo, Yulong Zhao and Zhuangde Jiang. Evaluation of width and width uniformity of near-field electrospinning printed micro and sub-micrometer lines based on optical image processing [J], Journal of Micromechanics and Microengineering, 28(3): 035010(11pp.), 2018.2.2. (SCI: FU7MH, EI: 20180604773157, IF: 1.794)
  58. Libo Zhao∗, Yingjie Hu, Rahman Hebibul, Yong Xia, Linya Huang, Yulong Zhao, Zhuangde Jiang. Density measurement sensitivity of micro-cantilevers influenced by shape dimensions and operation modes [J], Sensors and Actuators B: Chemical, 245: 574-582, 2017.2.1. (SCI: ER4HW, EI: 20170703339190, IF: 5.401)
  59. Libo Zhao*, Jie Li, Zhikang Li, Jiawang Zhang, Yihe Zhao, Jiuhong Wang, Yong Xia, Ping Li, Yulong Zhao, Zhuangde Jiang. Fabrication of Capacitive Micromachined Ultrasonic Transducers with Low-Temperature Direct Wafer-Bonding Technology [J], Sensors and Actuators A: Physical, 264: 63-75, 2017.9.1. (SCI: FI2NF, EI: 20173204028730, IF: 2.499)
  60. Tingzhong Xu, Dejiang Lu, Libo Zhao*, Zhuangde Jiang, Hongyan Wang*, Xin Guo, Zhikang Li, Xiangyang Zhou and Yulong Zhao. Application and Optimization of Stiffness Abruption Structures for Pressure Sensors with High Sensitivity and Anti-Overload Ability [J], Sensors, 17(9): 1965 (25pp.), 2017.8.26. (SCI: FH8WD, EI: 20173504105732, IF: 2.677)
  61. Dezhi Wu, Yu Sun, Kwok Siong Teh, Yuchao Zhu, Yihui Luo, Lei Deng, Libo Zhao, Guoxi Luo, Yang Zhao, Lingyun Wang and Daoheng Sun. Investigation of electrohydrodynamic behaviors from open planar solution under rod-induced electrospinning [J], Journal of Physics D: Applied Physics, 50: 455602(10pp), 2017.10.23.
  62. Tingzhong Xu, Libo Zhao*, Zhuangde Jiang, Yu Xu, Yulong Zhao. Modeling and analysis of a novel combined peninsula–island structure diaphragm for ultra-low pressure sensing with high sensitivity [J], Journal of Physics D: Applied Physics, 49(7): 075110 (26pp), 2016.1. (SCI: DC7MG, EI: 20160701924020, IF: 2.588)
  63. Yu Xu, Libo Zhao*, Zhuangde Jiang, Jianjun Ding, Niancai Peng and Yulong Zhao. A Novel Piezoresistive Accelerometer with SPBs to Improve the Tradeoff between the Sensitivity and the Resonant Frequency [J], Sensors, 16(2): 210 (15pp), 2016.2.6. (SCI: DG0WX, EI: 20160701912944, IF: 2.677)
  64. Yue Chuang, Yu Yingjian, Wu Zhenguo, Sun Shibo, He Xu, Li JunTao, Zhao Libo, Wu Suntao, Li Jing*, Kang Junyong, Lin Liwei. High stability induced by the TiN/Ti interlayer in 3D Si/Ge nanorod arrays as anode in Micro Lithium Ion Battery [J], ACS Applied Materials & Interfaces, 8(12):7806-7810, 2016.3.8. (SCI: DI5DQ, EI: 20161702282143, IF: 7.145)
  65. Tingzhong Xu, Libo Zhao*, Zhuangde Jiang, Xin Guo, Jianjun Ding, Wei Xiang, Yulong Zhao. A high sensitive pressure sensor with the novel bossed diaphragm combined with peninsula-island structure [J], Sensors and Actuators A: Physical, 244: 66-76, 15 June 2016. (SCI: DN8JC, EI: 20161702305684, IF: 2.499)
  66. Yu Xu, Libo Zhao*, Zhuangde Jiang, Jianjun Ding, Tingzhong Xu, Yulong Zhao. Analysis and design of a novel piezoresistive accelerometer with axially stressed self-supporting sensing beams [J], Sensors and Actuators A: Physical, 247: 1-11, 15 August 2016. (SCI: DW7JX, EI: 20162502514644, IF: 2.499)
  67. Libo Zhao*, Yingjie Hu, Tongdong Wang, Jianjun Ding, Xixiang Liu, Yulong Zhao, Zhuangde Jiang. A MEMS Resonant Sensor to Measure Fluid Density and Viscosity under Flexural and Torsional Vibrating Modes [J], Sensors, 16(6): 830 (15pp.), 2016.6.6. (SCI: DP8OC, EI: 20162402485252, IF: 2.677)
  68. Libo Zhao*, Yingjie Hu, Rahman Hebibul, Jianjun Ding, Tongdong Wang, Tingzhong Xu, Xixiang Liu, Yulong Zhao and Zhuangde Jiang. A Novel Slope Method for Measurement of Fluid Density with a Micro-cantilever under Flexural and Torsional Vibrations [J], Sensors, 16(9): 1471 (13pp.), 2016.9.11. (SCI: DZ0KN, EI: 20163802820582, IF: 2.677)
  69. Libo Zhao*, Tingzhong Xu, Rahman.hebibul, Zhuangde Jiang, Jianjun Ding, Niancai Peng, Xin Guo, Yu Xu, Hongyan Wang, Yulong Zhao. A bossed diaphragm piezoresistive pressure sensor with peninsula-island structure for ultra-low-pressure range with high sensitivity [J], Measurement Science and Technology, 27(12): 124012 (21pp), 2016.10.25. (SCI: DN8JC, EI: 20161702305684, IF: 1.585)
  70. Zhikang Li, Libo Zhao*, Zhuangde Jiang, Zhiying Ye, Lu Dai and Yulong Zhao. Mechanical behavior analysis on electrostatically actuated rectangular microplates [J], Journal of Micromechanics and Microengineering, 25(3): 035007(12pp.), 2015.2. (SCI: CC3PQ, EI: 20150900589764, IF: 1.725)
  71. Zhikang Li, Libo Zhao*, Zhuangde Jiang, Zhiying Ye, and Yulong Zhao. An improved method for the mechanical behavior analysis of electrostatically actuated microplates under uniform hydrostatic pressure [J], IEEE/ASME Journal of Microelectromechanical Systems, 24(2): 474-485, April 2015. (SCI: CF1BI, EI: 20151500731903, IF: 1.915)
  72. Zhikang Li, Libo Zhao*, Zhuangde Jiang, Sina Akhbari, Jianjun Ding, Yihe Zhao, Yulong Zhao, and Liwei Lin. Capacitive micromachined ultrasonic transducer for ultra-low pressure measurement: Theoretical study [J], AIP Advances, 5(12): 127231 (10pp), 2015.12.24. (SCI: DA1ZY, EI: 20160101763792, IF: 1.590)
  73. Yuan Zhong, Chuang Yue, Binbin Chen, Shibo Sun, Mingsen Zheng, Libo Zhao, Suntao Wu, Jing Li*, Junyong Kanga and Liwei Lin. Synthetic preparation of novel 3D Si/TiO2–Ti2O3 composite nanorod arrays as anodes in lithium ion batteries [J], RSC Advances, 5(47): 37399-37404, 2015.4. （SCI: CG9QT, EI: 20151900835059, IF: 3.289）
  74.  Libo Zhao, Longqi Xu, Guiming Zhang, Zhuangde Jiang, Yulong Zhao, Jiuhong Wang, Xiaopo Wang, and Zhigang Liu. In-Situ Measurement of Fluid Density Rapidly Using a Vibrating Piezoresistive Microcantilever Sensor Without Resonance Occurring [J], IEEE Sensors Journal, 14(3): 645-650, 2014.（SCI源刊, EI: 20140417220056, IF: 1.52）
  75. Guiming Zhang, Libo Zhao*, Zhuangde Jiang, Longqi Xu, Yulong Zhao, Jiuhong Wang, Xiaopo Wang and Zhigang Liu. DC current measurement utilizing a reasonant magnetically actuated piezoresistive microcantilever [J], Measurement Science and Technology, 24(12): 125102(6pp), 2013.（SCI: 260LZ, EI: 20134917060933, IF: 1.435）
  76. Libo Zhao, Xin Guo, Xiawei Meng, Rahman Hebibul, Yulong Zhao, Jianzhu Wang and Zhuangde Jiang. An ultra-high pressure sensor with cylinder structure [J], Journal of Mechanical Science and Technology, 27(8): 2383-2389, 2013.（SCI: 219YS, EI: 20133916792465, IF: 0.616）
  77. Guiming Zhang, Libo Zhao*, Longqi Xu, Zhuangde Jiang, Yulong Zhao, Xiaopo Wang, and Zhigang Liu. Active Frequency Tuning for Magnetically Actuated and Piezoresistively Sensed MEMS Resonators [J], IEEE Electron Device Letters, 34(7): 921-923, 2013.（SCI: 208NL, EI: 20132916512679, IF:2.789）
  78. Zhikang Li, Libo Zhao*, Zhiying Ye, Hongyan Wang, Yulong Zhao and Zhuangde Jiang. Resonant frequency analysis on an electrostatically actuated microplate under uniform hydrostatic pressure [J], J. Phys. D: Appl. Phys. 46(19): 195108 (7pp), 2013.（SCI: 133OC, EI: 20131916309826 , IF: 2.528）
  79. Li-bo ZHAO, Long-qi XU, Gui-ming ZHANG, Yu-long ZHAO, Xiao-po WANG, Zhi-gang LIU, Zhuang-de JIANG. A trapezoidal cantilever density sensor based on MEMS technology [J], Journal of Zhejiang University-SCIENCE C (Computers & Electronics), 14(4):274-278, 2013.（SCI: 123DN, EI: 20132116353076, IF: 0.297）
  80. Guiming Zhang, Libo Zhao*, Zhuangde Jiang, Shuming Yang, Yulong Zhao, Enze Huang, Rahman·Hebibul, Xiaopo Wang and Zhigang Liu. Surface stress-induced deflection of a microcantilever with various widths and overall microcantilever sensitivity enhancement via geometry modification [J], Journal of Physics D: Applied Physics, 44(42): 425402(11pp), 2011.（SCI: 842IF, EI: 20114414481155, IF: 2.528）