Facilities

Leveraging the Key Laboratory of Non-equilibrium Synthesis and Modulation of Materials under the Ministry of Education (教育部物质非平衡合成与调控重点实验室), the Shaanxi Key Laboratory of Advanced Functional Materials and Mesoscopic Physics (陕西省先进功能材料及介观物理重点实验室), the Shared Analysis and Testing Center of Xi'an Jiaotong University (西安交通大学分析测试共享中心), and the Atomic Manufacturing and Device Physics Team of Xi'an Jiaotong University (西安交通大学原子制造与器件物理团队), we have a comprehensive public experimental platform for micro-nano fabrication and material property characterization. The platform is equipped with first-class domestic facilities for micro-nano fabrication and device characterization, including a vacuum transfer stage (真空转移台), electron beam lithography system (电子束曝光系统), evaporation system (蒸镀系统), high-resolution X-ray diffractometer (高分辨X射线衍射仪), high-temperature annealing furnace (高温退火炉), field emission scanning electron microscope (场发射扫描电镜), laser confocal Raman spectroscopy transmission electron microscope (激光共聚焦拉曼光谱透射电子显微镜), and other micro-nano processing equipment suitable for fundamental research. This public experimental platform is capable of fully characterizing the morphology, crystal structure, and electrical properties of materials, and can meet the requirements for micro-nano device fabrication and fundamental property testing.