An area-variant type MEMS capacitive sensor based on a novel bionic swallow structure for high sensitive nano-indentation measurement
发布时间：2025-04-30
点击次数：
- 发布时间：
- 2025-04-30
- 论文名称：
- An area-variant type MEMS capacitive sensor based on a novel bionic swallow structure for high sensitive nano-indentation measurement
- 发表刊物：
- Measurement
- 合写作者：
- Wendi Gao, Cunlang Liu, Tao Liu, Libo Zhao*,. .., Zhuangde Jiang, Dong Sun
- 卷号：
- 200
- 页面范围：
- 111634
- 是否译文：
- 否
- 发表时间：
- 2022-08-01