A bionic approach for mechanical and electrical decoupling of MEMS capacitive sensor in ultralow force measurement
发布时间：2025-04-30
点击次数：
- 发布时间：
- 2025-04-30
- 论文名称：
- A bionic approach for mechanical and electrical decoupling of MEMS capacitive sensor in ultralow force measurement
- 发表刊物：
- Frontiers of Mechanical Engineering
- 合写作者：
- Wendi Gao, Bian Tian, Cunlang Liu, Yingbiao Mi, Chen Jia, Libo Zhao, Tao Liu, et al
- 是否译文：
- 否
- 发表时间：
- 2023-07-14