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超声喷雾热分解化合物半导体薄膜制备系统

Release Time:2025-04-30
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Title:
超声喷雾热分解化合物半导体薄膜制备系统
Disigner of the Invention:
郭烈锦、苏进展、李明涛、张西民
Type of Patent:
Invent
Application Number:
ZL200710018065.9
Service Invention or Not:
No
Application Date:
2007-10-01
Date:
2025-04-30