Modeling and analysis of commonpath phase shifting shear system based on birefringent optical devices
发布时间：2025-04-30
点击次数：
- 发布时间：
- 2025-04-30
- 论文名称：
- Modeling and analysis of commonpath phase shifting shear system based on birefringent optical devices
- 发表刊物：
- Journal of nonlinear optical physics & materials
- 摘要：
- In the technology of optical surface measurement, the phase-shifting shear interferometer had been widely used. In measurement, the phase-shifting was introduced in time domain, and the measurement system adopted double optical path for change phase-shifting and shear, so the measurement accuracy was limited. To decrease error, a commonpath phase-shifting shear system based on birefringent optical devices was introduced. In this system, the lateral shear and phase-shifting 0, pi/2, pi, 3 pi/2 was introduced in the commonpath optical system. Because the birefringent optical devices can introduce shear in the collinear optical system, a new Jones matrix was established. Based on the Jones matrix theory, the principle theory was analyzed in detail. In the experiment, an optical surface was measured with this system. The theoretical analysis and experiment results demonstrate the feasibility of this approach.
- 合写作者：
- W. Hongjun, W. Zhao, T. Ailing and Liu Bingcai
- 卷号：
- 17(4)
- 页面范围：
- 503-510
- 是否译文：
- 否
- 发表时间：
- 2008-12-01