高端装备是先进制造技术、信息技术和控制技术的有机结合。高性能传感器是装备信息技术的主要入口，是装备实现智能化的首要前提。

 课题组面向航空航天、高端装备、国防、石油化工、生物医疗等领域的应用需求，长期从事高端MEMS先进传感技术的研究工作，先后研制出：

• 系列高动态压力/加速度特种传感器，解决了力敏芯片的高灵敏度与高频响测量难题；

• 系列耐高温压阻力敏芯片，解决了高温条件下的压力测量难题；

• 系列MEMS黏密度及热物性传感器，解决了流体黏密度及热物性等参量在线测量难题；

• 系列超声（PMUT/CMUT）传感器，解决了微小尺度声学量高性能收发难题；

• 系列多维力传感器，解决了姿轨控发动机、人形机器人手指关节等领域多轴向力精确检测难题；

• 系列MEMS微力传感器，突破了亚nN级分辨力，解决了生物细胞力学等前沿极端量测量难题。

代表性研究成果

1. Libo Zhao, Yihe Zhao, Yong Xia, Zhikang Li, Jie Li, Jiawang Zhang, Jiuhong Wang, Xiangyang Zhou*, Yuanjie Li, Yulong Zhao and Zhuangde Jiang. A Novel CMUTs-based Resonant Biochemical Sensor Using Electrospinning Technology [J]. IEEE Transactions on Industrial Electronics, 66(9): 7356-7365, 2019.9 (IF: 8.23)
2. Tingzhong Xu, Libo Zhao*, Zhuangde Jiang, Shuaishuai Guo, Zhikang Li*, Ping Yang, Guoxi Luo, Lin Sun, Liangchi Zhang. Equivalent circuit models of cell and array for resonant cavity-based piezoelectric micromachined ultrasonic transducer [J]. IEEE transactions on ultrasonics, ferroelectrics, and frequency control, 67(10): 2103-2118, 2020.10 (IF: 2.72)
3. Xiangguang Han, Qi Mao*, Libo Zhao*, Xuejiao Li, Li Wang, Ping Yang, Dejiang Lu, Yonglu Wang, Xin Yan, Songli Wang, Nan Zhu and Zhuangde Jiang. Novel resonant pressure sensor based on piezoresistive detection and symmetrical in-plane mode vibration [J]. Microsystems & Nanoengineering, 6: 95(11pp), 2020.11 (IF: 7.12)
4. Zhikang Li, Libo Zhao*, Jie Li, Yihe Zhao, Tingzhong Xu, Shuaishuai Gu, Zicheng Liu, Guoxi Luo, Kaiming Hu, Wenming Zhang* and Zhuangde Jiang. Nonlinear behavior analysis of electrostatically actuated multilayer anisotropic microplates with residual stress [J]. Composite Structures, 255: 112964(14pp), 2021.1 (IF: 5.41)

针对智能机器人触觉感知、人体手势识别、人体健康监测等主要应用领域，课题组开展了柔性多参量集成传感器的研发工作，突破传感器阵列一体化加工、轻薄封装等关键技术，研究传感信号特征提取方法，实现对环境参量、人体姿态、物体材质、突发事件等信息的高效识别、分析与决策。

代表性科研成果

1. Zhikang Li, Shiming Zhang*, Yihang Chen, Haonan Ling, Libo Zhao*, Guoxi Luo, Xiaocheng Wang, Martin C. Hartel, Hao Liu, Yumeng Xue, Samad Ahadian, Nureddin Ashammakhi, Mehmet R. Dokmeci, Zhuangde Jiang and Ali Khademhosseini*. Gelatin methacryloyl-based tactile sensors for medical wearables [J]. Advanced Functional Materials, 30(49): 2003601(11pp), 2020.12.1 (IF: 18.08)
2. Guoxi Luo, Qiankun Zhang, Min Li, Ke Chen, Wenke Zhou, Yunyun Luo, Zhikang Li, Lu Wang, Li, Libo Zhao*, Kwok Siong Teh*, Zhuangde Jiang. A flexible electrostatic nanogenerator and self-powered capacitive sensor based on electrospun polystyrene mats and graphene oxide films[J]. Nanotechnology, 32: 405402(10pp), 2021.7 (IF: 3.87)
3. Min Li, Yunyun Luo, Chen Jia, Qiankun Zhang, Guoxi Luo*, Libo Zhao*, Rabah Boukherroub, Zhuangde Jiang. Facile Synthesis of Bimetal Nickel Cobalt Phosphate Nanostructures for High-Performance Hybrid Supercapacitors [J], Journal of Alloys and Compounds, 893: 162340(9pp), 2021.10 (IF: 5.31)

量子精密测量技术作为量子信息领域三大技术之一，在国防和工业领域有着潜在重要的应用。课题组基于原子自旋效应，开发了超高灵敏量子磁强计，检测限达fT及以下，可对脑磁等极微弱生物磁场探测，可用于癫痫、抑郁症等重大疾病的诊断用心脑磁影像设备。研发了基于离子囚禁体系的量子精密测量系统，实现了10^-24N的极微弱力和1nV/m的超高分辨率电场梯度测量，有望在前沿基础科学领域中发挥重要作用。

代表性科研成果：

1. Yintao Ma, Yao Chen*, Libo Zhao*, Guoxi Luo, Mingzhi Yu, Yanbin Wang, Ju Guo, Ping Yang, Qijing Lin, Zhuangde Jiang. The micro-fabrication and performance analysis of non-magnetic heating chip for miniaturized SERF atomic magnetometer [J]. Journal of Magnetism and Magnetic Materials, 557: 169495(10pp), 2022.9.1.
2. Yao Chen*, Mingzhi Yu, Yintao Ma, Yanbin Wang, Ju Guo, Qijing Lin, Ning Zhang, Zhuangde Jiang and Libo Zhao*. Quadrupolar interaction induced frequency shift of 131Xe nuclear spins on the surface of silicon [J]. Journal of Physics D: Applied Physics, 55: 355102(9pp), 2022.6.16.
3. Yao Chen, Libo Zhao, Ning Zhang*, Mingzhi Yu, Yintao Ma, Xiangguang Han, Man Zhao, Qijing Lin, Ping Yang, and Zhuangde Jiang. Single beam Cs-Ne SERF atomic magnetometer with the laser power differential method [J]. Opt. Express, 30:16541-16552, 2022.5.9
4. Yintao Ma, Yao Chen*, Libo Zhao*, Mingzhi Yu, Yanbin Wang, Ju Guo, Ping Yang, Qijing Lin and Zhuangde Jiang. Accurate determination of alkali-atom density based on zero-field magnetic resonance in single-beam SERF atomic magnetometer [J]. Measurement Science and Technology, 33:105003, 2022.10.1.
5. Mingzhi Yu, Yao Chen*, Yanbin Wang, Yintao Ma, Guoxi Luo, Shun Lu, Libo Zhao*, Ping Yang, Qijing Lin, Zhuangde Jiang. Plasma-activated high-strength non-isothermal anodic bonding for efficient fabrication of the micro atomic vapor cells [J]. Journal of Materials Research and Technology, 27: 1046-1057, 2023.11.18
6. Mingzhi Yu, Yao Chen*, Yongliang Wang, Xiangguang Han, Guoxi Luo, Libo Zhao*, Yanbin Wang, Yintao Ma, Shun Lu, Ping Yang, Qijing Lin, Kaifei Wang*, Zhuangde Jiang. Microfabricated Atomic Vapor Cells with Multi-Optical Channels Based on an Innovative Inner-Sidewall Molding Process [J]. Engineering, 35: 46-55, 2024.7.3
7. Yintao Ma ,Yao Chen1*,Mingzhi Yu , Yanbin Wang , Shun Lu, Ju Guo , Guoxi Luo, Libo Zhao*, Ping Yang, Qijing Lin and Zhuangde Jiang,Ultrasensitive SERF atomic magnetometer with a miniaturized hybrid vapor cell[J]. Microsystems & Nanoengineering, 10(1):121(10pp.),2024.8.30 

课题组振动能量收集及自供电传感技术方向，致力于机电耦合非线性振动理论分析、压电、电磁、摩擦电振动能量收集器设计及制造，摩擦电振动传感器设计及制造，自供电电源管理设计，低功耗无线节点开发和自供电物联网应用等核心关键技术研究。

代表性研究成果

1. Lu Wang, Tianyiyi He, Zixuan Zhang, Libo Zhao*, Chengkuo Lee*, Guoxi Luo, Qi Mao, Ping Yang, Qijing Lin, Xiang Li, Ryutaro Maeda and Zhuangde Jiang. Self-sustained autonomous wireless sensing based on a hybridized TENG and PEG vibration mechanism [J]. Nano Energy, 80: 105555(12pp), 2021.2 (IF: 16.06)
2. Lu Wang, Jianjun Ding*, Zhuangde Jiang, Guoxi Luo, Libo Zhao*, Dejiang Lu, Xiao Yang, Ryutaro Maeda. A Packaged Piezoelectric Vibration Energy Harvester with High Power and Broadband Characteristics [J]. Sensors and Actuators A-Physical. 295: 629-636, 2019.8 (IF: 2.739)
3. Lu Wang, Guoxi Luo*, Zhuangde Jiang, Fuzheng Zhang, Libo Zhao*, Ping Yang, Qijing Lin, Ryutaro Maeda. Broadband Vibration Energy Harvesting for Wireless Sensor Node Power Supply in Train Container [J]. Review of Scientific Instruments, 90(12): 125003(9pp.), 2019.12 (IF: 1.587)