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发表文章

Paper Name    An area-variant type MEMS capacitive sensor based on a novel bionic swallow structure for high sensitive nano-indentation measurement
Author    Wendi Gao, Cunlang Liu, Tao Liu, Libo Zhao*,. .., Zhuangde Jiang, Dong Sun
Publication/Completion Time    2022-08-01
Magazine Name    Measurement
Vol    200
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