文章课题 - 刘 涛
Project name | 第三代半导体SiC晶片智能检测技术与装置研发(2023YFE0203800) |
Project origin | 国家重点研发计划重点专项 |
Start Date | 2023-07~- |
Project Fund | Ten thousand yuan |
Project kind | Vertical project |
Project status | Processing |
Project advantage | Good development prospect Product or process is innovative Remarkable economical benefit Significant social benefits |
Technical excellence | |
Feasibility | |
Description |