潘毅  (教授)

博士生导师 硕士生导师

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所在单位:材料科学与工程学院

学历:博士研究生毕业

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性别:男

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学位:博士

学科:半导体材料与器件
物理学

   

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全真空装备6 -Vacuum: power-free vacuum suitcase for sample transfer and characterization

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发布时间:2023-01-04

发布时间:2023-01-04

文章标题:全真空装备6 -Vacuum: power-free vacuum suitcase for sample transfer and characterization

内容:

 

  

Vacuum 209, 2023, 111804

https://doi.org/10.1016/j.vacuum.2023.111804

 

Highlights of this work:

• A NEG-only multifunctional vacuum suitcase for both sample storage and cryogenic optical characterizations is reported.

• The test of prototype system shows it could be maintained at 10−8 mbar level for 5 h and 10−7 mbar level for more 20 days.

• The finite element simulation and test results shows the sample temperature could reach ∼80 K.

• Sample transfer between MBE and STM was successfully performed, confirming it could facilitate the study of sensitive 2D materials.

 

 

该工作主要由博士生吴迪和硕士生王栋立同学完成,本科生冯松杰同学独立完成了冷台的有限元仿真工作。

基于该项工作,我们获得了一项中国发明专利授权,专利号:ZL 202010224826.1

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