研究内容一  高温传感技术

        课题组针对航空航天、石化、军工等极端环境下高温温度感知难等问题，开展高温薄膜温度传感器的研发工作，实现了传感器在极端环境下高温、高频响、极端量程的测试，制备的温度传感器已应用于多个航空航天单位，解决了超高温温度测量等技术难题。

代表性科研成果

[1] Zhang Z, Tian B, Liu Y, et al. Thermoelectric Characteristics of Silicon Carbide and Tungsten-Rhenium-Based Thin-Film Thermocouples Sensor

     with Protective Coating Layer by RF Magnetron Sputtering[J]. Materials, 2019, 12(12): 1981. (SCI)(EI)  3.057
[2] Zhang Z, Tian B, Du Z, et al. Effect of Oxidation on Conductivity Characteristics of Tungsten-Rhenium Thin-Film Thermocouples Sensor [M].

     2019 14th Annual Ieee International Conference on Nano/Micro Engineered and Molecular Systems. 2019: 114-7.(EI)
[3] Zhang Z, Tian B, Du Z, et al. Impact of Magnetron Sputtering Parameters on Thermoelectric Properties of Tungsten-Rhenium Thin-Film

     Thermocouples Sensor[J]. IEEE Sensors Journal, 2018, 18(24): 9896-9901. (SCI)(EI)   3.073

[4] Zhang Z, Tian B, Yu Q, et al. Range analysis of thermal stress and optimal design for tungsten-rhenium thin film thermocouples based on

     ceramic substrates[J]. Sensors, 2017, 17(4): 857. (SCI)(EI)  3.275

研究内容二  柔性传感技术

        课题组针对智能机器轻巧手、航空航天等温度感知主要应用领域，开展柔性薄膜温度传感器的研发工作，解决了传感器测试灵敏度低、测温温域窄等关键技术问题，实现柔性传感器在生物医疗、探险排难等领域温度信息的实时采集。

代表性科研成果

[1] Liu Z, Tian B, Fan X, et al. A temperature sensor based on flexible substrate with ultra-high sensitivity for low temperature measurement[J]. 

     Sensors and Actuators A: Physical, 2020, 315:112341.
[2] Liu Z, Tian B*, Zhang B, et al. A thin-film temperature sensor based on flexible design of electrodes and substrate[J]. MICROSYSTEMS &

     NANOENGINEERING, 2021, 7(1):42.
[3] Liu Z, Tian B*, Zhang B, et al. High-performance temperature sensor by employing printed thermoelectric technology[J].

     Micromachines,2021,12(8):924.

研究内容三  微压传感技术

        压力传感器是市场需求最大的传感器之一。课题组提出偏心反射式光纤 MEMS 微压传感器，将梁膜结构 MEMS 膜片应用到了光纤准直器式光纤压力传感器上，设计的传感器除具有较好的灵敏度，还具有易于解调、温度特性好、动态响应好等特点。

代表性科研成果

[1] Tian B, Li K, Liu J, et al. Eccentric reflective optical fiber MEMS micro-pressure sensor [J]. Journal of Micromechanics and Microengineering, 

     2020, 30(8): 

[2] Tian B, Li K, Zhang Z, et al. Optical Fiber MEMS Micro Pressure Sensor Based On Beam-membrane Structure[C]. nano micro engineered and

     molecular systems, 2019: 135-138.

[3] Tian B, Zhan F, Han F, et al. An optical fiber Fabry–Pérot micro-pressure sensor based on beam-membrane structure[J]. Measurement

     Science and Technology, 2018, 29(12): 125104.