研究方向一、高端MEMS传感器

 高端装备是先进制造技术、信息技术和控制技术的有机结合。高性能传感器是装备信息技术的主要入口,是装备实现智能化的首要前提。

 课题组面向航空航天、高端装备、国防、石油化工、生物医疗等领域的应用需求,长期从事高端MEMS先进传感技术的研究工作,先后研制出:

  • 系列高动态压力/加速度特种传感器,解决了力敏芯片的高灵敏度与高频响测量难题;

  • 系列耐高温压阻力敏芯片,解决了高温条件下的压力测量难题;

  • 系列MEMS黏密度及热物性传感器,解决了流体黏密度及热物性等参量在线测量难题;

  • 系列超声(PMUT/CMUT)传感器,解决了微小尺度声学量高性能收发难题;

  • 系列多维力传感器,解决了姿轨控发动机、人形机器人手指关节等领域多轴向力精确检测难题;

  • 系列MEMS微力传感器,突破了亚nN级分辨力,解决了生物细胞力学等前沿极端量测量难题。

         

 

代表性研究成果

  1. Libo Zhao, Yihe Zhao, Yong Xia, Zhikang Li, Jie Li, Jiawang Zhang, Jiuhong Wang, Xiangyang Zhou*, Yuanjie Li, Yulong Zhao and Zhuangde Jiang. A Novel CMUTs-based Resonant Biochemical Sensor Using Electrospinning Technology [J]. IEEE Transactions on Industrial Electronics, 66(9): 7356-7365, 2019.9 (IF: 8.23)
  2. Tingzhong Xu, Libo Zhao*, Zhuangde Jiang, Shuaishuai Guo, Zhikang Li*, Ping Yang, Guoxi Luo, Lin Sun, Liangchi Zhang. Equivalent circuit models of cell and array for resonant cavity-based piezoelectric micromachined ultrasonic transducer [J]. IEEE transactions on ultrasonics, ferroelectrics, and frequency control, 67(10): 2103-2118, 2020.10 (IF: 2.72)
  3. Xiangguang Han, Qi Mao*, Libo Zhao*, Xuejiao Li, Li Wang, Ping Yang, Dejiang Lu, Yonglu Wang, Xin Yan, Songli Wang, Nan Zhu and Zhuangde Jiang. Novel resonant pressure sensor based on piezoresistive detection and symmetrical in-plane mode vibration [J]. Microsystems & Nanoengineering, 6: 95(11pp), 2020.11 (IF: 7.12)
  4. Zhikang Li, Libo Zhao*, Jie Li, Yihe Zhao, Tingzhong Xu, Shuaishuai Gu, Zicheng Liu, Guoxi Luo, Kaiming Hu, Wenming Zhang* and Zhuangde Jiang. Nonlinear behavior analysis of electrostatically actuated multilayer anisotropic microplates with residual stress [J]. Composite Structures, 255: 112964(14pp), 2021.1 (IF: 5.41)

研究方向二、柔性智能传感与人机交互

针对智能机器人触觉感知、人体手势识别、人体健康监测等主要应用领域,课题组开展了柔性多参量集成传感器的研发工作,突破传感器阵列一体化加工、轻薄封装等关键技术,研究传感信号特征提取方法,实现对环境参量、人体姿态、物体材质、突发事件等信息的高效识别、分析与决策。

           

         

 

代表性科研成果

  1. Zhikang Li, Shiming Zhang*, Yihang Chen, Haonan Ling, Libo Zhao*, Guoxi Luo, Xiaocheng Wang, Martin C. Hartel, Hao Liu, Yumeng Xue, Samad Ahadian, Nureddin Ashammakhi, Mehmet R. Dokmeci, Zhuangde Jiang and Ali Khademhosseini*. Gelatin methacryloyl-based tactile sensors for medical wearables [J]. Advanced Functional Materials, 30(49): 2003601(11pp), 2020.12.1 (IF: 18.08)
  2. Guoxi Luo, Qiankun Zhang, Min Li, Ke Chen, Wenke Zhou, Yunyun Luo, Zhikang Li, Lu Wang, Li, Libo Zhao*, Kwok Siong Teh*, Zhuangde Jiang. A flexible electrostatic nanogenerator and self-powered capacitive sensor based on electrospun polystyrene mats and graphene oxide films[J]. Nanotechnology, 32: 405402(10pp), 2021.7 (IF: 3.87)
  3. Min Li, Yunyun Luo, Chen Jia, Qiankun Zhang, Guoxi Luo*, Libo Zhao*, Rabah Boukherroub, Zhuangde Jiang. Facile Synthesis of Bimetal Nickel Cobalt Phosphate Nanostructures for High-Performance Hybrid Supercapacitors [J], Journal of Alloys and Compounds, 893: 162340(9pp), 2021.10 (IF: 5.31)

研究方向三、量子传感与量子精密测量

量子精密测量技术作为量子信息领域三大技术之一,在国防和工业领域有着潜在重要的应用。课题组基于原子自旋效应,开发了超高灵敏量子磁强计,检测限达fT以下,可对脑磁等极微弱生物磁场探测,可用于癫痫、抑郁症等重大疾病的诊断用心脑磁影像设备。研发了基于离子囚禁体系的量子精密测量系统,实现了10-24N的极微弱力和1nV/m的超高分辨率电场梯度测量,有望在前沿基础科学领域中发挥重要作用。

                   

 

代表性科研成果:

  1. Yintao Ma, Yao Chen*, Libo Zhao*, Guoxi Luo, Mingzhi Yu, Yanbin Wang, Ju Guo, Ping Yang, Qijing Lin, Zhuangde Jiang. The micro-fabrication and performance analysis of non-magnetic heating chip for miniaturized SERF atomic magnetometer [J]. Journal of Magnetism and Magnetic Materials, 557: 169495(10pp), 2022.9.1.
  2. Yao Chen*, Mingzhi Yu, Yintao Ma, Yanbin Wang, Ju Guo, Qijing Lin, Ning Zhang, Zhuangde Jiang and Libo Zhao*. Quadrupolar interaction induced frequency shift of 131Xe nuclear spins on the surface of silicon [J]. Journal of Physics D: Applied Physics, 55: 355102(9pp), 2022.6.16.
  3. Yao Chen, Libo Zhao, Ning Zhang*, Mingzhi Yu, Yintao Ma, Xiangguang Han, Man Zhao, Qijing Lin, Ping Yang, and Zhuangde Jiang. Single beam Cs-Ne SERF atomic magnetometer with the laser power differential method [J]. Opt. Express, 30:16541-16552, 2022.5.9
  4. Yintao Ma, Yao Chen*, Libo Zhao*, Mingzhi Yu, Yanbin Wang, Ju Guo, Ping Yang, Qijing Lin and Zhuangde Jiang. Accurate determination of alkali-atom density based on zero-field magnetic resonance in single-beam SERF atomic magnetometer [J]. Measurement Science and Technology, 33:105003, 2022.10.1.
  5. Mingzhi Yu, Yao Chen*, Yanbin Wang, Yintao Ma, Guoxi Luo, Shun Lu, Libo Zhao*, Ping Yang, Qijing Lin, Zhuangde Jiang. Plasma-activated high-strength non-isothermal anodic bonding for efficient fabrication of the micro atomic vapor cells [J]. Journal of Materials Research and Technology, 27: 1046-1057, 2023.11.18
  6. Mingzhi Yu, Yao Chen*, Yongliang Wang, Xiangguang Han, Guoxi Luo, Libo Zhao*, Yanbin Wang, Yintao Ma, Shun Lu, Ping Yang, Qijing Lin, Kaifei Wang*, Zhuangde Jiang. Microfabricated Atomic Vapor Cells with Multi-Optical Channels Based on an Innovative Inner-Sidewall Molding Process [J]. Engineering, 35: 46-55, 2024.7.3
  7. Yintao Ma ,Yao Chen1*,Mingzhi Yu , Yanbin Wang , Shun Lu, Ju Guo , Guoxi Luo, Libo Zhao*, Ping Yang, Qijing Lin and Zhuangde Jiang,Ultrasensitive SERF atomic magnetometer with a miniaturized hybrid vapor cell[J]. Microsystems & Nanoengineering, 10(1):121(10pp.),2024.8.30 

 

研究方向四、能量收集及自供电传感技术

课题组振动能量收集及自供电传感技术方向,致力于机电耦合非线性振动理论分析、压电、电磁、摩擦电振动能量收集器设计及制造,摩擦电振动传感器设计及制造,自供电电源管理设计,低功耗无线节点开发和自供电物联网应用等核心关键技术研究

 

                             

                          

 

 

 

代表性研究成果

  1. Lu Wang, Tianyiyi He, Zixuan Zhang, Libo Zhao*, Chengkuo Lee*, Guoxi Luo, Qi Mao, Ping Yang, Qijing Lin, Xiang Li, Ryutaro Maeda and Zhuangde Jiang. Self-sustained autonomous wireless sensing based on a hybridized TENG and PEG vibration mechanism [J]. Nano Energy, 80: 105555(12pp), 2021.2 (IF: 16.06)
  2. Lu Wang, Jianjun Ding*, Zhuangde Jiang, Guoxi Luo, Libo Zhao*, Dejiang Lu, Xiao Yang, Ryutaro Maeda. A Packaged Piezoelectric Vibration Energy Harvester with High Power and Broadband Characteristics [J]. Sensors and Actuators A-Physical. 295: 629-636, 2019.8 (IF: 2.739)
  3. Lu Wang, Guoxi Luo*, Zhuangde Jiang, Fuzheng Zhang, Libo Zhao*, Ping Yang, Qijing Lin, Ryutaro Maeda. Broadband Vibration Energy Harvesting for Wireless Sensor Node Power Supply in Train Container [J]. Review of Scientific Instruments, 90(12): 125003(9pp.), 2019.12 (IF: 1.587)

科研项目

主持项目

1)秦创原“科学家+工程师”队伍建设项目,液体火箭发动机智能传感器研发,2022/1-2024/1230万元,在研

2)J202312037,硅基高温压力传感器高可靠性优化开发,2023/12-2024/1252万元,在研

2)J202312038硅基高温压力传感器高性能敏感薄膜开发,2023/12-2024/1241万元,在研

3)安徽省揭榜挂帅项目:2022e020002HZ、面向新一代超声诊疗的高性能MEMS换能器芯片关键技术研究,2022/11-2025/10,1000万元,在研

4)国家自然科学基金重大项目课题:51890884、电静液驱动执行器热流固环境多源感知和智能健康监测,2019/01-2023/12368万元,在研

5)国家重点研发计划:2020YFB2009101、多层异质薄膜材料的高温感知与服役特性,2020/10-2023/09313万元,在研

6 国家自然科学基金面上项目: 51875449、基于耦合效应的高性能PMUTs工作机理与测试技术研究,2019/01-2022/1260万元,在研

7)陕西省杰出青年科学基金资助项目:2019JC-06、微纳制造与先进传感技术,2019/01-2021/1230万元,在研

6)国家重点研发计划子课题任务:2016YFB0501604、天临空地车轨道交通系统状态信息获取、监测与预警技术、2016/07-2020/0670万元,结题

72011教育部纳米科技协同创新中心协同攻关项目:xjtusz007、高温压力传感器关键技术开发及工程化中试、2016/7-2018/6100万元,结题

 

 

参与项目

1)J202301014硅压阻智能一体化传感器设计开发,2023/1-2025/1,470万元,参加

2)西安交通大学项目,xtr052023006,柔性可穿戴 MEMS 超声医疗诊断系统研究,2023/10-2025/12,75万元,参加

3)国家重点研发计划,2020YEB2009100,高性能 MEMS 高温温度传感器关键技术研发及工程应用,2020/10-2023/91288万元,参加

3)国家自然科学基金联合基金重点项目,U1909221基于MEMS技术的智能机器人用多功能集成传感器关键技术研究,2020/01-2023/12200万元、参加

4)陕西省重点研发计划项目,2018ZDXM-GM-103,高性能MEMS压阻式微压传感器及其制造技术研究,2018/08-2020/0750万元、参加

5)陕西省重点研发计划项目,2018ZDXM-GY-02-02,高精度压力传感器的研发,2018/01-2020/1290万元,参加

6)国家重大科学仪器设备开发专项,2012YQ03026101,自动化核酸检测与分析关键技术及部件研制,2012/10-2016/094600万元,参加