MEMS and Sensors |
Lecture | Date | Content |
1 | 2013-02-25 | Introduction to MEMS & Sensors |
2 | 2013-02-27 | Scaling Law |
3 | 2013-03-04 | Design and Modelling |
4 | 2013-03-06 | MEMS Materials |
5 | 2013-03-11 | Microfabrication Techniques |
6 | 2013-03-13 | Nanofabrication Techniques |
7 | 2013-03-18 | Characterization Techniques - Part I |
8 | 2013-03-20 | Characterization Techniques -Part II |
9 | 2013-03-25 | Project I on Design and Modeling of MEMS – Comsol Case Study |
10 | 2013-03-27 |
11 | 2013-04-01 | Sensor Characteristics |
12 | 2013-04-03 | Physical principles of sensing |
13 | 2013-04-08 | Interface Electronic Circuits |
14 | 2013-04-10 | Pressure and Strain Sensors |
15 | 2013-04-15 | Inertial Sensors |
16 | 2013-04-17 | Optical MEMS and Sensors |
17 | 2013-04-22 | Flow and Gas sensors |
18 | 2013-04-24 | Microfluidics and Biosensors |
19 | 2013-04-29 | Project II on Lab Experiment of Microfluidic Chips for Bio-analysis |
20 | 2013-05-01 |