Basic Information

韩香广 副研究员

仪器科学与技术学院

基本情况:韩香广,博士,副研究员,硕导,山东邹平人。博士毕业于西安交通大学,师从长江学者赵立波教授。长期从事高性能压力传感器技术研究,主持开发了高温高动态压力传感器、高精度谐振式压力传感器、高灵敏度微压传感器、集成式薄膜力学传感器等特种压力传感器,获得航空工业集团二等奖一项。作为负责人参与了多项国家级压力传感器开发项目,包括国家重点研发计划、自然基金委青年基金等,主持了航天科技集团、航空工业集团、兵器集团等多项军工领域特种压力传感器开发项目。以第一作者或通讯作者发表SCI论文20篇以上,申请国家发明专利20余项。

Educational Experience

  • 2024.09~至今  西安交通大学 仪器科学与技术  副研究员
  • 2021.09~2024.09  西安交通大学 仪器科学与技术  助理教授
  • 2017.09~2021.06  西安交通大学 仪器科学与技术  工学博士
  • 2016.06~2017.09  敏芯股份,传感器项目经理
  • 2013.06~2016.06  森萨塔科技(常州)有限公司 传感器设计工程师
  • 2011.09~2013.06  西安交通大学 机械工程 硕士 
  • 2007.09~2011.06  中国石油大学(华东)机械制造及其自动化 学士

Contact Information

办公电话:029-82668616

手机:+18165300933

Email:xiangguang@xjtu.edu.cn

办公地址:陕西省西安市碑林区咸宁西路28号西安交通大学-东南门出版大厦五楼

站点计数器

Research Fields

  • 特种MEMS压力传感器
  • 智能力学传感器
  • 人工智能感知系统
  • 欢迎对国防领域特种传感器、机器人领域高端传感器、生物医疗高精度感知技术的研究生和本科生加入课题组(报考研究生、本科毕设等)!

Paper

近五年发表部分学术论文:

  1. Han, Xiangguang , et al. "Advances in high-performance MEMS pressure sensors:design,fabrication,and packaging." Microsystems & Nanoengineering 006(2023):009.
  2. Xiangguang Han , Xiaoyu Wu , Libo Zhao, Min Li*, Chen Jia* , Zhikang Li , Jiaqi Xie1, Guoxi Luo*, Ping Yang, Rabah Boukherroub , Yurdanur Türker , Mert Umut Özkaynak  and Koray Bahadır Dönmez .Facile assembly of exible, stretchable and attachable symmetric microsupercapacitors with wide working voltage windows and favorable durability [J].Microsystems & Nanoengineering,10(1):107(8pp.),2024.8.2.
  3. Min Li, Guangzhao Qin, Chen Jia*, Danyu Zhang*, Zhikang Li , Xiangguang Han , Shusheng Xu , Libo Zhao , Guoxi Luo*, Cunlang Liu , Ping Yang and Qijing Lin,Fabrication and characterization of high-sensitivity, wide-range, and flexible MEMS thermal flow velocity sensors .Nanoengineering,10(1):102(13pp.),2024.7.22.
  4. Wendi Gao, Cunlang Liu, Xiangguang Han*, Libo Zhao*, Qijing Lin, Zhuangde Jiang, Dong Sun. A High Resolution MEMS Capacitive Force Sensor with Bionic Swallow Comb Arrays for Ultralow Multiphysics Measurement [J]. IEEE Trans Ind Electron, 70(7): 7467-7477, 2023.7.
  5. Wendi Gao, Zhixia Qiao, Xiangguang Han, Xiaozhang Wang, Adnan Shakoor, Cunlang Liu, Dejiang Lu*, Ping Yang, Libo Zhao*, Yonglu Wang, Jiuhong Wang, Zhuangde Jiang, Dong Sun. A MEMS Sensors Based on a Laterally Movable Gate Field-Effect Transistor (LMGFET) with a Novel Decoupling Sandwich Structure [J]. Engineering, 21: 61-74, 2023.2.
  6. Mingzhi Yu, Libo Zhao, Yongliang Wang, Yong Xia*, Yintao Ma, Yanbin Wang, Xiangguang Han, Yao Chen, Shun Lu, Guoxi Luo, Nan Zhu, Ping Yang, Kaifei Wang*, Qijing Lin, Zhuangde Jiang. Plasma-activated silicon–glass high-strength multistep bonding for low-temperature vacuum packaging [J]. Chemical Engineering Journal, 471: 1144719(11pp.), 2023.9.1.
  7. Lu Wang, Xiangguang Han*, Ping Yang, Min Li*, Qijing Lin , Libo Zhao , Zhuangde Jiang and Ryutaro Maeda. Mechanical Rectifier for Broadband Piezoelectric Vibration Energy Harvesting and Self-Adapting Synchronous Electric Charge Extraction [J]. IEEE Transactions on Instrumentation and Measurement, 72: 2002407(7pp.), 2023.3.6.
  8. Chen Jia, Libo Zhao, Min Li*, Mingzhi Yu, Guoxi Luo, Nan Zhu, Xiangguang Han, Yong Xia*, Ping Yang, Jiuhong Wang, Zhuangde Jiang. Microleverage Mechanism Assisted Novel Biaxial Piezoresistive Micro Accelerometer with Improved Sensitivity [J]. IEEE Sensors Journal, 23(9): 9183-9193, 2023.3.29.
  9. Mingzhi Yu, Libo Zhao, Xiangguang Han*, Chen Jia, Yong Xia, Ping Yang, Yun Zhang, Junjie Sun, Guangzhao Qin and Zhuangde Jiang. Development of a High-Performance Microaccelerometer with Position Independent Pure-Axial Stressed Piezoresistive Beams [J]. IEEE Transactions on Industrial Electronics, 70(8): 8546-8556, 2023.8.
  10. Mingzhi Yu, Libo Zhao, Shanshan Chen*, Xiangguang Han, Chen Jia*, Yong Xia, Xiaozhang Wang, Yonglu Wang, Ping Yang, Dejiang Lu, Zhuangde Jiang. Monolithically integrated triaxial high-performance micro accelerometers with position-independent pure axial stressed piezoresistive beams [J]. Microsystems & Nanoengineering, 9(1): 9(12pp.), 2023.1.11.
  11. Mingzhi Yu, Yao Chen*, Yongliang Wang, Xiangguang Han, Guoxi Luo, Libo Zhao*, Yanbin Wang, Yintao Ma, Shun Lu, Ping Yang, Qijing Lin, Kaifei Wang*, and Zhuangde Jiang. Microfabricated Atomic Vapor Cells with Multi-Optical Channels Based on an Innovative Inner-Sidewall Molding Process [J]. Engineering, doi:https://doi.org/10.1016/j.eng.2023.08.
  12. Lu Wang, Zhenxuan Fei, Congsheng Duan, Xiangguang Han*, Min Li, Wendi Gao, Yong Xia, Chen Jia, Qijing Lin*, Yihe Zhao, Zhikang Li, Libo Zhao*, Zhuangde Jiang, and Ryutaro Maeda. Self-Sustained and Self-Wakeup Wireless Vibration Sensors by Electromagnetic-Piezoelectric-Triboelectric Hybrid Energy Harvesting [J]. Applied Energy, 355: 122207, 2023.11.17.
  13. Mingzhi Yu, Libo Zhao, Yongliang Wang, Yong Xia*, Yintao Ma, Yanbin Wang, Xiangguang Han, Yao Chen, Shun Lu, Guoxi Luo, Nan Zhu, Ping Yang, Kaifei Wang*, Qijing Lin, Zhuangde Jiang. Plasma-activated silicon-glass high-strength multistep bonding for low-temperature vacuum packaging [J]. Chemical Engineering Journal, 471: 144719(11pp.), 2023.8.25.
  14. Mingzhi Yu, Chen Jia, Xiangguang Han, Yong Xia, Libo Zhao, Ping Yang, Dejiang Lu, Yonglu Wang, Xiaozhang Wang, Zhuangde Jiang. Ultra-high-sensitivity micro-accelerometer achieved by pure axial deformation of piezoresistive beams [J]. Measurement Science and Technology,34(12):1251599(11pp.),2023.10.6.
  15. Yao Chen, Libo Zhao, Ning Zhang*, Mingzhi Yu, Yintao Ma, Xiangguang Han, Man Zhao, Qijing Lin, Ping Yang, and Zhuangde Jiang. Single beam Cs-Ne SERF atomic magnetometer with the laser power differential method [J]. Opt. Express, 30:16541-16552, 2022.5.9.
  16. Mimi Huang, Libo Zhao, Xiangguang Han*, Chen Jia*, Yi Gao, Shu Fan, Ping Yang, Linxi Dong, Zhuangde Jiang. MEMS-based Pt film temperature sensor chip on silicon substrate [J]. Measurement Science and Technology, 33(12): 125113, 2022.9.27.
  17. Yunyun Luo, Libo Zhao, Guoxi Luo*, Min Li., Xiangguang Han*, Yong Xia, Ziping Li., Qijing Lin, Ping Yang, Liyan Dai, Gang Niu, Xiaozhang Wang, Jiuhong Wang, Dejiang Lu, Zhuangde Jiang. All electrospun fabrics based piezoelectric tactile sensor [J]. Nanotechnology, 33(41): 415502, 2022.7.25.
  18. Chen Jia, Mingzhi Yu, Guoxi Luo*, Xiangguang Han, Ping Yang, Yao Chen, Libo Zhao*, Lu Wang, Yonglu Wang, Jiuhong Wang, Zhuangde Jiang. Modeling and Characterization of a Novel in-Plane Dual-Axis MEMS Accelerometers Based on Self-Support Piezoresistive Beam [J]. Journal of Microelectromechanical Systems, 2022: 1-10, 2022.7.11.
  19. Libo Zhao, Xiangguang Han, Qi Mao*, Zhikang Li*, Ping Yang, Qijing Lin, Hongyan Wang, Xin Yan, Songli Wang, Nan Zhu, Yonglu Wang, Jiuhong Wang, Zhuangde Jiang. Temperature-insensitive Silicon Resonant Pressure Sensor by Thermal Stress Control [J], Sensors and Actuators: A. Physical, 322:112612(10pp), 2021.5.
  20. Xiangguang Han, Libo Zhao, Jiuhong Wang*, Li Wang, Mimi Huang, Cuilan Chen, Ping Yang, Zhikang Li*, Nan Zhu, Songli Wang, Xin Yan, Yonglu Wang, Hongyan Wang, Yongshun Wu, Yao Chen and Zhuangde Jiang. High-Accuracy Differential Resonant Pressure Sensor with Linear Fitting Method [J], Journal of Micromechanics and Microengineering, 31(4): 045006(13pp), 2021.4.
  21. Li Wang, Yuxiang Qiu, Xiangguang Han, Cuilan Chen, Mimi Huang, Ping Yang, Zhikang Li, Libo Zhao* and Zhuangde Jiang. Design and optimization of a novel resonant gauge pressure sensor [C], The 4th International Conference on Optoelectronic and Microelectronic Technology and Application (OMTA2020), Nanjing, China, October 20-22, 2020.
  22. Xiangguang Han, Qi Mao*, Libo Zhao*, Xuejiao Li, Li Wang, Ping Yang, Dejiang Lu, Yonglu Wang, Xin Yan, Songli Wang, Nan Zhu and Zhuangde Jiang. Novel resonant pressure sensor based on piezoresistive detection and symmetrical in-plane mode vibration [J]. Microsystems & Nanoengineering, 6: 95(11pp), 2020.11.
  23. Xiangguang Han, Libo Zhao, Xuejiao Li, Ping Yang, Hongyan Wang, Zhuangde Jiang. A High Accuracy Resonant Pressure Sensor with Lateral Driven and Piezoresistive Detection [C]. The 14th International Conference on Nano/Micro Engineered and Molecular Systems (NEMS2019), Thailand, Bangkok, April 11-14, 2019.
  24. Xuejiao Li, Libo Zhao*, Xiangguang Han, Ping Yang, Guoxi Luo*, Nan Zhu, Zhikang Li, Songli Wang, Xin Yan, Zhuangde Jiang. The design of a high precision capacitive pressure sensor based on comb electrode [C]. The 42nd Photonics & Electromagnetics Research Symposium, Xiamen, China, 17-20 December, 2019.
  25. Lu Wang, Libo Zhao*, Zhuangde Jiang, Guoxi Luo*, Ping Yang, Xiangguang Han, Xiang Li, Ryutaro Maeda. High accuracy comsol simulation method of bimorph cantilever for piezoelectric vibration energy harvesting [J]. AIP Advances, 9(9): 095067(9pp), 2019.9.

Patent

※ 近五年申请(授权)发明专利:

  1. 一种高频响微差压传感器芯片结构与制备方法,中国发明专利,授权号:ZL 202210870988.1,申请时间:2022.07.22,授权日:2024.07.30,发明人:韩香广,高漪,赵立波,皇咪咪,樊姝,陈科,尚钰杰,吴豫席,杨萍,王永录,王小章,王久洪,蒋庄德
  2. 一种微型化硅基多维力/力矩传感器,中国发明专利,申请号:202410352388.5,申请日:2024.03.26,发明人:赵立波,谭仁杰,韩香广,夏勇,高文迪,王琛英,贾琛,杨萍,林启敬,董林玺,乔智霞,李伟,蒋庄德
  3. 种低串扰多冗余薄膜压力传感器芯体及制备方法,中国发明专利,申请号:202410531765.1,申请日:2024.04.29,发明人:赵立波,尚钰杰,韩香广,赵阳,单王珍,乔智霞,李伟,韩枫,高漪,王涛,王圣旗,陈率,王永录,杨萍,蒋庄德
  4. 一种基于有机电化学晶体管的柔性压痛传感器及其制备方法,中国发明专利,申请号:CN 202311332727.5,申请日:2023.10.13, 发明人:李支康,王斌,王佳翔,芦继健,赵康,贾博清,罗国希,李敏,韩香广,赵立波
  5. 用于寒冷环境水压测量的抗结冻过载充油式芯体封装结构,中国发明专利,申请号:202410709685.0,申请日:2024.06.03,发明人:王久洪,王圣旗,韩香广,乔智霞,赵立波,皇咪咪,高漪,尚钰杰
  6. 一种加速度传感器测试装置及测试方法,中国发明专利,申请号:202410960806.9,申请日:2024.07.17,发明人:夏勇,王涛,赵立波,吕阳,韩香广,贾琛,于明智,陈率,赵阳,王圣旗,侯晓伟,赵子龙,卢德江
  7. 一种超低频多方向压电振动能量收集器及能量收集方法,中国发明专利,授权号:ZL 202110998554.5,申请时间:2021.08.27,授权日:2024.05.07,发明人:王路,赵立波,韩香广,费振轩,王骞,陈瑶,罗国希,卢德江,李支康,李敏,杨萍,王永录,王久洪,蒋庄德
  8. 一种表压式谐振压力传感器及制备方法,中国发明专利,授权号:ZL 202210609327.3,申请时间:2022.05.31,授权日:2023.08.18,发明人:韩香广,赵立波,邱煜祥,王李,皇咪咪,陈翠兰,樊姝,高漪,陈科,尚钰杰,杨萍,卢德江,王久洪,蒋庄德
  9. 一种基于自动学习和集成学习的静电形成纳米线半导体VOCs识别方法,申请号:202310384296.0,申请日期:2023.4.11,发明人:赵立波、杨晓凯、韩香广、夏勇、李敏、贾琛、杨萍、林启敬、蒋庄德
  10. 一种具有位置无关纯轴向变形压阻梁的MEMS压阻式加速度计芯片及其制备方法,申请号:202211715305.1,申请日期:2022.12.29,发明人:夏勇、王延斌、赵立波、于明智、卢德江、贾琛、韩香广、李支康、林启敬、杨萍、蒋庄德
  11. 一种高频响微差压传感器芯片结构与制备方法,中国发明专利,授权号:ZL 202210870988.1,申请时间:2022.07.22,授权日:2024.7.30,发明人:韩香广、高漪、赵立波、皇咪咪、樊姝、陈科、尚钰杰、吴豫席、杨萍、王永录、王小章、王久洪、蒋庄德
  12. 一种耐高压MEMS压力传感器封装结构和封装方法,中国发明专利,授权号:ZL 202210822045.1,申请时间:2022.07.13,授权日:2024.7.26,发明人:赵立波、樊姝、韩香广、皇咪咪、李支康、王李、高漪、尚钰杰、陈科、王小章、杨萍、王久洪、苏文斌、蒋庄德
  13. 一种基于SOI工艺的MEMS六轴力传感器芯片及其制备方法,中国发明专利,授权号:ZL 202111595510.4,申请日:2021.12.23,授权日:2022.11.11,发明人:赵立波、谭仁杰、高文迪、韩香广、卢德江、王路、李敏、董林玺、杨萍、林启敬、蒋庄德
  14. 一种MEMS电容式六轴力传感器芯片及其制备工艺,中国发明专利,授权号:ZL 202111595513.8,申请日:2021.12.23,授权日:2022.11.11,发明人:赵立波、谭仁杰、韩香广、高文迪、李敏、陈瑶、董林玺、杨萍、王小章、王久洪、蒋庄德
  15. 基于电容检测原理的MEMS六轴力传感器芯片及其制备方法,中国发明专利,授权号:ZL 202111592764.0,申请日:2021.12.23,授权发文日:2022.11.11,发明人:赵立波、谭仁杰、黄琳雅、韩香广、高文迪、李敏、董林玺、王李、杨萍、王永录、蒋庄德
  16. 一种十字梁膜应力集中微压传感器芯片及其制备方法,中国发明专利,授权号:ZL 202110462429.2,申请日期:2021.4.27,授权发文日:2023.3.26,发明人:王鸿雁、李学琛、关卫军、吴永顺、魏于昆、山涛、王爱华、付磊、赵立波、韩香广、皇咪咪、徐廷中、杨萍、王李、陈翠兰、罗国希、王永录、蒋庄德
  17. 一种压阻梁应力集中微压传感器芯片及其制备方法,中国发明专利,授权号:ZL 202110462455.5,申请日期:2021.4.27,授权日:2022.12.30,发明人:赵立波、李学琛、韩香广、李伟、乔智霞、皇咪咪、徐廷中、杨萍、王李、陈翠兰、王鸿雁、关卫军、吴永顺、罗国希、王永录、魏于昆、山涛、蒋庄德
  18. 具有应力集中结构的微压传感器芯片及其制备方法,中国发明专利,授权号:ZL 202110462410.8,申请日期:2021.4.27,授权日:2022.6.7,发明人:赵立波、李学琛、韩香广、乔智霞、皇咪咪、李伟、徐廷中、杨萍、高漪、王鸿雁、关卫军、吴永顺、李支康、朱瑄、王久洪、魏于昆、山涛、蒋庄德
  19. 一种压阻式双轴加速度传感器芯片及其制备方法,中国发明专利,申请号:202110150381.1,申请日期:2021.2.3,发明人:赵立波、贾琛、罗国希、于明智、韩香广、王路、杨萍、李支康、高文迪、陈瑶、王久洪、蒋庄德
  20. 一种基于电磁激励电磁检测的硅微谐振式表压传感器芯片,中国发明专利,授权号:ZL 202011140341.0,申请日期:2020.10.22,授权日:2021.9.7,发明人:赵立波、邱煜祥、王李、韩香广、李支康、皇咪咪、杨萍、朱楠、王淞立、赵虎、蒋庄德
  21. 一种基于倒装芯片的温度压力集成传感器及其封装方法,中国发明专利,授权号:ZL 202010981260.7,申请日期:2020.09.17,授权日:2021.9.7,发明人:赵立波、王李、韩香广、李支康、邱煜祥、皇咪咪、陈翠兰、李学琛、杨萍、王鸿雁、王永录、吴永顺、魏于昆、山涛、蒋庄德
  22. 基于静电激励压阻检测的差动式硅微谐振式压力传感器,中国发明专利,授权号:ZL 202010121087.3, 申请日期:2020.02.26,授权日:2021.5.28,发明人:赵立波、韩香广、李雪娇、王李、于明智、李支康、朱楠、杨萍、闫鑫、王淞立、赵玉龙、蒋庄德
  23. 基于电磁激励压阻检测的面内振动硅微谐振式压力传感器,中国发明专利,授权号:ZL 202010121079.9, 申请日期:2020.02.26,授权日:2021.7.13,发明人:赵立波、韩香广、李雪娇、王李、于明智、李支康、朱楠、杨萍、闫鑫、王淞立、赵玉龙、蒋庄德
  24. 一种双H型受压梁硅微谐振压力传感器芯片及其制备方法,中国发明专利,授权号:ZL 201910064334.8,申请日:2019.1.23,授权日:2021.1.19,发明人:赵立波、韩香广、李雪娇、郭鑫、皇咪咪、卢德江、王久洪、赵玉龙、蒋庄德
  25. 压电激振受拉式硅微谐振压力传感器芯片及制备方法,中国发明专利,授权号:ZL 201910064348.X,申请日:2019.1.23,授权发文日:2020.11.4,发明人:蒋维乐、李雪娇、赵立波、韩香广、方续东、郭鑫、卢德江、王鸿雁、吴永顺、赵玉龙

Project

主持项目

  1. 国家重点研发计划2021YFB3203201,传感器敏感芯片xxx2021/12-2024/11在研
  2. 陕西省xxx项目2023-xxxMEMS高温压力传感器xxx2023/01-2026/12在研
  3. 航空工业xxx高温xxx项目,2023/01-2025/01在研
  4. 航天科技xxx所xxx项目,2021/09-2024/12在研
  5. 国家基金委项目,52305618高精度xxx温度补偿技术研究,2024/01-2026/12在研
  6. 国家重点研发计划2022YFB3204902HZ,硅谐振xxx2022/12-2025/11在研
  7. 中国兵器集团xx所202407107,高静压xxx抑制研究,2024/06-2026/12在研
  8. 无锡xxx有限公司,20210996,高温高精度MEMS压力传感器技术,2021/09-2021-11结题
  9. JG项目,J202311024 JG项目,2023/11-2024/03结题
  10. JG项目,J202309009 JG项目,2023/08-2024/06结题

参与项目

  1. 陕西省科学技术厅,2024RS-CXTD-19,智能传感与测试技术创新团队,2024/01-2026/12在研
  2. 陕西省科学技术厅,2024GX-YBXM-192,动力电池组安全监测传感器的研究,2024/01-2025/12在研
  3. 汉威科技集团股份有限公司,2021KJZX0061-04 ,敏感材料研究与传感器研制,2021/11-2024/10结题
  4. 西安航天xxx公司,J202407016硅基高温压力传感器敏感芯片高温性能退化机理测试表征2024/07-2025/06,在研
  5. 西安交通大学,xtr052023006,柔性可穿戴MEMS 超声医疗诊断系统研究,2023/01- 2025/12在研
  6. 宁波中车时代传感技术有限公司,202212214 pt1000铂电阻芯片技术开发,2022/12-2024/06结题
  7. 中国船舶重工集团公司xxx研究所,20221201 LNG船用压力敏感元件研制,2022/10-2024/10结题

Team member

代表性成果:

  1. 特种压力传感器

开发了面向航空航天、爆破毁伤等领域的高温高动态压力传感器,传感器使用温度优于400,测量  精度达到0.2%FS,动态特性优于500kHz,打破了美国、瑞士等国家的技术垄断,实现全量程、全温区范围的高温压力传感器国产化替代,并实现批量化生产。

  1. 液体火箭发动机矢量推力测量传感器

面向液体火箭发动机小推力“测不了”大推力“测不准”测试难题,开发了矢量推力测量传感器,解决了热耦合、管路耦合、振动耦合等复杂环境下的精度干扰系列技术难题,实现了 30N 300N 1500kN级发动机高精度矢量推力测量,测量精度优于0.5%FS

  1. 高精度多维力传感器

面向机器人智能关节、多维力触觉对微型化、高精度六轴力传感器需求,实现复杂多轴载荷的高精度 和高灵敏度解耦测量,多维力芯片尺寸优于5mmx5mm;量程5N,分辨率优于0.02N,填补了国内该领 域技术空白;开发了基于玻璃微熔技术、溅射薄膜高精度六维力智能关节,获得了复杂构件力热解耦模 型与应力传递机制,实现了宽温区、高精度多维力测量。