高端装备是先进制造技术、信息技术和控制技术的有机结合。高性能传感器是装备信息技术的主要入口，是装备实现智能化的首要前提。

课题组面向航空航天、高端装备、国防、石油化工、生物医疗等领域的应用需求，长期从事高端MEMS先进传感技术的研究工作，先后研制出：

• 系列高动态、微型化、高（低）温、高精度特种压力传感器：

相关论文：

[1]Zhixia Qiao, Pumiao Dai, Shuaiyi Li, Zeyu Cui, Wei Li, Yong Xia, Yang Lv, Lin Liang, Xiangguang Han, Libo Zhao, Compact Temperature and Static Pressure Compensation System for Differential Pressure Sensor Based on Neural Network and Improved Wolf Algorithm [J]. IEEE Transactions on Industrial Electronics, 73(9), pp. 14029–14040, 2026

[2] Mimi Huang, Yong Xia*, Xiangguang Han, Yi Gao, Shuai Chen, Zeyu Cui, Cheng Zhang, Yushan Gao, Zhixia Qiao, Yang Lv, Xiaowei Hou, Chenying Wang, Ping Yang, Libo Zhao, High-strength Au–Au bonding for temperature and pressure integrated sensor [J] Journal of Materials Research and Technology 35 (2025) 1239–1249

[3] MimiHuang, Xiaoyu Wu, Libo Zhao, Xiangguang Han, Yong Xia, Yi Gao, Zeyu Cui, Cheng Zhang, Xiaokai Yang, Zhixia Qiao, Zhikang Li, Feng Han, Ping Yang and Zhuangde Jiang, Small-size temperature/high-pressure integrated sensor via flip-chip method [J]. Microsystems & Nanoengineering 10.1 (2024): 104

[4] Mimi Huang, Xiangguang Han, Libo Zhao, Cheng Zhang, Xiaoyu Wu, et al. Design and Fabrication of a MEMS Temperature and Pressure Integrated Sensor With Back-Inlet Package Structure [J], IEEE Sensors Journal, 24(16): 25476–25485, 2024.

[5]李帅毅, 崔泽宇, 周亚雄, 刘若楠, 乔智霞, 倪立斌, 吕阳, 李大海, 韩香广, 赵立波. 微型高温高动态脉动压力传感器的设计与制备 [J], 火箭推进, 43(2) : 128-136，2026.

[6]Xiangguang Han, Qi Mao*, Libo Zhao*, Xuejiao Li, Li Wang, Ping Yang, Dejiang Lu, Yonglu Wang, Xin Yan, Songli Wang, Nan Zhu and Zhuangde Jiang. Novel resonant pressure sensor based on piezoresistive detection and symmetrical in-plane mode vibration [J]. Microsystems & Nanoengineering, 6: 95(11), 2020. 

• 系列高频响、高灵敏、大过载振动/冲击加速度传感器：

相关论文：

[1] Yong Xia, Tao Wang, Yang Lv, Xiangguang Han, Mingzhi Yu, Renjie Tan, Mimi Huang, Chen, Jia, Libo Zhao, Lin Sun, Ping Yang, Dejiang Lu. Simultaneous enhancement of sensitivity, resonant frequency, and overload capability of piezoresistive accelerometers by heavily-doped fillet structures on sensing beams [J]. IEEE Sensors Journal, 25(11), 2025, 19138-19146.

[2] Yong Xia, Xinyao Meng, Yang Lv, Xiangguang Han, Zhixia Qiao, Mingzhi Yu, Chen Jia, Qing Zhang, Ping Yang, Dejiang Lu, Libo Zhao, Development of a piezoresistive accelerometer with both high natural frequency and superior overload capability [J]. Defence Technology, 61(1), 2026, 186-197.

[3] Mingzhi Yu, Libo Zhao, Xiangguang Han, Chen Jia, Yong Xia, Ping Yang, Yun Zhang, Junjie Sun, Guangzhao Qin, Zhuangde Jiang. Development of a High-Performance Microaccelerometer With Position Independent Pure-Axial Stressed Piezoresistive Beams [J]. IEEE Transactions on Industrial Electronics, 70(8), 2023, 8546-8556.

[4] Mingzhi Yu, Xiaoyu Wu, Libo Zhao, Chen Jia, Yong Xia, Xiangguang Han, Tao Wang, Guoxi Luo. Monolithically integrated triaxial high-performance high-g accelerometer for high shock vibration signal measurements [J]. Microsystems & Nanoengineering, 11(1), 2025, 1-14.

• 系列高精度微（小）型力/力矩传感器：

相关论文：

[1] Wendi Gao*, Yujie Yang, Wenji Cui, Yang Lv, Libo Zhao*, Zhuangde Jiang, and Dong Sun, “Automated and Near-Flawless Micropipette PIH Assembly to MEMS Nanoforce Sensor With A Robotic Microscopy System,” IEEE Trans. Ind. Electron., 1–13, 2026.

[2] Wendi Gao*, Yunfei Bai, Wenji Cui, Yujie Yang, Dehua Liu, Tao Luo, Libo Zhao*, Dong Sun, “A Biaxial MEMS Capacitive Nanoforce Sensor Based on a Novel Bistable Bioinspired Swallow Structure for Somatic Cell Micromanipulation,” IEEE/ASME Trans. Mechatronics,  1–12, 2026.

[3] Wendi Gao*, Yunfei Bai, Yujie Yang, Lanlan Jia, Yingbiao Mi, Wenji Cui, Dehua Liu, Adnan Shakoor, Libo Zhao*, Junyang Li*, Tao Luo*, Dong Sun, Zhuangde Jiang, “Intelligent sensing for the autonomous manipulation of microrobots toward minimally invasive cell surgery,” Appl. Phys. Rev., 11(4), 2024.

[4] Renjie Tan, Libo Zhao, Yong Xia*, Xiangguang Han*, Linya Huang, Wendi Gao, Ping Yang, Chen Jia, Wei Li, Zhixia Qiao, and Chenying Wang*, An Inverse Capacitance Differential Equation-Based Six-Axis Force/Torque Sensor for the High-Accuracy Decoupling of Complex Multi-Axis Loads [J]. IEEE Transactions on Instrumentation and Measurement, 75, 9518213, 2026

• 系列超声（PMUT/CMUT）换能器：

相关论文：

[1] Jiawei Yuan, Zhikang Li, Yihe Zhao, Ruiyan Luo, Shaohui Qin, Jie Li, Min Li, Gengyu Han, Zixuan Li, Zilong Zhao, Jiazhu Li, Shiwang Zhang, Zheng Yuan, Xiangguang Han, Lihong Fan, Xiaozhang Wang, Tong Wang, Ping Yang, Libo Zhao*, Lirong Yuan, Yi Lv, Rongqian Wu*, Tzung K. Hsiai, Zhuangde Jiang, Skin-Adaptive-Focused Flexible Micromachined Ultrasound Transducers for Wearable Cardiovascular Health Monitoring [J], Science Advances, 11(37), 2025.

[2] Zhikang Li, Libo Zhao*, Yihe Zhao, Jie Li, Tingzhong Xu, Kaiming Hu, Zichen Liu, Ping Yang, Guoxi Luo, Qijing Lin, Shiming Zhang, Martin C. Hartel, Wenming Zhang and Zhuangde Jiang. Closed-form expressions on CMUTs with layered anisotropic microplates under residual stress and pressure [J]. IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control, 68(5): 1828-1843, 2021.

[3] Jiawei Yuan, Zhikang Li*, Qi Ma, Jie Li, Zixuan Li, Yihe Zhao, Shaohui Qin, Xuan Shi, Libo Zhao*, Ping Yang, Guoxi Luo, Xiaozhang Wang, Kwok Siong Teh, Zhuangde Jiang. Noninvasive fluid bubble detection based on capacitive micromachined ultrasonic transducers [J]. Microsystems & Nanoengineering, 9:20, 2023.

[4] Zhikang Li, Yihe Zhao, Gian Luca Barbruni, Jie Li, Zixuan Li, Jiawei Yuan, Ping Yang, Libo Zhao*, Zhuangde Jiang, Sandro Carrara. Development of an Integrated CMUTs-based Resonant Biosensor for Label-free Detection of DNA with Improved Selectivity by Ethylene-glycol Alkanethiols[J]. Engineering, 206: 112617, 2024.

[5] Yihe Zhao, Tong Wang, Ehsan Kiani Harchegani, Noaman Muhammad, Jie Li, Min Li, Jiawei Yuan, Shaohui Qin, Zixuan Li, Ping Yang, Dejiang Lu, Zhikang Li,* and Libo Zhao*，PEI-SnO2-MWCNT Functionalized CMUT Resonant Gas Sensor for Formaldehyde Sensing with Sub-ppm Detection Limit [J]. ACS Sensors, 11:4608-4616, 2026. (SCI, IF: 10.9)

[6]Tingzhong Xu, Libo Zhao*, Zhuangde Jiang, Shuaishuai Guo, Zhikang Li*, Ping Yang, Guoxi Luo, Lin Sun, Liangchi Zhang. Equivalent circuit models of cell and array for resonant cavity-based piezoelectric micromachined ultrasonic transducer [J]. IEEE transactions on ultrasonics, ferroelectrics, and frequency control, 67(10): 2103-2118, 2020.10 

• 系列流体物化性质传感器：

相关论文：

[1] Libo Zhao, Yingjie Hu, Rahman Hebibul, Yong Xia, Linya Huang, Yulong Zhao, Zhuangde Jiang. Density measurement sensitivity of micro-cantilevers influenced by shape dimensions and operation modes [J], Sensors and Actuators B: Chemical, 245: 574-582, 2017.

[2] Linya Huang, Dejiang Lu, Xiangguang Han, Heping Wu, Wei Li, Gang Niu, Kaifei Wang, Ping Yang, Wei Ren, and Libo Zhao. Piezoelectric stepped-plate resonators vibrating at lateral modes for direct viscosity determination in liquids [J], Microsystems & Nanoengineering, 12(1): 122, 2026.

[3] Linya Huang, Xiangguang Han, Wei Li, Yuxin Zhao, Yong Xia, Gang Niu, Ping Yang, Dejiang Lu, Guoxi Luo, Libo Zhao. Electromagnetic cantilever plate resonators using torsional modes for linearity-based direct viscosity measurement in different flowing liquids [J], Measurement, 291: 123180, 2026,

[4] Yihe Zhao, Tong Wang, Ehsan Kiani Harchegani, Noaman Muhammad, Jie Li, Min Li, Jiawei Yuan, Shaohui Qin, Zixuan Li, Ping Yang, Dejiang Lu, Zhikang Li, Libo Zhao. PEI-SnO2-MWCNT Functionalized CMUT Resonant Gas Sensor for Formaldehyde Sensing with Sub-ppm Detection Limit [J], ACS Sensors, 11: 4608–4616, 2026.

[5] Yong Xia, Aifei Pan, Ya-Qiong Su, Sikai Zhao, Zhou Li, Adrian K. Davey, Libo Zhao, Roya Maboudian, Carlo Carraro, In-situ synthesized N-ZnO defects for enhanced CO2 sensing: experiments and DFT calculations [J] Sensors & Actuators: B. Chemical 357 (2022) 131359

• 紫外及红外光电传感器：

  
  

相关论文：

[1]. Yong Xia, Xinyao Meng, Yang Lv, Xiangguang Han, Yiwei Tang, Wanli Jiang, Dehui Xu, Dejiang Lu, Weixuan Jing, Ping Yang, Libo Zhao, Development of a novel radially-distributed spiral bilayer thermopile infrared sensor with enhanced responsivity [J] Microsystem &Nanoengineering, 12 (1), 169 (2026).

[2] Yong Xia*, Yiwei Tang, Xiangguang Han*, Chen Jia, Wanli Jiang, Dehui Xu, Jiuhong Wang*, Weixuan Jing, Dejiang Lu, Libo Zhao, Concurrent enhancement of thermopile responsivity and response speed via thermocouple number and multi-dielectric layer engineering [J]. Applied physics letters, 128, 253303 (2026)