高端装备是先进制造技术、信息技术和控制技术的有机结合。高性能传感器是装备信息技术的主要入口，是装备实现智能化的首要前提。

课题组面向航空航天、高端装备、国防、石油化工、生物医疗等领域的应用需求，长期从事高端MEMS先进传感技术的研究工作，先后研制出：

• 系列高动态、微型化、高（低）温、高精度特种压力传感器：

相关论文：

[1]Zhixia Qiao, Pumiao Dai, Shuaiyi Li, Zeyu Cui, Wei Li, Yong Xia, Yang Lv, Lin Liang, Xiangguang Han, Libo Zhao, Compact Temperature and Static Pressure Compensation System for Differential Pressure Sensor Based on Neural Network and Improved Wolf Algorithm [J]. IEEE Transactions on Industrial Electronics, 73(9), pp. 14029–14040, 2026

[2] Mimi Huang, Yong Xia*, Xiangguang Han, Yi Gao, Shuai Chen, Zeyu Cui, Cheng Zhang, Yushan Gao, Zhixia Qiao, Yang Lv, Xiaowei Hou, Chenying Wang, Ping Yang, Libo Zhao, High-strength Au–Au bonding for temperature and pressure integrated sensor [J] Journal of Materials Research and Technology 35 (2025) 1239–1249

[3] MimiHuang, Xiaoyu Wu, Libo Zhao, Xiangguang Han, Yong Xia, Yi Gao, Zeyu Cui, Cheng Zhang, Xiaokai Yang, Zhixia Qiao, Zhikang Li, Feng Han, Ping Yang and Zhuangde Jiang, Small-size temperature/high-pressure integrated sensor via flip-chip method [J]. Microsystems & Nanoengineering 10.1 (2024): 104

[4] Mimi Huang, Xiangguang Han, Libo Zhao, Cheng Zhang, Xiaoyu Wu, et al. Design and Fabrication of a MEMS Temperature and Pressure Integrated Sensor With Back-Inlet Package Structure [J], IEEE Sensors Journal, 24(16): 25476–25485, 2024.

[5]李帅毅, 崔泽宇, 周亚雄, 刘若楠, 乔智霞, 倪立斌, 吕阳, 李大海, 韩香广, 赵立波. 微型高温高动态脉动压力传感器的设计与制备 [J], 火箭推进, 43(2) : 128-136，2026.

[6]Xiangguang Han, Qi Mao*, Libo Zhao*, Xuejiao Li, Li Wang, Ping Yang, Dejiang Lu, Yonglu Wang, Xin Yan, Songli Wang, Nan Zhu and Zhuangde Jiang. Novel resonant pressure sensor based on piezoresistive detection and symmetrical in-plane mode vibration [J]. Microsystems & Nanoengineering, 6: 95(11), 2020. 

• 系列高频响、高灵敏、大过载振动/冲击加速度传感器：

相关论文：

[1] Yong Xia, Tao Wang, Yang Lv, Xiangguang Han, Mingzhi Yu, Renjie Tan, Mimi Huang, Chen, Jia, Libo Zhao, Lin Sun, Ping Yang, Dejiang Lu. Simultaneous enhancement of sensitivity, resonant frequency, and overload capability of piezoresistive accelerometers by heavily-doped fillet structures on sensing beams [J]. IEEE Sensors Journal, 25(11), 2025, 19138-19146.

[2] Yong Xia, Xinyao Meng, Yang Lv, Xiangguang Han, Zhixia Qiao, Mingzhi Yu, Chen Jia, Qing Zhang, Ping Yang, Dejiang Lu, Libo Zhao, Development of a piezoresistive accelerometer with both high natural frequency and superior overload capability [J]. Defence Technology, 61(1), 2026, 186-197.

[3] Mingzhi Yu, Libo Zhao, Xiangguang Han, Chen Jia, Yong Xia, Ping Yang, Yun Zhang, Junjie Sun, Guangzhao Qin, Zhuangde Jiang. Development of a High-Performance Microaccelerometer With Position Independent Pure-Axial Stressed Piezoresistive Beams [J]. IEEE Transactions on Industrial Electronics, 70(8), 2023, 8546-8556.

[4] Mingzhi Yu, Xiaoyu Wu, Libo Zhao, Chen Jia, Yong Xia, Xiangguang Han, Tao Wang, Guoxi Luo. Monolithically integrated triaxial high-performance high-g accelerometer for high shock vibration signal measurements [J]. Microsystems & Nanoengineering, 11(1), 2025, 1-14.

• 系列高精度微（小）型力/力矩传感器：

相关论文：

[1] Wendi Gao*, Yujie Yang, Wenji Cui, Yang Lv, Libo Zhao*, Zhuangde Jiang, and Dong Sun, “Automated and Near-Flawless Micropipette PIH Assembly to MEMS Nanoforce Sensor With A Robotic Microscopy System,” IEEE Trans. Ind. Electron., 1–13, 2026.

[2] Wendi Gao*, Yunfei Bai, Wenji Cui, Yujie Yang, Dehua Liu, Tao Luo, Libo Zhao*, Dong Sun, “A Biaxial MEMS Capacitive Nanoforce Sensor Based on a Novel Bistable Bioinspired Swallow Structure for Somatic Cell Micromanipulation,” IEEE/ASME Trans. Mechatronics,  1–12, 2026.

[3] Wendi Gao*, Yunfei Bai, Yujie Yang, Lanlan Jia, Yingbiao Mi, Wenji Cui, Dehua Liu, Adnan Shakoor, Libo Zhao*, Junyang Li*, Tao Luo*, Dong Sun, Zhuangde Jiang, “Intelligent sensing for the autonomous manipulation of microrobots toward minimally invasive cell surgery,” Appl. Phys. Rev., 11(4), 2024.

[4] Renjie Tan, Libo Zhao, Yong Xia*, Xiangguang Han*, Linya Huang, Wendi Gao, Ping Yang, Chen Jia, Wei Li, Zhixia Qiao, and Chenying Wang*, An Inverse Capacitance Differential Equation-Based Six-Axis Force/Torque Sensor for the High-Accuracy Decoupling of Complex Multi-Axis Loads [J]. IEEE Transactions on Instrumentation and Measurement, 75, 9518213, 2026

• 系列超声（PMUT/CMUT）换能器：

相关论文：

[1] Jiawei Yuan, Zhikang Li, Yihe Zhao, Ruiyan Luo, Shaohui Qin, Jie Li, Min Li, Gengyu Han, Zixuan Li, Zilong Zhao, Jiazhu Li, Shiwang Zhang, Zheng Yuan, Xiangguang Han, Lihong Fan, Xiaozhang Wang, Tong Wang, Ping Yang, Libo Zhao*, Lirong Yuan, Yi Lv, Rongqian Wu*, Tzung K. Hsiai, Zhuangde Jiang, Skin-Adaptive-Focused Flexible Micromachined Ultrasound Transducers for Wearable Cardiovascular Health Monitoring [J], Science Advances, 11(37), 2025.

[2] Zhikang Li, Libo Zhao*, Yihe Zhao, Jie Li, Tingzhong Xu, Kaiming Hu, Zichen Liu, Ping Yang, Guoxi Luo, Qijing Lin, Shiming Zhang, Martin C. Hartel, Wenming Zhang and Zhuangde Jiang. Closed-form expressions on CMUTs with layered anisotropic microplates under residual stress and pressure [J]. IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control, 68(5): 1828-1843, 2021.

[3] Jiawei Yuan, Zhikang Li*, Qi Ma, Jie Li, Zixuan Li, Yihe Zhao, Shaohui Qin, Xuan Shi, Libo Zhao*, Ping Yang, Guoxi Luo, Xiaozhang Wang, Kwok Siong Teh, Zhuangde Jiang. Noninvasive fluid bubble detection based on capacitive micromachined ultrasonic transducers [J]. Microsystems & Nanoengineering, 9:20, 2023.

[4] Zhikang Li, Yihe Zhao, Gian Luca Barbruni, Jie Li, Zixuan Li, Jiawei Yuan, Ping Yang, Libo Zhao*, Zhuangde Jiang, Sandro Carrara. Development of an Integrated CMUTs-based Resonant Biosensor for Label-free Detection of DNA with Improved Selectivity by Ethylene-glycol Alkanethiols[J]. Engineering, 206: 112617, 2024.

[5] Yihe Zhao, Tong Wang, Ehsan Kiani Harchegani, Noaman Muhammad, Jie Li, Min Li, Jiawei Yuan, Shaohui Qin, Zixuan Li, Ping Yang, Dejiang Lu, Zhikang Li,* and Libo Zhao*，PEI-SnO2-MWCNT Functionalized CMUT Resonant Gas Sensor for Formaldehyde Sensing with Sub-ppm Detection Limit [J]. ACS Sensors, 11:4608-4616, 2026. (SCI, IF: 10.9)

[6]Tingzhong Xu, Libo Zhao*, Zhuangde Jiang, Shuaishuai Guo, Zhikang Li*, Ping Yang, Guoxi Luo, Lin Sun, Liangchi Zhang. Equivalent circuit models of cell and array for resonant cavity-based piezoelectric micromachined ultrasonic transducer [J]. IEEE transactions on ultrasonics, ferroelectrics, and frequency control, 67(10): 2103-2118, 2020.10 

• 系列流体物化性质传感器：

相关论文：

[1] Libo Zhao, Yingjie Hu, Rahman Hebibul, Yong Xia, Linya Huang, Yulong Zhao, Zhuangde Jiang. Density measurement sensitivity of micro-cantilevers influenced by shape dimensions and operation modes [J], Sensors and Actuators B: Chemical, 245: 574-582, 2017.

[2] Linya Huang, Dejiang Lu, Xiangguang Han, Heping Wu, Wei Li, Gang Niu, Kaifei Wang, Ping Yang, Wei Ren, and Libo Zhao. Piezoelectric stepped-plate resonators vibrating at lateral modes for direct viscosity determination in liquids [J], Microsystems & Nanoengineering, 12(1): 122, 2026.

[3] Linya Huang, Xiangguang Han, Wei Li, Yuxin Zhao, Yong Xia, Gang Niu, Ping Yang, Dejiang Lu, Guoxi Luo, Libo Zhao. Electromagnetic cantilever plate resonators using torsional modes for linearity-based direct viscosity measurement in different flowing liquids [J], Measurement, 291: 123180, 2026,

[4] Yihe Zhao, Tong Wang, Ehsan Kiani Harchegani, Noaman Muhammad, Jie Li, Min Li, Jiawei Yuan, Shaohui Qin, Zixuan Li, Ping Yang, Dejiang Lu, Zhikang Li, Libo Zhao. PEI-SnO2-MWCNT Functionalized CMUT Resonant Gas Sensor for Formaldehyde Sensing with Sub-ppm Detection Limit [J], ACS Sensors, 11: 4608–4616, 2026.

[5] Yong Xia, Aifei Pan, Ya-Qiong Su, Sikai Zhao, Zhou Li, Adrian K. Davey, Libo Zhao, Roya Maboudian, Carlo Carraro, In-situ synthesized N-ZnO defects for enhanced CO2 sensing: experiments and DFT calculations [J] Sensors & Actuators: B. Chemical 357 (2022) 131359

• 紫外及红外光电传感器：

  
  

相关论文：

[1]. Yong Xia, Xinyao Meng, Yang Lv, Xiangguang Han, Yiwei Tang, Wanli Jiang, Dehui Xu, Dejiang Lu, Weixuan Jing, Ping Yang, Libo Zhao, Development of a novel radially-distributed spiral bilayer thermopile infrared sensor with enhanced responsivity [J] Microsystem &Nanoengineering, 12 (1), 169 (2026).

[2] Yong Xia*, Yiwei Tang, Xiangguang Han*, Chen Jia, Wanli Jiang, Dehui Xu, Jiuhong Wang*, Weixuan Jing, Dejiang Lu, Libo Zhao, Concurrent enhancement of thermopile responsivity and response speed via thermocouple number and multi-dielectric layer engineering [J]. Applied physics letters, 128, 253303 (2026)

针对智能机器人触觉感知、人体手势识别、人体健康监测等主要应用领域，开展了柔性多参量集成传感器的研发工作，突破传感器阵列一体化加工、轻薄封装等关键技术，研究传感信号特征提取方法，实现对环境参量、人体姿态、物体材质、突发事件等信息的高效识别、分析与决策。

相关论文：

1. Zhikang Li, Shiming Zhang*, Yihang Chen, Haonan Ling, Libo Zhao*, Guoxi Luo, Xiaocheng Wang, Martin C. Hartel, Hao Liu, Yumeng Xue, Samad Ahadian, Nureddin Ashammakhi, Mehmet R. Dokmeci, Zhuangde Jiang and Ali Khademhosseini*. Gelatin methacryloyl-based tactile sensors for medical wearables [J]. Advanced Functional Materials, 2020, 30(49): 2003601. 

2. Guoxi Luo, Jiaqi Xie, Jielun Liu, Qiankun Zhang, Yunyun Luo, Min Li*, Wenke Zhou, Ke Chen, Zhikang Li, Ping Yang, Libo Zhao*, Kwok Siong Teh*, Xiaozhang Wang, Linxi Dong, Ryutaro Meada, Zhuangde Jiang. Highly conductive, stretchable, durable, breathable electrodes based on electrospun polyurethane mats superficially decorated with carbon nanotubes for multifunctional wearable electronics[J]. Chemical Engineering Journal, 2023, 451:138549.

3. Guoxi Luo, Jiaqi Xie, Jielun Liu, Yunyun Luo, Min Li*, Zhikang Li, Ping Yang, Libo Zhao*, Kaifei Wang*, Ryutaro Maeda, Zhuangde Jiang. Highly Stretchable, Knittable, Wearable Fiberform Hydrovoltaic Generators Driven by Water Transpiration for Portable Self-Power Supply and Self-Powered Strain Sensor[J]. Small, 2024, 20: 2306318.

4.  Guoxi Luo, Jiabao Tan, Wei Luo*, Jiaqi Xie, Wenyan Li, Zhikang Li, Min Li*, Ping Yang, Ryutaro Maeda, Pengjun Zhao, Libo Zhao*, Zhuangde Jiang. Modulus-matched epidermal biointerfaces for robust surface electromyography sensing [J], Bio-Design and Manufacturing, 2026, 9(4): 1–15.

量子精密测量技术作为量子信息领域三大技术之一，在国防和工业领域有着潜在重要的应用。课题组基于原子自旋效应，开发了超高灵敏量子磁强计，检测限达fT及以下，可对脑磁等极微弱生物磁场探测，可用于癫痫、抑郁症等重大疾病的诊断用心脑磁影像设备。研发了基于离子囚禁体系的量子精密测量系统，实现了10^-24N的极微弱力和1nV/m的超高分辨率电场梯度测量，有望在前沿基础科学领域中发挥重要作用。

相关论文：

1. Yintao Ma, Yao Chen*, Mingzhi Yu, Yanbin Wang, Ju Guo, Ping Yang, Qijing Lin, Lv Yang, Xiaowei Hou, and Libo Zhao*, Chip-Scale Quantum Magnetometer Empowered by Reflector-integrated All-in-one Atomic Vapor Cell [J], SCIENCE CHINA Physics, Mechanics & Astronomy, 69, 220313, 2026.

2. Yintao Ma, Pan Chen, Mingzhi Yu*, Yao Chen*, Yanbin Wang, Ju Guo, Man Zhao, Ping Yang, Qijing Lin, and Libo Zhao*, MEMS vapor cells-based Rydberg-atom electrometry toward miniaturization and high sensitivity [J], Microsystems & Nanoengineering, 12: 227, 2026.

3. Yintao Ma, Yao Chen*, Mingzhi Yu, Yanbin Wang, Ju Guo, Liubo Zhang, Ping Yang, Qijing Lin, Dejiang Lu, and Libo Zhao*, Collision-induced interaction dynamics of hyperpolarized nuclear spins in functionalized microfabricated vapor cells for chip-scale quantum devices [J], Physical Review A, 112, 023101, 2025.

4. Yintao Ma, Yao Chen*, Libo Zhao*, Guoxi Luo, Mingzhi Yu, Yanbin Wang, Ju Guo, Ping Yang, Qijing Lin, Zhuangde Jiang. The micro-fabrication and performance analysis of non-magnetic heating chip for miniaturized SERF atomic magnetometer [J]. Journal of Magnetism and Magnetic Materials, 557: 169495(10pp), 2022.9.1.

5. Yao Chen*, Mingzhi Yu, Yintao Ma, Yanbin Wang, Ju Guo, Qijing Lin, Ning Zhang, Zhuangde Jiang and Libo Zhao*. Quadrupolar interaction induced frequency shift of 131Xe nuclear spins on the surface of silicon [J]. Journal of Physics D: Applied Physics, 55: 355102(9pp), 2022.6.16.

6. Yao Chen, Libo Zhao, Ning Zhang*, Mingzhi Yu, Yintao Ma, Xiangguang Han, Man Zhao, Qijing Lin, Ping Yang, and Zhuangde Jiang. Single beam Cs-Ne SERF atomic magnetometer with the laser power differential method [J]. Opt. Express, 30:16541-16552, 2022.5.9

7. Yintao Ma, Yao Chen*, Libo Zhao*, Mingzhi Yu, Yanbin Wang, Ju Guo, Ping Yang, Qijing Lin and Zhuangde Jiang. Accurate determination of alkali-atom density based on zero-field magnetic resonance in single-beam SERF atomic magnetometer [J]. Measurement Science and Technology, 33:105003, 2022.10.1.

8. Mingzhi Yu, Yao Chen*, Yanbin Wang, Yintao Ma, Guoxi Luo, Shun Lu, Libo Zhao*, Ping Yang, Qijing Lin, Zhuangde Jiang. Plasma-activated high-strength non-isothermal anodic bonding for efficient fabrication of the micro atomic vapor cells [J]. Journal of Materials Research and Technology, 27: 1046-1057, 2023.11.18

9. Mingzhi Yu, Yao Chen*, Yongliang Wang, Xiangguang Han, Guoxi Luo, Libo Zhao*, Yanbin Wang, Yintao Ma, Shun Lu, Ping Yang, Qijing Lin, Kaifei Wang*, Zhuangde Jiang. Microfabricated Atomic Vapor Cells with Multi-Optical Channels Based on an Innovative Inner-Sidewall Molding Process [J]. Engineering, 35: 46-55, 2024.7.3

10. Yintao Ma ,Yao Chen1*,Mingzhi Yu , Yanbin Wang , Shun Lu, Ju Guo , Guoxi Luo, Libo Zhao*, Ping Yang, Qijing Lin and Zhuangde Jiang,Ultrasensitive SERF atomic magnetometer with a miniaturized hybrid vapor cell[J]. Microsystems & Nanoengineering, 10(1):121(10pp.),2024.8.30 

针对传统压电取能梁应力不均、易疲劳损坏，工作频带窄以及微型超级电容器能量密度与功率密度协同提升等难题，开发新型微能量收集器件与技术、微纳储能器件设计及制备工艺技术。

相关论文

1. .Lu Wang, Ying Zhang, Shuai Liu, Lin-Chuan Zhao, Kai-Ming Hu, Zhikang Li, Libo Zhao*, Wen-Ming Zhang*, Guang Meng. Enhanced Vibration Energy harvesting of Magnetically Coupled Piezoelectric Cantilever Beam with Double-Point Stopper [J]. Mechanical Systems and Signal Processing, 233 (2025) 112791

2. Lu Wang, Zhenxuan Fei#, Congsheng Duan, Xiangguang Han*, Min Li, Wendi Gao, Yong Xia, Chen Jia, Qijing Lin*, Yihe Zhao, Zhikang Li, Libo Zhao*, Zhuangde Jiang, and Ryutaro Maeda, Self-Sustained and Self-Wakeup Wireless Vibration Sensors by Electromagnetic-Piezoelectric-Triboelectric Hybrid Energy Harvesting [J]. Applied Energy, 355 (2024) 122207.

3. Lu Wang, Zhenxuan Fei#, Zutang Wu, Yao Ye, Youchao Qi, Jiuhong Wang, Libo Zhao*, Chi Zhang*, Yun Zhang, Guangzhao Qin, Zhuangde Jiang and Ryutaro Maeda, Wearable bending wireless sensing with autonomous wake-up by piezoelectric and triboelectric hybrid nanogenerator [J]. Nano Energy, 2023, 112: 108504. (IF=19.069)，

4. Min Li, Danqing Lu, Chen Jia*, Delai Liu, Zhikang Li, Yihe Zhao, Jie Li, Guoxi Luo*, Ping Yang, Qijing Lin, Libo Zhao*. Engineering high-performance flexible symmetric microsupercapacitors boosted by tip-electric-field effect for integrated circuits. Journal of Energy Storage, 2026,141: 119182.

主持项目（部分）

1. 国家自然科学基金-“叶企孙”科学基金：微小推力测试共形微纳敏感薄膜性能调控和干扰抑制方法，2026.01-2029.12，在研

2. 国家自然科学基金重点基金：柔性PMUTs曲面超声多参数触觉感知机理与关键技术研究，2025.01-2029.12，在研

3. 安徽省揭榜挂帅项目：面向新一代超声诊疗的高性能MEMS换能器芯片关键技术研究，2022/11-2025/10，结题

4. 国家自然科学基金重大项目课题：电静液驱动执行器热流固环境多源感知和智能健康监测，2019/01-2023/12，结题

5. 国家重点研发计划：多层异质薄膜材料的高温感知与服役特性，2020/10-2023/09，结题

6. 国家自然科学基金面上项目：基于耦合效应的高性能PMUTs工作机理与测试技术研究，2019/01-2022/12，结题

7. 陕西省杰出青年科学基金资助项目：微纳制造与先进传感技术，2019/01-2021/12，结题