高端/智能制造装备是先进制造技术、信息技术和智能技术的集成和融合。高性能传感器系统是高端装备实现智能化的首要前提。课题组长期从事微纳制造与先进传感技术的研究工作,建立了槽膜分段质量块与多梁双质量块结构的MEMS压阻式传感器力学模型与解析表达式,发明了槽膜式和多梁双质量结构的MEMS压阻敏感芯片,研制出高动态压力/加速度特种传感器,解决了压力和加速度的高灵敏度与高频响测量难题;探索了耐高温压阻式压力传感器的敏感机理,提出了压阻力敏芯片的耐高温制备工艺,解决了高温条件下的压力测量难题,克服了传统压阻传感器无法胜任高温环境的缺陷;建立了变截面悬臂梁与电容式圆板结构的MEMS谐振式传感器力学模型,揭示了MEMS谐振传感器的敏感机理;发明了变截面悬臂梁和电容式薄板结构的MEMS谐振敏感芯片,研制出了MEMS谐振式传感器,解决了流体黏密度等在线测量难题,满足了在航空航天、高端装备、国防及化工等领域的应用需求。
代表性研究成果
- Libo Zhao, Yihe Zhao, Yong Xia, Zhikang Li, Jie Li, Jiawang Zhang, Jiuhong Wang, Xiangyang Zhou*, Yuanjie Li, Yulong Zhao and Zhuangde Jiang. A Novel CMUTs-based Resonant Biochemical Sensor Using Electrospinning Technology [J]. IEEE Transactions on Industrial Electronics, 66(9): 7356-7365, 2019.9 (IF: 8.23)
- Tingzhong Xu, Libo Zhao*, Zhuangde Jiang, Shuaishuai Guo, Zhikang Li*, Ping Yang, Guoxi Luo, Lin Sun, Liangchi Zhang. Equivalent circuit models of cell and array for resonant cavity-based piezoelectric micromachined ultrasonic transducer [J]. IEEE transactions on ultrasonics, ferroelectrics, and frequency control, 67(10): 2103-2118, 2020.10 (IF: 2.72)
- Xiangguang Han, Qi Mao*, Libo Zhao*, Xuejiao Li, Li Wang, Ping Yang, Dejiang Lu, Yonglu Wang, Xin Yan, Songli Wang, Nan Zhu and Zhuangde Jiang. Novel resonant pressure sensor based on piezoresistive detection and symmetrical in-plane mode vibration [J]. Microsystems & Nanoengineering, 6: 95(11pp), 2020.11 (IF: 7.12)
- Zhikang Li, Libo Zhao*, Jie Li, Yihe Zhao, Tingzhong Xu, Shuaishuai Gu, Zicheng Liu, Guoxi Luo, Kaiming Hu, Wenming Zhang* and Zhuangde Jiang. Nonlinear behavior analysis of electrostatically actuated multilayer anisotropic microplates with residual stress [J]. Composite Structures, 255: 112964(14pp), 2021.1 (IF: 5.41)