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  • 教师姓名: 李村
  • 性别: 男
  • 职称: 教授
  • 博士生导师: 是
  • 硕士生导师: 是
  • 学历: 博士研究生毕业
  • 学位: 博士
  • 所在单位: 机械工程学院
  • 电子邮箱:
  • 办公地点: 曲江校区 精密微纳制造技术全国重点实验室 西五楼
  • Xue, H., Ai, J., Zhang, Z., Li, B., Bai, B., Li, C.*, & Zhao, Y., "Deep Wet Etching of a Z-Cut α-Quartz Wafer by Fluorine-Based Solutions: Experiment, Mechanism, and Application," in Journal of Microelectromechanical Systems, 2025, 34(3), 332-346,

  • Bu, K. ,  Li, C.* ,  Xue, H. ,  Li, B. , &  Zhao, Y. . A 14 μhz/√hz resolution and 32 μhz bias instability mems quartz resonant accelerometer with a low-noise oscillating readout circuit. Microsystems & Nanoengineering, 10(1), 1-13.

  • Kai Bu, Cun Li*, Yulong Zhao, Bo Li, Hong Xue, Jiabin Ai, Shengxiang Zhou; Nonlinear piezoelectric quartz MEMS resonator with electrically tunable stability for enhanced performance of resonant accelerometer. Appl. Phys. Lett. 16 December 2024; 125 (25): 253506. 

  • Li C*, Zhang R, Hao L, Zhao Y. Development of a MEMS Piezoresistive High-g Accelerometer with a Cross-Center Block Structure and Reliable Electrode. Sensors. 2024; 24(17):5540. 

  •  Cun Li*, Hong Xue, Yulong Zhao; Design, fabrication, and characterization of a high-sensitivity integrated quartz vibrating beam accelerometer. Rev. Sci. Instrum. 1 March 2024; 95 (3): 035005. 

  • Xue, H., Li, C.*, Zhao, Y., Bu, K., & Li, B. (2024). An All-Quartz Integrated Resonant Accelerometer With High Sensitivity and Stability: Design, Fabrication, and Measurement. IEEE Sensors Journal, 24(5), 5936-5949.

  • Cun Li*, Hong Xue, Yuhang Zhang, Jiabin Ai, Yulong Zhao. A laterally sensitive quartz vibrating beam accelerometer for inertial navigation application[J]. Sensors and Actuators A: Physical, 2024, 366: 115015.

  •  Zhang, Q.; Li, C*.; Li, H.; Liu, Y.; Wang, J.; Wang, X.; Wang, Y.; Cheng, F.; Han, H.; Zhang, P. A High-Precision Quartz Resonant Ultra-High Pressure Sensor with Integrated Pressure Conversion Structure. Micromachines 2023, 14, 1657. 

  • Hao L, Li C*, Wang L, Bai B, Zhao Y, Luo C. Design and Fabrication of a High-Temperature SOI Pressure Sensor with Optimized Crossbeam Membrane. Micromachines. 2023; 14(5):1045. 

  • Zhang Q, Li C*, Zhao Y, et al. A Quartz Resonant Ultra-High Pressure Sensor With High Precision and High Stability[J]. IEEE Sensors Journal, 2021, 21(20): 22553-22561. 

  • Bai B, Li C*, Zhao Y. Development of an effective method to reduce mechanical coupling error in a micro quartz tuning fork gyroscope[J]. Sensors and Actuators A: Physical, 2021, 332: 113058.

  • Li C, Zhang Q, Zhao Y, et al. The quality factor of quartz DETF for resonant sensors: simulation, analysis and verification[J]. Journal of Micromechanics and Microengineering, 2021, 31(11): 115001.

  • Li C, Han C, Zhao Y, et al. Research on micro-leverage in monolithic quartz resonant accelerometer[J]. Review of Scientific Instruments, 2021, 92(2): 025005.

  •  Han C, Li C*, Zhao Y, et al. High-Stability Quartz Resonant Accelerometer With Micro-Leverages[J]. Journal of Microelectromechanical Systems, 2021.

  •  Li Cun*, Han Chao, Zhao Yulong, Carl Anthony, Wei Xueyong. Seesaw Capacitive Structure as an Electrostatically Actuated Nonlinear Impact Resonator[J]. Sensors and Actuators A Physical. 2020:112279.

  • Bo Li, Cun Li*, Yulong Zhao, Chao Han, Quanwei Zhang. Deep Reactive Ion Etching of Z-Cut Alpha Quartz for MEMS Resonant Devices Fabrication. Micromachines. 2020, 11, 724.

  • Chao Han, Cun Li*, Yulong Zhao, Bo Li, Xueyong Wei. Research on a Micro-Processing Technology for Fabricating Complex Structures in Single-Crystal Quartz. Micromachines 2020, 11, 337.

  • Zhang Quanwei, Li Cun*, Zhao Yulong, Li Bo, Han, Chao. A high sensitivity quartz resonant pressure sensor with differential output and self-correction. Review of Scientific Instruments. 2019:90(6).

  •  Li Cun, Zhao Yulong*, Li Bo, Cheng Rongjun, Sun Dengqiang, Han Chao,  Zhao You. A micro-machined differential resonance accelerometer based on silicon on quartz method. Sensors and Actuators A-physical. 2017: 1-9.

  • Yulong Zhao*, Cun Li, Mengmeng Hao, Rongjun Cheng, Xiaole Fan, Pei Chen. Optical micro-electro-mechanical-system pressure sensor based on light intensity modulation[J]. Micro & Nano Letters. 2015, 10(10): 491-495.

  • Li Cun, Zhao, Yulong*, Cheng Rongjun, Yu Zhongliang. Microresonant accelerometer composed of silicon substrate and quartz double-ended tuning fork with temperature isolator , MICRO & NANO LETTERS. 2014.10, 9(10): 664~668

  • Li Cun, Zhao Yulong*, Cheng Rongjun, Yu Zhongliang, Liu Yan. A resonant sensor composed of quartz double ended tuning fork and silicon substrate for digital acceleration measurement. Rev Sci Instrum. 2014; 85(3):035004.