硕士与博士研究生：

1. 学术型，080200，机械工程，15(全日制)精密工程研究所-微纳传感与测试

2. 专业型，085501，机械工程，01(全日制)机械工程，精密工程研究所-微纳传感与测试团队

办公地点：曲江校区 精密微纳制造技术全国重点实验室 西五楼

邮箱：cun.li@xjtu.edu.cn

        国家级青年人才，青拔A类

• 2025.08-至今         西安交通大学  机械工程学院  特聘教授

• 2021.06-2025.07   西安交通大学  机械工程学院  副教授

• 2017.10-2021.06   西安交通大学  机械工程学院  讲师

• 2016.07-2017.07   University of Birmingham     CSC联培博士生

• 2012.03–2017.09   西安交通大学  仪器科学与技术  工学博士

• 2006.09–2010.06   山东大学  机械设计制造及其自动化   工学学士

1. 所在团队：

   教育部“微纳传感与控制”创新团队，负责人：赵玉龙 教授（https://gr.xjtu.edu.cn/zhaoyulong/zh_CN/index.htm）

2. 研究方向：

（1）MEMS微纳传感芯片的建模、仿真与优化

• 基于石英谐振技术的MEMS加速度计、陀螺、压力传感器芯片；

• 高频、高温、高精度的压阻式MEMS传感器芯片；

• 基于SOI技术的耐高温MEMS传感器芯片；

• 人工智能算法辅助传感器设计方法。

（2）微纳制造工艺

• 复杂单晶石英MEMS芯片的制备工艺；

• 压阻式硅MEMS芯片制备工艺；

• 3D无应力微装配工艺技术；

• 工艺参数对传感器的性能影响机理。

（3）智能传感器及软硬件信号处理电路开发

• 硅MEMS智能传感与系统；

• 闭环谐振电路及其噪音产生机理；

• FPGA、单片机与ARM系统的嵌入式开发；

• 误差机理与性能补偿电路。

主持的代表性科研项目：

1. 国家重点研发计划课题，高温高频响压力敏感元件设计及性能协同优化研究，2023年至2026年

2. xx工程课题，加速度计性能提升方法，2022年至2024年

3. 航空科学基金，微型高动态 MEMS 压力传感技术研究，2024年至2025年

4. 国家自然科学基金，亚ug级传感器的性能调控，2022年-2025年

5. 陕西省重点产业链，MEMS压力传感器系列，2021年

6. 国家自然科学基金，石英谐振传感器技术及工艺，2018年

7. 基础研究项目子课题，特种压力传感器

8. 预研项目子课题，高温压力传感器技术

9. 重点研发计划子任务，全海深CTD的研发（压力传感器工作）

10. 专利转让项目，石英谐振传感器专利转让合同

• Xue, H., Ai, J., Zhang, Z., Li, B., Bai, B., Li, C.*, & Zhao, Y., "Deep Wet Etching of a Z-Cut α-Quartz Wafer by Fluorine-Based Solutions: Experiment, Mechanism, and Application," in Journal of Microelectromechanical Systems, 2025, 34(3), 332-346,

• Bu, K. ,  Li, C.* ,  Xue, H. ,  Li, B. , &  Zhao, Y. . A 14 μhz/√hz resolution and 32 μhz bias instability mems quartz resonant accelerometer with a low-noise oscillating readout circuit. Microsystems & Nanoengineering, 10(1), 1-13.

• Kai Bu, Cun Li*, Yulong Zhao, Bo Li, Hong Xue, Jiabin Ai, Shengxiang Zhou; Nonlinear piezoelectric quartz MEMS resonator with electrically tunable stability for enhanced performance of resonant accelerometer. Appl. Phys. Lett. 16 December 2024; 125 (25): 253506. 

• Li C*, Zhang R, Hao L, Zhao Y. Development of a MEMS Piezoresistive High-g Accelerometer with a Cross-Center Block Structure and Reliable Electrode. Sensors. 2024; 24(17):5540. 

•  Cun Li*, Hong Xue, Yulong Zhao; Design, fabrication, and characterization of a high-sensitivity integrated quartz vibrating beam accelerometer. Rev. Sci. Instrum. 1 March 2024; 95 (3): 035005. 

• Xue, H., Li, C.*, Zhao, Y., Bu, K., & Li, B. (2024). An All-Quartz Integrated Resonant Accelerometer With High Sensitivity and Stability: Design, Fabrication, and Measurement. IEEE Sensors Journal, 24(5), 5936-5949.

• Cun Li*, Hong Xue, Yuhang Zhang, Jiabin Ai, Yulong Zhao. A laterally sensitive quartz vibrating beam accelerometer for inertial navigation application[J]. Sensors and Actuators A: Physical, 2024, 366: 115015.

•  Zhang, Q.; Li, C*.; Li, H.; Liu, Y.; Wang, J.; Wang, X.; Wang, Y.; Cheng, F.; Han, H.; Zhang, P. A High-Precision Quartz Resonant Ultra-High Pressure Sensor with Integrated Pressure Conversion Structure. Micromachines 2023, 14, 1657. 

• Hao L, Li C*, Wang L, Bai B, Zhao Y, Luo C. Design and Fabrication of a High-Temperature SOI Pressure Sensor with Optimized Crossbeam Membrane. Micromachines. 2023; 14(5):1045. 

• Zhang Q, Li C*, Zhao Y, et al. A Quartz Resonant Ultra-High Pressure Sensor With High Precision and High Stability[J]. IEEE Sensors Journal, 2021, 21(20): 22553-22561. 

• Bai B, Li C*, Zhao Y. Development of an effective method to reduce mechanical coupling error in a micro quartz tuning fork gyroscope[J]. Sensors and Actuators A: Physical, 2021, 332: 113058.

• Li C, Zhang Q, Zhao Y, et al. The quality factor of quartz DETF for resonant sensors: simulation, analysis and verification[J]. Journal of Micromechanics and Microengineering, 2021, 31(11): 115001.

• Li C, Han C, Zhao Y, et al. Research on micro-leverage in monolithic quartz resonant accelerometer[J]. Review of Scientific Instruments, 2021, 92(2): 025005.

•  Han C, Li C*, Zhao Y, et al. High-Stability Quartz Resonant Accelerometer With Micro-Leverages[J]. Journal of Microelectromechanical Systems, 2021.

•  Li Cun*, Han Chao, Zhao Yulong, Carl Anthony, Wei Xueyong. Seesaw Capacitive Structure as an Electrostatically Actuated Nonlinear Impact Resonator[J]. Sensors and Actuators A Physical. 2020:112279.

• Bo Li, Cun Li*, Yulong Zhao, Chao Han, Quanwei Zhang. Deep Reactive Ion Etching of Z-Cut Alpha Quartz for MEMS Resonant Devices Fabrication. Micromachines. 2020, 11, 724.

• Chao Han, Cun Li*, Yulong Zhao, Bo Li, Xueyong Wei. Research on a Micro-Processing Technology for Fabricating Complex Structures in Single-Crystal Quartz. Micromachines 2020, 11, 337.

• Zhang Quanwei, Li Cun*, Zhao Yulong, Li Bo, Han, Chao. A high sensitivity quartz resonant pressure sensor with differential output and self-correction. Review of Scientific Instruments. 2019:90(6).

•  Li Cun, Zhao Yulong*, Li Bo, Cheng Rongjun, Sun Dengqiang, Han Chao,  Zhao You. A micro-machined differential resonance accelerometer based on silicon on quartz method. Sensors and Actuators A-physical. 2017: 1-9.

• Yulong Zhao*, Cun Li, Mengmeng Hao, Rongjun Cheng, Xiaole Fan, Pei Chen. Optical micro-electro-mechanical-system pressure sensor based on light intensity modulation[J]. Micro & Nano Letters. 2015, 10(10): 491-495.

• Li Cun, Zhao, Yulong*, Cheng Rongjun, Yu Zhongliang. Microresonant accelerometer composed of silicon substrate and quartz double-ended tuning fork with temperature isolator , MICRO & NANO LETTERS. 2014.10, 9(10): 664~668

• Li Cun, Zhao Yulong*, Cheng Rongjun, Yu Zhongliang, Liu Yan. A resonant sensor composed of quartz double ended tuning fork and silicon substrate for digital acceleration measurement. Rev Sci Instrum. 2014; 85(3):035004.