建立了圆形和矩形薄膜CMUT的机电耦合模型，结合压力声学，精确建立了微加工超声传感器的静/动力学机电声三场耦合模型；开发了基于低温350℃晶圆直接键合的制备技术；提出静电纺丝功能化方法，实现气体浓度ppb灵敏度检测；实现高灵敏度的气体密度检测；集成检测电路，实现了气/液介质的超声波收发和高信噪比超声无线通信。

发表论文：

[1] Zhikang Li, Libo Zhao, Zhiying Ye, et al. Resonant frequency analysis on an electrostatically actuated microplate under uniform hydrostatic pressure[J]. Journal of physics D: Applied Physics, 2013, 46(19):195108.

[2] Libo Zhao, Jie Li, Zhikang Li, et al. Fabrication of capacitive micromachined ultrasonic transducers with low-temperature direct wafer-Bonding technology[J]. Sensors & Actuators A Physical, 2017, 264.

[3] Libo Zhao, Yihe Zhao, Yong Xia , et al. A Novel CMUTs-based Resonant Biochemical Sensor Using Electrospinning Technology[J]. IEEE Transactions on Industrial Electronics, 2018:1-1.

专利：

[1] 赵立波，李支康，蒋庄德，赵玉龙，苑国英．一种电容式微加工超声传感器及其制备与应用方法：中国，CN201210068766.4[P]．2013-12-31．

[2] 蒋庄德，李支康，赵立波，赵玉龙，苑国英．一种基于CMUT的超低量程压力传感器及其制备方法：中国，CN201210068681.6[P]．2014-7-16．