MEMS谐振黏密度传感器 - 个人简介 - 赵 立波
团队成员对谐振黏密度传感器在流体中的流固耦合特性与测量性能进行研究,建立变截面悬臂梁谐振频率与综合灵敏度理论模型,以此建立流体黏密度解耦测量方程;实现静态与动态温度、流速、压力环境下的流体在线测量与传感器性能优化,建立黏密度动态补偿测量方程、优化工作模态,实现流体高精度、高灵敏度在线测量。
发表论文:
[1] Libo Zhao, Yingjie Hu, Tongdong Wang, et al. A MEMS Resonant Sensor to Measure Fluid Density and Viscosity under Flexural and Torsional Vibrating Modes [J], Sensors, 16 (6): 830 (15pp.), 2016.
[2] Libo Zhao, Linya Huang, Yingjie Hu, et al. Temperature compensation in fluid density measurement using micro-electromechanical resonant sensor [J]. Review of Scientific Instruments, 89: 125001 (8pp), 2018.
[3] Linya Huang, Libo Zhao*, Yingjie Hu, et al. Density measurement performance in flowing liquid using microcantilever-based resonators under bending and torsion vibrations [C]. The 20th International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers 2019 - EUROSENSORS XXXIII), Berlin, Germany, June 23-27, 2019.
专利:
[1] 采用磁激励谐振压阻式悬臂梁测量直流电流或直流电压的方法,中国,发明专利,授权号:ZL 201310143552.3,授权日:2015.12.2,发明人:蒋庄德、张桂铭、赵立波、徐龙起、赵玉龙、王苑、王久洪、苑国英。
[2] 一种基于面内谐振的MEMS黏密度传感器芯片及其制备方法,中国,发明专利,申请号:ZL 201710855225.9,授权日:2019.4.12,发明人:赵立波、黄琳雅、蒋维乐、胡英杰、王久洪、李支康、苑国英、赵玉龙、蒋庄德。
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